Three-dimensional semiconductor memory devices
A three-dimensional (3D) semiconductor memory device includes a source structure disposed on a horizontal semiconductor layer and including a first source conductive pattern and a second source conductive pattern which are sequentially stacked on the horizontal semiconductor layer, an electrode structure including a plurality of electrodes vertically stacked on the source structure, and a vertical semiconductor pattern penetrating the electrode structure and the source structure, wherein a portion of a sidewall of the vertical semiconductor pattern is in contact with the source structure. The first source conductive pattern includes a discontinuous interface at a level between a top surface of the horizontal semiconductor layer and a bottom surface of the second source conductive pattern.
1. A three-dimensional (3D) semiconductor memory device comprising:
a horizontal semiconductor layer;
a source structure on the horizontal semiconductor layer, the source structure comprising a first source conductive pattern and a second source conductive pattern which are sequentially stacked on the horizontal semiconductor layer;
a first stack on the source structure, the first stack comprising a plurality of first electrodes vertically stacked on the source structure;
a second stack on the first stack, the second stack comprising a plurality of second electrodes vertically stacked on the source structure; a vertical semiconductor pattern penetrating the first and second stacks and the source structure, wherein a portion of a sidewall of the vertical semiconductor pattern is in contact with the source structure; and
a common source structure penetrating the first and second stacks and the source structure and spaced apart from the vertical semiconductor pattern, the common source structure comprising:
a common source plug connected to the horizontal semiconductor layer; and
an insulating spacer disposed between the common source plug and the first and second stacks,
wherein the first source conductive pattern has a first thickness in a vertical direction perpendicular to a top surface of the horizontal semiconductor layer, the second source conductive pattern has a second thickness in the vertical direction, and the second thickness is different from the first thickness,
wherein the common source structure includes a first portion adjacent to the first source conductive pattern, a second portion adjacent to the second source conductive pattern, and a third portion adjacent to the horizontal semiconductor layer, and
wherein a width of the first portion is greater than a width of the second portion.
2. The 3D semiconductor memory device of claim 1 ,
wherein the first portion of the common source structure has an inflection point between the horizontal semiconductor layer and the first source conductive pattern.
3. The 3D semiconductor memory device of claim 1 ,
wherein the common source structure has a decreasing width with decreasing distance from the horizontal semiconductor layer, in a region between the lowermost one of the plurality of first electrodes and the horizontal semiconductor layer, and
wherein the width of the first portion is greater than a width of the third portion.
4. The 3D semiconductor memory device of claim 1 ,
wherein the common source plug includes a discontinuous interface extending in the vertical direction, and
wherein the discontinuous interface is enclosed by the first source conductive pattern.
5. The 3D semiconductor memory device of claim 1 ,
wherein the vertical semiconductor pattern including a first portion penetrating the first stack and a second portion penetrating the second stack, and
wherein the vertical semiconductor pattern has an inflection point between the first portion and the second portion.
6. The 3D semiconductor memory device of claim 1 ,
wherein the horizontal semiconductor layer has a third thickness in the vertical direction, and the third thickness is different from the first thickness and the second thickness.
7. The 3D semiconductor memory device of claim 1 ,
wherein a bottom surface of the common source plug is located at a different level from a bottom surface of the vertical semiconductor pattern.
8. The 3D semiconductor memory device of claim 1 ,
wherein the common source plug includes a discontinuous interface extending in the vertical direction.
9. The 3D semiconductor memory device of claim 1 ,
wherein the first source conductive pattern comprises:
a horizontal portion extending in parallel to a bottom surface of the first stack and disposed under the bottom surface of the first stack; and
a sidewall portion extending from the horizontal portion in the vertical direction and surrounding the portion of the sidewall of the vertical semiconductor pattern, and
wherein the horizontal portion of the first source conductive pattern has the first thickness.
10. The 3D semiconductor memory device of claim 1 ,
wherein the first source conductive pattern comprises:
a lower portion adjacent to the top surface of the horizontal semiconductor layer; and
an upper portion adjacent to a bottom surface of the second source conductive pattern.
11. The 3D semiconductor memory device of claim 1 ,
wherein the first and second source conductive patterns include a semiconductor material doped with impurities having a first conductivity type, and
wherein a concentration of the impurities in the first source conductive pattern is greater than a concentration of the impurities in the second source conductive pattern.
