IP Library › Granted Patent US 12,216,013
Granted Patent B2
US 12,216,013 · App. 18/388,473 · Granted Feb 4, 2025

Miniature pressure/force sensor with integrated leads

Inventors: Michael W. Davis (Rockford, MN); Peter F. Ladwig (Hutchinson, MN); Matthew S. Lang (Excelsior, MN); Dean E. Myers (Stewart, MN); Clark T. Olsen (Dassel, MN); Douglas P. Riemer (Waconia, MN)
Assignee: Hutchinson Technology Incorporated
G01L1/2268G01L1/146
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Quick Facts
Patent No.
US 12,216,013
App. No.
18/388,473
Granted
Feb 4, 2025
Kind
B2
Abstract

A pressure/force sensor comprises a diaphragm structure including a sensing element and a lead structure extending from the diaphragm structure and including first and second traces electrically coupled to the sensing element. The diaphragm structure and the lead structure include a circuit assembly comprising a common insulating layer and a common conductor layer on the insulating layer. The conductor layer includes at least a portion of the sensing element and at least the first trace.

Claims (27)

1. A capacitive pressure sensor, comprising:

a first trace assembly, including:

a spring metal diaphragm including a base portion and a moving portion;

an insulating layer including a diaphragm portion on the moving portion of the diaphragm and a lead portion extending from the diaphragm; and

a conductor layer on the insulating layer including an electrode on the diaphragm portion and a trace extending from the electrode on the lead portion; and

a second trace assembly joined to the first trace assembly, including:

a diaphragm including a base;

an insulating layer having a diaphragm portion on the diaphragm and a lead portion extending from the diaphragm; and

a conductor layer on the insulating layer including an electrode on the diaphragm portion and a trace extending from the electrode on the lead portion.

2. The pressure sensor of claim 1 wherein the base portion of the first trace assembly is joined to the base portion of the second trace assembly.

3. The pressure sensor of claim 1 and further including a spacer, and wherein the base portions of the first and second trace assemblies are joined to the spacer.

4. The pressure sensor of claim 1 wherein the spring metal diaphragm includes a plurality of arms coupling the moving portion to the base portion.

5. A capacitive pressure sensor, comprising:

a trace assembly, including:

a spring metal diaphragm including a base portion and a moving portion;

an insulating layer having a diaphragm portion on the moving portion of the diaphragm and a lead portion extending from the diaphragm;

a conductor layer on the insulating layer including an electrode on the diaphragm portion and a trace extending from the electrode on the lead portion; and

a metal can electrically and mechanically connected to the base portion of the spring metal diaphragm and defining a void adjacent the moving portion of the spring metal diaphragm.

6. A capacitive pressure sensor, comprising:

an insulating layer including a diaphragm portion, a lead portion, and first and second opposite sides;

a conductor layer on the first side of the insulating layer including:

an electrode on the diaphragm portion;

a first trace extending from the electrode on the lead portion; and

a second trace on the lead portion;

a metal spacer member on the second side of the insulating layer around the electrode;

a conductive via electrically connecting the second trace to the metal spacer member; and

a metal electrode member mechanically and electrically joined to the metal spacer member.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 28, 2024
From: DAVIS, MICHAEL W.; LADWIG, PETER F.; LANG, MATTHEW S.; MYERS, DEAN E.; OLSEN, CLARK T.; RIEMER, DOUGLAS P.
To: HUTCHINSON TECHNOLOGY INCORPORATED
Reel/Frame 066589/0901 →
Continuity (5)
Continuation 17587865 · Jan 28, 2022
Division 15424282 · Feb 3, 2017
Provisional Application 62403765 · Oct 4, 2016
Provisional Application 62290789 · Feb 3, 2016
Related Publication 20240068889A1 · Feb 29, 2024
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