Method for manufacturing nitride semiconductor device and nitride semiconductor device
A method for manufacturing nitride semiconductor device includes a second step of forming, on a gate layer material film, a gate electrode film that is a material film of a gate electrode, a third step of selectively etching the gate electrode film to form the gate electrode 22 of a ridge shape, and a fourth step of selectively etching the gate layer material film to form a semiconductor gate layer 21 of a ridge shape with the gate electrode 22 disposed at a width intermediate portion of a front surface thereof. The third step includes a first etching step for forming a first portion 22 A from an upper end to a thickness direction intermediate portion of the gate electrode 22 and a second etching step being a step differing in etching condition from the first etching step and being for forming a remaining second portion 22 B of the gate electrode.
1. A method for manufacturing nitride semiconductor device comprising:
a first step of forming a first nitride semiconductor layer that constitutes an electron transit layer, a second nitride semiconductor layer that constitutes an electron supply layer, and a gate layer material film that is a material film of a nitride semiconductor gate layer containing an acceptor type impurity in that order above a substrate;
a second step of forming, on the gate layer material film, a gate electrode film that is a material film of a gate electrode;
a third step of selectively etching the gate electrode film to form the gate electrode of a ridge shape;
a fourth step of selectively etching the gate layer material film to form the semiconductor gate layer of a ridge shape with the gate electrode disposed at a width intermediate portion of a front surface thereof; and
a fifth step of forming a passivation film such as to cover an exposed front surface of the second nitride semiconductor layer, side surfaces and an exposed front surface of the nitride semiconductor gate layer, and side surfaces of the gate electrode; and
wherein the third step includes a first etching step for forming a first portion from an upper end to a thickness direction intermediate portion of the gate electrode and a second etching step being a step differing in etching condition from the first etching step and being for forming a remaining second portion of the gate electrode and
the exposed front surface of the second nitride semiconductor layer, the side surfaces and the exposed front surface of the nitride semiconductor gate layer, and the side surfaces of the gate electrode are covered by the same passivation film.
2. The method for manufacturing nitride semiconductor device according to claim 1 , wherein a thickness of the gate electrode film removed by the first etching step is greater than a thickness of the gate electrode film removed by the second etching step.
3. The method for manufacturing nitride semiconductor device according to claim 1 , wherein if inclination angles of both side surfaces of the first portion with respect to the front surface of the semiconductor gate layer when a width of the first portion becomes narrower as the second portion is approached are expressed by angles of not less than 90 degrees and inclination angles of both side surfaces of the first portion with respect to the front surface of the semiconductor gate layer when the width of the first portion becomes wider as the second portion is approached are expressed by angles of not more than 90 degrees, an average inclination angle of the respective side surfaces of the first portion with respect to the front surface of the semiconductor gate layer is within a range of not less than 80 degrees and not more than 95 degrees.
4. The method for manufacturing nitride semiconductor device according to any claim 1 , wherein an etching rate in a vertical direction per unit time of the second etching step is slower than an etching rate in the vertical direction per unit time of the first etching step.
5. The method for manufacturing nitride semiconductor device according to claim 1 , wherein a lateral direction amount that is etched in the second etching step is greater than a lateral direction amount that is etched in the first etching step.
6. The method for manufacturing nitride semiconductor device according to claim 1 , wherein the second etching step is dry etching.
7. The method for manufacturing nitride semiconductor device according to claim 1 , wherein the second etching step is wet etching.
8. The method for manufacturing nitride semiconductor device according to claim 6 , wherein the first etching step is dry etching.
9. The method for manufacturing nitride semiconductor device according to claim 1 , further comprising: a step between the third step and the fourth step of forming a first insulating film on the gate layer material film such as to cover the gate electrode and thereafter etching back the first insulating film to form side walls that cover the side surfaces of the gate electrode.
10. The method for manufacturing nitride semiconductor device according to claim 9 , further comprising: a step between the second step and the third step of forming a second insulating film on a front surface of the gate electrode film layer and thereafter selectively etching the second insulating film to form a mask on the front surface of the gate electrode film layer; and
wherein in the third step, the gate electrode film is etched using the mask.
11. The method for manufacturing nitride semiconductor device according to claim 9 , further comprising: a step between the fourth step and the fifth step of removing the side walls.
12. The method for manufacturing nitride semiconductor device according to claim 10 , further comprising: a step between the fourth step and the fifth step of removing the mask and the side walls.
13. The method for manufacturing nitride semiconductor device according to claim 1 , further comprising after the fifth step:
a step of forming a barrier metal on the passivation film;
a step of forming a source contact hole and a drain contact hole that penetrate through the barrier metal and the passivation film at positions opposing each other across the semiconductor gate layer;
a step of forming, on the barrier metal, a source/drain electrode film that covers at least the source contact hole and the drain contact hole; and
a step of selectively etching the source/drain electrode film and the barrier metal to form a source electrode and a drain electrode are further included after the fifth step.
14. A nitride semiconductor device comprising:
a substrate;
a first nitride semiconductor layer that is formed above the substrate and constitutes an electron transit layer;
a second nitride semiconductor layer that is formed on the first nitride semiconductor layer, is greater in bandgap than the first nitride semiconductor layer, and constitutes an electron supply layer;
a semiconductor gate layer of ridge shape that is formed on the second nitride semiconductor layer and contains an acceptor type impurity;
a gate electrode of ridge shape that is formed on a width intermediate portion of a front surface of the semiconductor gate layer;
a passivation film that is formed such as to cover an exposed surface of a front surface of the second nitride semiconductor layer and side surfaces and a front surface of the gate electrode; and
a source electrode and a drain electrode that are disposed on the second nitride semiconductor layer to oppose each other across the semiconductor gate layer; and
wherein the gate electrode, in a sectional view in a ridge width direction, is constituted of a first portion of rectangular shape and a second portion that projects downward from a width intermediate portion of a lower surface of the first portion, and
the exposed surface of the front surface of the second nitride semiconductor layer and the side surfaces and the front surface of the gate electrode are covered by the same passivation film.
15. The nitride semiconductor device according to claim 14 , wherein if inclination angles of both side surfaces of the first portion with respect to the front surface of the semiconductor gate layer when a width of the first portion becomes narrower as the second portion is approached are expressed by angles of not less than 90 degrees and inclination angles of both side surfaces of the first portion with respect to the front surface of the semiconductor gate layer when the width of the first portion becomes wider as the second portion is approached are expressed by angles of not more than 90 degrees, an average inclination angle of the respective side surfaces of the first portion with respect to the front surface of the semiconductor gate layer is within a range of not less than 80 degrees and not more than 95 degrees.
16. The nitride semiconductor device according to claim 14 , wherein
the first nitride semiconductor layer is constituted of a GaN layer,
the second nitride semiconductor layer is constituted of an AlxGa1-xN (0<x≤1) layer, and
the semiconductor gate layer is constituted of a p type GaN layer.
17. The nitride semiconductor device according to claim 14 , wherein the acceptor impurity is Mg or Zn.
18. The nitride semiconductor device according to claim 14 , wherein the gate electrode is in Schottky contact with the semiconductor gate layer.