12. The 3D semiconductor memory device of claim 1 , further comprising:
a data storage pattern vertically extending between the vertical semiconductor pattern and each of the first and second stacks; and
a dummy data storage pattern vertically spaced apart from the data storage pattern and disposed between the vertical semiconductor pattern and the horizontal semiconductor layer,
wherein a bottom surface of the data storage pattern is in contact with a portion of the first source conductive pattern.
13. A three-dimensional (3D) semiconductor memory device comprising:
a horizontal semiconductor layer;
a source structure on the horizontal semiconductor layer, the source structure comprising a first source conductive pattern and a second source conductive pattern which are sequentially stacked on the horizontal semiconductor layer;
a first stack on the source structure, the first stack comprising a plurality of first electrodes vertically stacked on the source structure;
a second stack on the first stack, the second stack comprising a plurality of second electrodes vertically stacked on the source structure; and
a vertical semiconductor pattern penetrating the first and second stacks and the source structure, wherein a portion of a sidewall of the vertical semiconductor pattern is in contact with the source structure; and
a common source structure penetrating the first and second stacks and the source structure and spaced apart from the vertical semiconductor pattern, the common source structure comprising:
a common source plug connected to the horizontal semiconductor layer; and
an insulating spacer disposed between the common source plug and the first and second stacks,
wherein the first source conductive pattern has a first thickness in a vertical direction perpendicular to a top surface of the horizontal semiconductor layer, the second source conductive pattern has a second thickness in the vertical direction, and the second thickness is different from the first thickness,
wherein the common source structure includes a first portion adjacent to the horizontal semiconductor layer, a second portion adjacent to the source structure, and a third portion adjacent to the first stack, and
wherein the second portion of the common source structure has an inflection point between the horizontal semiconductor layer and the first source conductive pattern.
14. The 3D semiconductor memory device of claim 13 ,
wherein the top surface of the horizontal semiconductor layer has a recessed region under the common source plug, the source structure has a first sidewall adjacent to the common source plug, and the first sidewall of the source structure is misaligned with an inner wall of the recessed region.
15. The 3D semiconductor memory device of claim 14 ,
wherein a sidewall of the first source conductive pattern is misaligned with the inner wall of the recessed region, and a sidewall of the second source conductive pattern is misaligned with the sidewall of the first source conductive pattern.
16. The 3D semiconductor memory device of claim 13 ,
wherein the common source plug includes a discontinuous interface extending in the vertical direction.
17. The 3D semiconductor memory device of claim 16 ,
wherein the discontinuous interface is enclosed by the first source conductive pattern.
18. A three-dimensional (3D) semiconductor memory device comprising:
peripheral circuits integrated on a semiconductor substrate;
peripheral interconnection lines connected to the peripheral circuits;
a lower insulating layer covering the peripheral circuits and the peripheral interconnection lines;
a horizontal semiconductor layer on the lower insulating layer;
a source structure on the horizontal semiconductor layer, the source structure comprising a first source conductive pattern and a second source conductive pattern which are sequentially stacked on the horizontal semiconductor layer;
a first stack on the source structure, the first stack comprising a plurality of first electrodes vertically stacked on the source structure;
a second stack on the first stack, the second stack comprising a plurality of second electrodes vertically stacked on the source structure;
a vertical semiconductor pattern penetrating the first and second stacks and the source structure;
a data storage pattern vertically extending between the vertical semiconductor pattern and the first and second stacks; and
a common source structure penetrating the first and second stacks and the source structure and spaced apart from the vertical semiconductor pattern, the common source structure comprising:
a common source plug connected to the horizontal semiconductor layer; and
an insulating spacer disposed between the common source plug and the first and second stacks,
wherein the first source conductive pattern has a first thickness in a vertical direction perpendicular to a top surface of the horizontal semiconductor layer, the second source conductive pattern has a second thickness in the vertical direction, the horizontal semiconductor layer has a third thickness in the vertical direction, the first thickness is greater than the second thickness, and the third thickness is greater than the first thickness,
wherein the common source structure includes a first portion adjacent to the first source conductive pattern and a second portion adjacent to the second source conductive pattern,
wherein a width of the first portion is greater than a width of the second portion, and
wherein the second portion has a decreasing width with decreasing distance from the horizontal semiconductor layer.
19. The 3D semiconductor memory device of claim 18 ,
wherein the second portion of the common source structure has an inflection point between the horizontal semiconductor layer and the first source conductive pattern.
20. The 3D semiconductor memory device of claim 18 ,
wherein the second portion of the common source structure has a maximum width in a region adjacent to the first source conductive pattern.