Substrate support assembly for substrate treatment apparatus
The present invention relates to a substrate support assembly for a substrate treatment apparatus, including: a chuck base disposed opposite to a substrate when the substrate is installed, rotatable around a rotating shaft, and having an installation accommodation portion formed in the lower portion near the outer peripheral surface thereof in a circumferential direction thereof; chuck pins disposed on top of the chuck base and movable along directions away from and approaching the substrate; a mechanism unit disposed in the installation accommodation portion and connected to the chuck pins to move the chuck pins; and a driving unit for transmitting power to the mechanism unit.
1. A substrate support assembly for a substrate treatment apparatus, comprising:
a chuck base disposed opposite to a substrate when the substrate is installed, rotatable around a rotating shaft, and having an installation accommodation portion formed in the lower portion near the outer peripheral surface thereof in a circumferential direction thereof;
chuck pins disposed on top of the chuck base and movable along directions away from and approaching the substrate;
a mechanism unit disposed in the installation accommodation portion and connected to each of the chuck pins to move each of the chuck pins; and
a driving unit for transmitting power to the mechanism unit,
wherein the mechanism unit comprises:
a first operating piece returnably movable in a direction of the rotating shaft by means of the driving unit; and
a second operating piece having one side coming into contact with the first operating piece along a longitudinal direction thereof, allowing each of the chuck pins to be disposed on the other side thereof, and returnably moving around a hinge shaft disposed on the chuck base between one side and the other side thereof,
wherein between the first operating piece and the chuck base is disposed a first spring applying a restoring force or a first magnet applying a magnetic force in a direction of the first operating piece and the chuck base away from each other along the rotating shaft, and between the second operating piece and the chuck base is disposed a second spring applying a restoring force or a second magnet applying a magnetic force so that each of the chuck pins moves to a holding position.
2. The substrate support assembly according to claim 1 , wherein the width of the installation accommodation portion in a radial direction of the substrate is set within the range of ⅕ to ⅓ of the radius of the substrate.
3. The substrate support assembly according to claim 1 , wherein two or more sets of assemblies each having each of the chuck pins, the mechanism unit, and the driving unit are equally spaced apart from one another around the rotating shaft.
4. The substrate support assembly according to claim 1 , wherein the second operating piece has a slant surface formed on the underside of one side coming into contact with the first operating piece, and as the first operating piece moves up in the direction of the rotating shaft, the second operating piece moves around the hinge shaft.
5. The substrate support assembly according to claim 1 , wherein a portion of the second operating piece, which is oriented toward each of the chuck pins from the hinge shaft, is located above a portion of the second operating piece, which is oriented toward the first operating piece from the hinge shaft, and the portion oriented toward each of the chuck pins is separated from the portion oriented toward the first operating piece in an up and down direction by means of a separation wall.
6. The substrate support assembly according to claim 1 , wherein in a plan view, the second operating piece is extended to the shape of an arch along the circumferential direction of the chuck base.
7. The substrate support assembly according to claim 1 , wherein the first operating piece is movable up and down along two guide rods disposed vertically in the installation accommodation portion, and any one of the two guide rods is surrounded with the first spring.
8. The substrate support assembly according to claim 1 , wherein the chuck pins, second operating pieces, a conductive medium constituting the chuck base, and a motor for rotating the chuck base are electrically connected to one another.
9. The substrate support assembly according to claim 5 , wherein the chuck base has checkup holes formed along the outer peripheral surface thereof to allow the portion oriented toward each of the chuck pins to be exposed to the outside.
10. The substrate support assembly according to claim 5 , wherein a weight of the portion oriented toward the first operating piece is greater than a weight of the portion oriented toward each of the chuck pins.
11. The substrate support assembly according to claim 5 , wherein the portion of the second operating piece oriented toward the first operating piece has an auxiliary weight attached thereto with a higher density than the second operating piece, and the sum of the weight of the portion oriented toward the first operating piece and the weight of the auxiliary weight is larger than the weight of the portion oriented toward each of the chuck pins.
12. The substrate support assembly according to claim 10 , wherein inside the installation accommodation portion or on the separation wall is disposed a stopper opposed laterally to the portion oriented toward each of the chuck pins in the radial direction of the chuck base.
13. The substrate support assembly according to claim 11 , wherein on the chuck base or the separation wall is disposed a stopper facing the portion of the second operating piece oriented toward each of the chuck pins in a lateral direction in the radial direction of the chuck base.
14. The substrate support assembly according to claim 1 , wherein the driving unit comprises:
a pusher coming into contact with the mechanism unit; and
a driver connected to the pusher.
15. The substrate support assembly according to claim 14 , wherein the first operating piece has a connection groove formed on the underside thereof, and the pusher has an operating protrusion protruding from top thereof and coupled complementarily to the connection groove of the first operating piece.
16. The substrate support assembly according to claim 14 , wherein the driver comprises:
a support frame with pushers disposed thereon in the circumferential direction thereof;
a pressurizing rod connected to the support frame and spaced apart from the pushers inwardly; and
a driving source spaced apart from the pushers inwardly and connected to the pressurizing rod, and
between the pushers and the pressurizing rod is disposed a curtain wall.
17. The substrate support assembly according to claim 16 , wherein the driving source is hermetically encased by a housing and connected to the pressurizing rod through top of the housing.