Display apparatus and method of manufacturing the same
A display apparatus is disclosed that includes contact holes formed to expose at least a portion of a conductive layer or a semiconductor layer without damage to the surface of the conductive layer or the semiconductor layer, and a method of manufacturing the display apparatus. The display apparatus includes a substrate, a conductive mound arranged on the substrate, a first insulating mound arranged on the substrate, and a semiconductor layer including a first region arranged on the conductive mound, and a second region arranged on the first insulating mound. The second region of the semiconductor layer substantially covers an upper surface of the first insulating mound.
1. A method of manufacturing a display apparatus, the method comprising:
forming a conductive mound on a substrate;
forming a first insulating mound on the substrate; and
forming a semiconductor layer including a first region arranged on the conductive mound, and a second region arranged on the first insulating mound,
wherein the second region of the semiconductor layer substantially covers an upper surface of the first insulating mound, and
wherein the first insulating mound includes organic material.
2. The method of claim 1 , wherein the forming of the semiconductor layer comprises:
forming a semiconductor material layer on the substrate;
forming a photoresist pattern on the semiconductor material layer; and
etching at least a portion of the semiconductor material layer by using the photoresist pattern as an etch mask,
wherein the forming of the first insulating mound comprises:
forming an insulating material layer on the conductive mound; and
etching at least a portion of the insulating material layer by using the photoresist pattern as an etch mask.
3. The method of claim 1 , further comprising forming a second insulating mound between the conductive mound and the first region of the semiconductor layer.
4. The method of claim 3 , wherein the forming of the first insulating mound is performed simultaneously with the forming of the second insulating mound.
5. The method of claim 3 , wherein the forming of the semiconductor layer comprises:
forming a semiconductor material layer on the substrate;
forming a photoresist pattern on the semiconductor material layer; and
etching at least a portion of the semiconductor material layer by using the photoresist pattern as an etch mask,
wherein the forming of the second insulating mound comprises:
forming an insulating material layer on the conductive mound; and
etching at least a portion of the insulating material layer by using the photoresist pattern as an etch mask.