Magnetic sensor including magnetic detection element including bottom surface facing inclined surface
A magnetic sensor includes a substrate including a top surface; an insulating layer disposed on the substrate, the insulating layer including first and second inclined surfaces each inclined with respect to the top surface of the substrate; and an MR element structure. An MR element is disposed on the first inclined surface or the second inclined surface. The MR element includes a bottom surface facing the first inclined surface or the second inclined surface, a top surface, and a first surface connecting the bottom surface and the top surface and including two steps.
1. A magnetic sensor comprising:
a substrate including a reference plane;
a support member disposed on the substrate, the support member including an inclined surface inclined with respect to the reference plane; and
a magnetic detection element structure including a bottom surface, at least a part of which faces the inclined surface, a top surface on a side opposite to the bottom surface, and a first surface connecting the bottom surface and the top surface and including two steps.
2. The magnetic sensor according to claim 1 , wherein the magnetic detection element structure further includes a second surface connecting the bottom surface and the top surface on a side of a direction away from the first surface along the inclined surface.
3. The magnetic sensor according to claim 2 , wherein the second surface has a shape asymmetrical to a shape of the first surface about a virtual plane as a center, the virtual plane crossing the magnetic detection element structure and being perpendicular to the inclined surface.
4. The magnetic sensor according to claim 3 , wherein the second surface includes fewer steps than the first surface.
5. The magnetic sensor according to claim 1 , wherein the magnetic detection element structure includes a lower electrode and a magnetic detection element disposed on the lower electrode, and is configured such that a current flows in a stacking direction of the lower electrode and the magnetic detection element.
6. The magnetic sensor according to claim 5 , wherein the magnetic detection element includes a free layer and a magnetization pinned layer, the free layer having a magnetization whose direction is variable depending on an external magnetic field, the magnetization pinned layer having a magnetization whose direction is fixed, the magnetization pinned layer being provided between the free layer and the inclined surface.
7. The magnetic sensor according to claim 5 , wherein:
one of the two steps is present on the magnetic detection element; and
another of the two steps is present between the magnetic detection element and the lower electrode.
8. The magnetic sensor according to claim 5 , wherein:
one of the two steps is present between the magnetic detection element and the lower electrode; and
another of the two steps is present on the lower electrode.
9. The magnetic sensor according to claim 1 , wherein the first surface includes a curved surface portion.
10. The magnetic sensor according to claim 1 , wherein the inclined surface is a curved surface.
11. The magnetic sensor according to claim 1 , wherein the inclined surface is a flat surface.
12. The magnetic sensor according to claim 1 , further comprising:
an insulating layer; and
an upper electrode, wherein:
the magnetic detection element structure includes a lower electrode and a magnetic detection element disposed on the lower electrode;
the upper electrode is disposed at a position where the magnetic detection element is sandwiched between the upper electrode and the lower electrode; and
the insulating layer is disposed around the magnetic detection element structure between the lower electrode and the upper electrode.
13. The magnetic sensor according to claim 1 , wherein:
the support member includes a protruding surface protruding in a direction away from the reference plane; and
the protruding surface includes the inclined surface and another inclined surface inclined with respect to the reference plane and facing a direction different from a direction of the foregoing inclined surface.
14. The magnetic sensor according to claim 13 , further comprising another magnetic detection element structure including a bottom surface, at least a part of which faces the other inclined surface, a top surface on a side opposite to the bottom surface, and two surfaces each connecting the bottom surface and the top surface,
wherein each of the two surfaces of the other magnetic detection element structure includes fewer steps than the first surface.