Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films
Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes.
1. A method for deposition of a Group 6 transition metal-containing film on a substrate, the method comprising:
First, introducing a vapor of the Group 6 transition metal-containing film forming composition into a reactor containing a substrate and depositing at least part of the precursor onto the substrate to form the Group 6 transition metal-containing film wherein the composition comprises a precursor having the formula MEE′XX′·L n , wherein M=Mo or W; E and E′ independently=O or S; X and X′ independently=Cl, Br, or I; L is an adduct; and n=1 or 2, and
Second, introducing a vapor or a reactant to thereby form an M containing film selected from a pure M film, an M silicide or germanide film, an M oxide film, an M nitride film, an M dichalcogenide film, or an M oxynitride film.
2. The method of claim 1 , wherein the Group 6 transition metal-containing film is selectively deposited onto the substrate.
3. The method of claim 1 , wherein L is an ester.
4. The method of claim 1 , wherein the precursor is MoO 2 Cl 2 ( n C 5 H 11 —CN) 2 , MoO 2 Cl 2 ·(methyl hexanoate) 2 , MoO 2 Cl 2 ·(amyl acetate) 2 , or MoO 2 Cl 2 ·( n Bu-O—CH 2 —CH 2 —O— n Bu).