Semiconductor device and method of manufacturing semiconductor device
A method of manufacturing a semiconductor device may include forming a stack with alternately stacked first material layers and second material layers, forming an opening passing through the stack, forming a memory layer in the opening, forming a slit passing through the stack and exposing the first material layers and the second material layers, and forming first barrier patterns, without removing the second material layers, by partially oxidizing the memory layer through the second material layers.
1. A semiconductor device comprising:
a gate structure with alternately stacked conductive layers and insulating layers;
a channel layer passing through the gate structure;
a memory layer positioned between the channel layer and the conductive layers; and
barrier patterns positioned between the channel layer and the insulating layers and separated from each other by the memory layer,
wherein each of the barrier patterns includes a sidewall facing the memory layer, and the sidewall includes a curved surface.
2. The semiconductor device of claim 1 , wherein the memory layer is extended between the channel layer and the barrier patterns.
3. The semiconductor device of claim 1 , wherein the memory layer includes memory patterns that are separated from each other by the barrier patterns.
4. The semiconductor device of claim 1 , wherein, in each of the barrier patterns, an area that faces the insulating layers and an area that faces the channel layer are different.
5. The semiconductor device of claim 1 , wherein the barrier patterns include silicon nitride oxide, silicon oxide, or a combination thereof.
6. A semiconductor device comprising:
a gate structure with alternately stacked conductive layers and insulating layers;
a channel layer passing through the gate structure;
a tunnel insulating layer surrounding the channel layer;
a memory layer surrounding the tunnel insulating layer;
a blocking layer surrounding the memory layer; and
barrier patterns between the tunnel insulating layer and the insulating layers and separated from each other by the memory layer,
wherein each of the barrier patterns includes a first sidewall facing the memory layer, and the first sidewall is not straight.