Stage, film-forming apparatus, and film-processing apparatus
Disclosed is a stage including a first supporting plate, a second supporting plate under the first supporting plate, a shaft under the second supporting plate and overlapping with the first supporting plate and the second supporting plate, and at least one sheath heater passing through the second supporting plate. The at least one sheath heater is arranged so as to extend on a first surface and a second surface which are parallel to an upper surface of the second supporting plate and which are different in distance from the first supporting plate from each other.
1. A stage comprising:
a first supporting plate;
a second supporting plate located under the first supporting plate and having a first through hole and a second through hole;
a shaft located under the second supporting plate and overlapping with the first supporting plate and the second supporting plate; and
at least one sheath heater comprising a heater wire, an insulator surrounding the heater wire, a metal sheath surrounding the insulator and configured to receive thermal energy from the heater wire, and a lead wiring electrically connected to the heater wire,
wherein the metal sheath passes through the first through hole and the second through hole of the second supporting plate and includes an upper portion and a lower portion respectively extending on a first plane and a second plane which are parallel to an upper surface of the second supporting plate and which are different in distance from the first supporting plate,
wherein the metal sheath has two bent portions respectively bent at the first through hole and the second through hole,
the upper portion extends from the first through hole to the second through hole,
the metal sheath contains stainless steel,
the first supporting plate and the second supporting plate each contain aluminum, and
wherein the upper portion is exposed from the upper surface of the second supporting plate, and
the lower portion extending on the second plane is exposed from a lower surface of the second supporting plate.
2. The stage according to claim 1 , further comprising a third supporting plate located under the second supporting plate and overlapping with the lower portion.
3. The stage according to claim 1 ,
wherein the upper portion orthogonally overlaps the lower portion with the second supporting plate sandwiched therebetween.
4. The stage according to claim 2 ,
wherein the second supporting plate has a first trench on the upper surface, and
the upper portion extends in the first trench.
5. The stage according to claim 2 ,
wherein the second supporting plate has a second trench on a lower surface, and
the lower portion extends in the second trench.
6. The stage according to claim 1 ,
wherein the first supporting plate has a third trench on a lower surface, and
the upper portion extends in the third trench.
7. The stage according to claim 2 ,
wherein the third supporting plate has a fourth trench on an upper surface, and
the lower portion extends in the fourth trench.
8. The stage according to claim 1 ,
wherein the at least one sheath heater includes a plurality of sheath heaters.
9. The stage according to claim 8 ,
wherein the plurality of sheath heaters includes a first sheath heater and a second sheath heater, and
the lower portion of the second sheath heater overlaps the upper portion of the first sheath heater extending on the first plane with the second supporting plate sandwiched therebetween.
10. The stage according to claim 1 ,
wherein the lead wiring extends on the second plane to a region where the second supporting plate overlaps with the shaft.
11. The stage according to claim 1 ,
wherein the heater wire has a helical structure.
12. The stage according to claim 1 ,
wherein the heater wire has a ribbon shape.
13. The stage according to claim 1 ,
wherein the heater wire is folded in the metal sheath and has a double-helical structure.
14. The stage according to claim 1 ,
wherein an external diameter of the metal sheath is equal to or more than 3.0 mm and equal to or less than 11.0 mm.
15. The stage according to claim 1 ,
wherein the metal sheath extends diagonally with respect to the first plane between the upper portion and the lower portion.
16. A film-forming apparatus comprising the stage according to claim 1 .
17. A film-processing apparatus comprising the stage according to claim 1 .
18. The stage according to claim 1 , wherein a cross section of the metal sheath perpendicular to an extending direction thereof is circular.