Substrate support designs for a deposition chamber
The present disclosure generally relates to a substrate support that includes a body having a substrate receiving surface, the body comprising a dielectric material. The body also includes a first foil embedded in the body below the substrate receiving surface. The body also includes an electrically conductive mesh embedded in the body below the first foil. The body also includes a center tap structure formed in a bottom surface of the body that is in electrical communication with the mesh.
1. A substrate support, comprising:
a body having a substrate receiving surface and a bottom surface, the body comprising a dielectric material;
a support arm assembly comprising:
a support arm having a rounded interface portion disposed at a first end thereof and a mounting portion disposed at a second end thereof, the mounting portion including a distal end with converging sides;
a cable guide configured to engage the rounded interface portion; and
a channel formed in a lower side of the support arm and extending between the mounting portion and the rounded interface portion, wherein the cable guide includes a groove aligned with the channel;
an electrically conductive mesh entirely embedded in the body;
a center tap structure formed in a bottom surface of the body that is in electrical communication with the electrically conductive mesh;
a dielectric cover plate having a rounded member and a linear extension extending from the rounded member, the dielectric cover plate configured to engage a bottom portion of the support arm to cover the channel;
a dielectric cover having a generally circular shape with a radial recess, the dielectric cover configured to connect to the rounded interface portion of the support arm such that the radial recess engages the cable guide; and
a spacing member disposed within the channel of the support arm and configured to extend along a temperature sensor cable from the rounded interface portion to the mounting portion.
2. The substrate support of claim 1 , wherein the body is coupled to the support arm in a cantilevered manner.
3. The substrate support of claim 1 , wherein the support arm is constructed to contain a ground cable that couples with the center tap structure.
4. The substrate support of claim 1 , wherein the cable guide includes a curved portion.
5. The substrate support of claim 1 , wherein the support arm comprises the spacing member comprising a dielectric material.
6. The substrate support of claim 5 , wherein the spacing member comprises an elongate member comprising an electrically conductive coating.
7. The substrate support of claim 5 , wherein the spacing member comprises a plurality of dielectric members.
8. The substrate support of claim 1 , wherein the cable guide is positioned between the support arm and the body.
9. The substrate support of claim 1 , wherein the body comprises a plurality of centering features.
10. A substrate support, comprising:
a body having a substrate receiving surface and a bottom surface, the body comprising a dielectric material;
a support arm assembly comprising:
a support arm having a rounded interface portion disposed at a first end thereof and a mounting portion disposed at a second end thereof, the mounting portion including a distal end with converging sides;
a cable guide configured to engage the rounded interface portion; and
a channel formed in a lower side of the support arm and extending between the mounting portion and the rounded interface portion, wherein the cable guide includes a groove aligned with the channel;
a center tap structure formed in the bottom surface that is in electrical communication with an electrically conductive mesh;
a plurality of connecting members coupled to the body, the plurality of connecting members including an eyelet that is coupled to the center tap structure;
a temperature sensor comprising:
a temperature sensor head configured to engage with the body, and
a temperature sensor cable configured to be disposed within the groove of the cable guide and to extend along the support arm from the rounded interface portion to the mounting portion within the channel; and
a spacing member disposed within the channel of the support arm and configured to extend along the temperature sensor cable from the rounded interface portion to the mounting portion.
11. The substrate support of claim 10 , wherein the body is coupled to the support arm in a cantilevered manner.
12. The substrate support of claim 10 , wherein the support arm is constructed to contain a ground cable that couples with the center tap structure.
13. The substrate support of claim 10 , wherein the support arm includes a hollow shaft that is constructed to contain the temperature sensor that couples between the body and the hollow shaft.
14. The substrate support of claim 10 , the spacing member comprises an electrically conductive coating.
15. The substrate support of claim 10 , wherein the support arm comprises a plurality of dielectric members.
16. A substrate support, comprising:
a body having a substrate receiving surface and a bottom surface, the body comprising a dielectric material;
a support arm assembly comprising:
a support arm having a rounded interface portion disposed at a first end thereof and a mounting portion disposed at a second end thereof, the mounting portion including a distal end with converging sides;
a cable guide configured to engage the rounded interface portion; and
a channel formed in a lower side of the support arm and extending between the mounting portion and the rounded interface portion, wherein the cable guide includes a groove aligned with the channel;
a center tap structure formed in the bottom surface that is in electrical communication with an electrically conductive mesh;
a plurality of connecting members coupled to the body, the plurality of connecting members including an eyelet that is coupled to the center tap structure;
a dielectric cover plate having a rounded member and a linear extension extending from the rounded member, the dielectric cover plate configured to engage a bottom portion of the support arm to cover the channel;
a dielectric cover having a generally circular shape with a radial recess, the dielectric cover configured to connect to the rounded interface portion of the support arm such that the radial recess engages the cable guide;
a temperature sensor comprising:
a temperature sensor head configured to engage with the body, and
a temperature sensor cable configured to be disposed within the groove of the cable guide and to extend along the support arm from the rounded interface portion to the mounting portion within the channel; and
a spacing member disposed within the channel of the support arm and configured to extend along the temperature sensor cable from the rounded interface portion to the mounting portion.
17. The substrate support of claim 16 , wherein the support arm is constructed to contain a ground cable that couples with the center tap structure.
18. The substrate support of claim 16 , wherein the support arm includes a hollow shaft that is constructed to contain the temperature sensor that couples between the body and the hollow shaft.
19. The substrate support of claim 16 , wherein the support arm comprises the spacing member comprising a dielectric material.