Heterojunction bipolar transistor with amorphous semiconductor regions
The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich region and methods of manufacture. The structure includes: a heterojunction bipolar transistor comprising a collector region, a base region and an emitter region; and at least one non-single-crystal semiconductor region in the collector region of the heterojunction bipolar transistor.
1. A structure comprising:
a heterojunction bipolar transistor comprising a collector region, a base region and an emitter region; and
at least one non-single-crystal semiconductor region in the collector region of the heterojunction bipolar transistor,
wherein the non-single-crystal semiconductor region is vertically above a sub-collector region of the heterojunction bipolar transistor and within the collector region.
2. The structure of claim 1 , further comprising a sub-collector region vertically below the collector region, and the at least one non-single-crystal semiconductor region being above the sub-collector region within the collector region.
3. The structure of claim 1 , further comprising a shallow trench isolation structure below the base region of the heterojunction bipolar transistor, and the at least one non-single-crystal semiconductor region abutting the shallow trench isolation structure.
4. A structure comprising:
a heterojunction bipolar transistor comprising a collector region, a base region and an emitter region; and
at least one non-single-crystal semiconductor region in the collector region of the heterojunction bipolar transistor,
wherein the at least one non-single-crystal semiconductor region contacts a sidewall and/or a bottom of a shallow trench isolation structure below the base region of the heterojunction bipolar transistor.
5. The structure of claim 4 , wherein the at least one non-single-crystal semiconductor region contacts a sub-collector region of the heterojunction bipolar transistor.
6. The structure of claim 3 , wherein the at least one non-single-crystal semiconductor region contacts a sidewall of the shallow trench isolation structure.
7. The structure of claim 3 , wherein the at least non-single-crystal semiconductor region contacts a bottom of the shallow trench isolation structure.
8. The structure of claim 1 , wherein the at least one non-single-crystal semiconductor region is close to a base collector junction and at a corner of a shallow trench isolation structure within the collector region.
9. The structure of claim 1 , wherein the at least one non-single-crystal semiconductor region comprises a trap rich semiconductor material.
10. The structure of claim 1 , wherein the at least non-single-crystal semiconductor region comprises amorphous Si.
11. The structure of claim 1 , wherein the at least one non-single-crystal semiconductor region comprises a polysilicon material.
12. The structure of claim 1 , further comprising at least one other transistor on a same substrate as the heterojunction bipolar transistor and being devoid of the non-single-crystal semiconductor region which comprises at least one amorphous semiconductor region.
13. A structure comprising:
a heterojunction bipolar transistor comprising a collector region, a base region and an emitter region;
a shallow trench isolation structure below the base region in a semiconductor substrate of the collector region;
at least one amorphous semiconductor region close to a junction of the base region and the collector region and a corner of the shallow trench isolation structure; and
at least one other transistor on a same substrate as the heterojunction bipolar transistor and being devoid of the at least one amorphous semiconductor region.
14. The structure of claim 13 , wherein the heterojunction bipolar transistor comprises a sub-collector region vertically below the collector region, and the at least one amorphous semiconductor region being above the sub-collector region within the collector region.
15. The structure of claim 13 , wherein the at least one amorphous semiconductor region contacts a sidewall and bottom of the shallow trench isolation structure.
16. The structure of claim 13 , wherein the at least one amorphous semiconductor region contacts a sidewall or a bottom of the shallow trench isolation structure.
17. The structure of claim 13 , wherein the at least one amorphous semiconductor region is close to a base collector junction and at a corner of the shallow trench isolation structure within the collector region.
18. The structure of claim 13 , wherein the at least one amorphous semiconductor region comprises a polysilicon material.
19. A method comprising:
forming a heterojunction bipolar transistor comprising a collector region, a base region and an emitter region;
forming at least one amorphous semiconductor region in the collector region of the heterojunction bipolar transistor; and
forming at least one other transistor on a same substrate as the heterojunction bipolar transistor and being devoid of the at least one amorphous semiconductor region.