Current sensing resistors and method of manufacturing the same
Current sensing resistors and a method of manufacturing the same are disclosed in the present invention. A composite material is firstly provided in the method. Then, a first portion of an alloy substrate of the composite material is removed along a first direction to form a plurality of first trenches. Next, a second portion of the alloy substrate of the composite material is removed along a second direction to form a plurality of second trenches, and a third portion of the alloy substrate of the composite material is further removed along the first direction to form the current sensing resistors. The current sensing resistors with small dimensions and an extremely low temperature coefficient of resistance can be produced rapidly by the method of the present invention.
1. A method of manufacturing current sensing resistors, comprising:
providing a composite material, wherein the composite material comprises an insulating layer and an alloy substrate disposed on the insulating layer, and a temperature coefficient of resistance of the alloy substrate is lower than 50 ppm/° C.;
removing a first portion of the alloy substrate of the composite material along a first direction to form a plurality of first trenches on an upper surface of the alloy substrate;
removing a second portion of the alloy substrate of the composite material along a second direction to form a plurality of second trenches, wherein the insulating layer is exposed by the plurality of second trenches, and the second direction is not parallel to the first direction; and
removing a third portion of the alloy substrate along the first direction to form a plurality of third trenches and a plurality of resistive elements after forming the plurality of second trenches, wherein the insulating layer is exposed by the plurality of third trenches, each of the third trenches is disposed between adjacent two of the first trenches, and the plurality of resistive elements are arranged in an array on the insulating layer.
2. The method of claim 1 , wherein the alloy substrate has a thickness smaller than 0.5 mm.
3. The method of claim 1 , wherein the alloy substrate comprises CuMnSn or CuMnNi.
4. The method of claim 1 , further comprising removing a portion of a bottom surface of each of the first trenches after forming the resistive elements.
5. The method of claim 1 , wherein an aspect ratio of each of the first trenches is 0.1 to 0.35, respectively.
6. The method of claim 1 , wherein the first direction is perpendicular to the second direction.
7. The method of claim 1 , wherein removing the first, the second, and the third portion of the alloy substrate includes dicing or scraping the surface of the alloy substrate.
8. The method of claim 1 , wherein the insulating layer is bonded with the alloy layer by binders.
9. The method of claim 1 , wherein an insulating material is coated on the alloy substrate to form the insulating layer.
10. The method of claim 1 , wherein an alloy material is deposited on the insulating layer to form the alloy substrate.
11. The method of claim 1 , further comprising filling a protective material into each of the first trenches to form a protective layer after forming the plurality of third trenches.
12. The method of claim 11 , further comprising separating each of the resistive elements to obtain the current sensing resistors after forming the protective layer.
13. The method of claim 12 , further comprising forming an alloy layer on each of the current sensing resistors.
14. A current sensing resistor manufactured by the method of claim 1 , wherein a long side of the current sensing resistor is smaller than 1.8 mm, and the current sensing resistor has a temperature coefficient of resistance lower than 50 ppm/° C.