Semiconductor device
A semiconductor device includes a substrate provided with an integrated circuit and a contact, an interlayer dielectric layer covering the integrated circuit and the contact, a through electrode penetrating the substrate and the interlayer dielectric layer, a first intermetal dielectric layer on the interlayer dielectric layer, and first and second wiring patterns in the first intermetal dielectric layer. The first wiring pattern includes a first conductive pattern on the through electrode, and a first via penetrating the first intermetal dielectric layer and connecting the first conductive pattern to the through electrode. The second wiring pattern includes a second conductive pattern on the contact, and a second via penetrating the first intermetal dielectric layer and connecting the second conductive pattern to the contact. A first width in a first direction of the first via is greater than a second width in the first direction of the second via.
1. A semiconductor device, comprising:
a substrate that includes a first region and a second region;
an integrated circuit provided at the first region of the substrate;
an interlayer dielectric layer on the substrate;
a contact on the first region, the contact penetrating the interlayer dielectric layer to be connected to the integrated circuit;
a through electrode at the second region, the through electrode penetrating the substrate and the interlayer dielectric layer;
a capping layer on the substrate, the capping layer covering the integrated circuit and the contact;
a first intermetal dielectric layer on the capping layer;
a first conductive pattern in the first intermetal dielectric layer, wherein the first conductive pattern is disposed on the second region; and
a plurality of first vias penetrating the first intermetal dielectric layer and the capping layer and connecting the through electrode to the first conductive pattern, the plurality of first vias being arranged in a plurality of rows extending in a first direction and a plurality of columns extending in a second direction,
wherein the first and second directions intersect each other and are parallel to a top surface of the substrate,
wherein each of the plurality of first vias has a bar shape that extends in the first direction,
wherein each row of the plurality of first vias is formed of at least two first vias arranged in the first direction,
wherein a sum of a width, in the first direction, of each of the at least two first vias in each row of the plurality of first vias is equal to or less than a width, in the first direction, of a corresponding portion of the first conductive pattern,
wherein the at least two first vias contact the corresponding portion of the first conductive pattern, and
wherein the plurality of first vias are interposed between the first conductive pattern and the through electrode.
2. The semiconductor device of claim 1 , further comprising:
a second conductive pattern in the first intermetal dielectric layer on the first region; and
a second via penetrating the first intermetal dielectric layer and the capping layer and connecting the contact to the second conductive pattern,
wherein a width, in the first direction, of each of the plurality of first vias is greater than a width, in the first direction, of the second via.
3. The semiconductor device of claim 2 ,
wherein the width, in the first direction, of each of the plurality of first vias is about 2 times to about 50 times the width, in the first direction, of the second via.
4. The semiconductor device of claim 1 ,
wherein a width, in the first direction, of each of the plurality of first vias is greater than a width, in the second direction, of each of the plurality of first vias.
5. The semiconductor device of claim 4 ,
wherein the width, in the first direction, of each of the plurality of first vias is about 2 times to about 100 times the width, in the second direction, of each of the plurality of first vias.
6. The semiconductor device of claim 1 ,
wherein ones of the first vias are connected to each other in the first direction, the ones of the first vias constituting a single row in the first direction.
7. The semiconductor device of claim 2 ,
wherein an aspect ratio of each of the plurality of first vias is greater than an aspect ratio of the second via.
8. The semiconductor device of claim 1 ,
wherein a width, in the first direction, of the first conductive pattern is greater than the width, in the first direction, of each of the plurality of first vias.
9. The semiconductor device of claim 1 ,
wherein, when viewed in a plan view, the first conductive pattern has a mesh shape that connects the plurality of first vias with each other.
10. The semiconductor device of claim 1 , further comprising:
a second intermetal dielectric layer on the first intermetal dielectric layer;
a third conductive pattern on the through electrode; and
a third via vertically penetrating the second intermetal dielectric layer and being connected to the first conductive pattern, and
wherein the third via has a bar shape that extends in the first direction.
11. A semiconductor device, comprising:
an integrated circuit provided at a substrate;
an interlayer dielectric layer on the substrate;
a contact penetrating the interlayer dielectric layer and being electrically connected to the integrated circuit;
a through electrode penetrating the substrate and the interlayer dielectric layer;
a plurality of wiring layers stacked on the interlayer dielectric layer;
a first pad on the plurality of wiring layers; and
a second pad on a bottom surface of the substrate and connected to the through electrode,
wherein each of the plurality of wiring layers includes:
a capping layer;
an intermetal dielectric layer on the capping layer;
a plurality of conductive patterns in the intermetal dielectric layer;
a plurality of first vias on the through electrode, wherein the plurality of first vias penetrate the capping layer and the intermetal dielectric layer to be connected to a first conductive pattern of the plurality of conductive patterns, wherein the plurality of first vias are arranged in a plurality of rows extending in a first direction, wherein each row of the plurality of first vias is formed of at least two first vias arranged in the first direction, and wherein the first direction is parallel to a top surface of the substrate; and
a plurality of second vias on the contact, the plurality of second vias penetrating the capping layer and the intermetal dielectric layer to be connected to a second conductive pattern of the plurality of conductive patterns,
wherein a sum of a width, in the first direction, of each of the at least two first vias in each row of the plurality of first vias is equal to or less than a width, in the first direction, of a corresponding portion of the first conductive pattern, and
wherein the at least two first vias are protruded from a bottom surface of the first conductive pattern.
12. The semiconductor device of claim 11 ,
wherein, when viewed in a plan view, an aspect ratio of each of the plurality of first vias is greater than an aspect ratio of each of the plurality of second vias.
13. The semiconductor device of claim 12 ,
wherein the plurality of conductive patterns are connected to each other to form a mesh shape, and
wherein the aspect ratio of the plurality of first vias is in a range of from about 2 to about 50.
14. The semiconductor device of claim 11 ,
wherein the through electrode is connected to a plurality of first vias of a lowermost one of the plurality of wiring layers, and
wherein the contact is connected to a plurality of second vias of a lowermost wiring layer of the plurality of wiring layers.
15. The semiconductor device of claim 14 ,
wherein in each of the wiring layers, the plurality of first vias are interposed between the first conductive pattern and the through electrode.
16. The semiconductor device of claim 11 ,
wherein the plurality of first vias are arranged in the plurality of rows extending in the first direction and a plurality of columns extending in a second direction,
wherein the first and second directions intersect each other and the second direction is parallel to the top surface of the substrate, and
wherein the at least two first vias of each row of the plurality of first vias are connected to each other via a corresponding conductive pattern of the plurality of conductive patterns.
17. The semiconductor device of claim 11 ,
wherein each of the plurality of the first vias has a bar shape that extends in the first direction.
18. The semiconductor device of claim 11 ,
wherein a second direction intersects the first direction and is parallel to the top surface of the interlayer dielectric layer,
wherein a first width of each of the plurality of the first vias is greater than a second width of each of the plurality of the first vias, and
wherein the first width is about 2 times to about 100 times the second width.
19. The semiconductor device of claim 11 ,
wherein a width, in the first direction, of each of the plurality of the first vias is greater than a width, in the first direction, of each of the plurality of the second vias.
20. The semiconductor device of claim 19 ,
wherein the width of each of the plurality of the first vias is about 2 times to about 50 times the width of each of the plurality of the second vias.