Monoalkyl tin compounds with low polyalkyl contamination, their compositions and methods
A pure composition comprises a monoalkyltin trialkoxide compound represented by the chemical formula RSn(OR′) 3 or a monoalkyl tin triamide compound represented by the chemical formula RSn(NR′ 2 ) 3 and no more than 4 mole % dialkyltin compounds relative to the total tin amount, where R is a hydrocarbyl group with 1-31 carbon atoms, and wherein R′ is a hydrocarbyl group with 1-10 carbon atoms. Methods are described for the formation of the pure compositions. A solid composition comprises a monoalkyl triamido tin compound represented by the chemical formula RSn—(NR′COR″) 3 , where R is a hydrocarbyl group with 1-31 carbon atoms, and where R′ and R″ are independently a hydrocarbyl group with 1-10 carbon atoms. The compositions are suitable for the formation of resist compositions suitable for EUV patterning in which the compositions have a high EUV absorption.
1. A composition comprising:
a monoalkyl triamido tin compound represented by the chemical formula RSn—(NR′COR″) 3 , wherein R is a hydrocarbyl group with 1-31 carbon atoms, and wherein R′ and R″ are independently a hydrocarbyl group with 1-10 carbon atoms.
2. The composition of claim 1 wherein R′ is a methyl group.
3. The composition of claim 1 wherein R″ is a methyl group.
4. The composition of claim 1 wherein R′ is a methyl group and R″ is a methyl group.
5. The composition of claim 4 wherein R comprises methyl (CH 3 —), ethyl (CH 3 CH 2 —), isopropyl (CH 3 CH 3 HC—), tert-butyl ((CH 3 ) 3 C—), tert-amyl (CH 3 CH 3 (CH 3 CH 2 )C—), sec-butyl (CH 3 (CH 3 CH 2 ) HC—), neopentyl (CH 3 ) 3 CCH 2 —), cyclohexyl, cyclopentyl, cyclobutyl, or cyclopropyl.
6. The composition of claim 5 wherein the composition is crystalline and comprises no more than about 1 mole percent dialkyl tin contaminants.
7. The composition of claim 1 wherein R comprises methyl (CH 3 —), ethyl (CH 3 CH 2 —), isopropyl (CH 3 CH 3 HC—), tert-butyl ((CH 3 ) 3 C—), tert-amyl (CH 3 CH 3 (CH 3 CH 2 )C—), sec-butyl (CH 3 (CH 3 CH 2 ) HC—), neopentyl (CH 3 ) 3 CCH 2 —), cyclohexyl, cyclopentyl, cyclobutyl, or cyclopropyl.
8. The composition of claim 1 wherein the composition is crystalline and comprises no more than about 1 mole percent dialkyl tin contaminants.
9. The composition of claim 1 wherein the composition is crystalline and comprises no more than about 0.5 mole percent dialkyl tin contaminants.