Apparatus for thermally processing a substrate
An apparatus for thermally processing a substrate includes a substrate support for holding the substrate and lamps disposed above the substrate support. The lamps are grouped into concentric lamp zones including a center zone comprised of a center lamp and peripheral lamps surrounding the center lamp. A center sleeve is coupled to the center lamp and peripheral sleeves are coupled to the peripheral lamps, respectively, for directing radiated heat to the substrate during thermal processing. The center sleeve has a higher surface roughness than that of the peripheral sleeves.
1. An apparatus for thermally processing a substrate, comprising:
a substrate support for holding the substrate;
a plurality of lamps disposed above the substrate support, wherein the plurality of lamps is grouped into concentric lamp zones including a center zone comprised of a center lamp and peripheral lamps surrounding the center lamp; and
a plurality of reflective sleeves including a center sleeve coupled to the center lamp and peripheral sleeves coupled to the peripheral lamps, respectively, for directing radiated heat to the substrate during thermal processing, wherein the center sleeve has a surface roughness higher than that of the peripheral sleeves.
2. The apparatus according to claim 1 , wherein the plurality of lamps is tungsten-halogen lamps.
3. The apparatus according to claim 1 , wherein the substrate support comprises an edge ring, and wherein the substrate is supported on its periphery by the edge ring.
4. The apparatus according to claim 3 , wherein the edge ring comprises an annular sloping shelf contacting corner of the substrate.
5. The apparatus according to claim 1 , wherein the center lamp is surrounded by six peripheral lamps.
6. The apparatus according to claim 1 , wherein the center sleeve has a surface roughness of about 0.8-3.2 Ra, while the peripheral sleeves have a surface roughness of smaller than 0.4 Ra.
7. The apparatus according to claim 1 , wherein the center sleeve and the peripheral sleeves comprise copper and gold.
8. The apparatus according to claim 1 , wherein a transparent quartz window is disposed between the plurality of reflective sleeves and the substrate support.