IP Library › Granted Patent US 12,241,848
Granted Patent B2
US 12,241,848 · App. 18/350,361 · Granted Mar 4, 2025

Inspection apparatus and inspection method

Inventor: Takeo Tsukamoto (Niigata, JP)
Assignee: CANON ANELVA CORPORATION
G01N23/18G01N23/04G01N23/083G01N23/20008G01N23/2206G01N23/223G21K7/00H01J35/186G01N2223/04G01N2223/052G01N2223/071G01N2223/076G01N2223/1016G01N2223/20G01N2223/204G01N2223/32G01N2223/643G01N2223/652
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Quick Facts
Patent No.
US 12,241,848
App. No.
18/350,361
Granted
Mar 4, 2025
Kind
B2
Abstract

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane, and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector includes a long X-ray receiver.

Claims (34)

1. An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, comprising:

an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and

an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface,

wherein the X-ray detector includes a long X-ray receiver.

2. The inspection apparatus according to claim 1 , further comprising a processor configured to perform processing of detecting the foreign substance based on an output from the X-ray detector.

3. The inspection apparatus according to claim 2 , wherein that the processor further performs processing of specifying a material forming the foreign substance.

4. The inspection apparatus according to claim 1 , wherein that a distance between the inspection plane and the X-ray generation portion is not larger than 5 mm.

5. The inspection apparatus according to claim 1 , wherein that a distance between the inspection plane and the X-ray generation portion is not larger than 3 mm.

6. The inspection apparatus according to claim 1 , wherein that an angle formed by the inspection plane and a virtual line connecting a center of the X-ray receiver and an intersection point of the inspection plane and an axis of the X-ray generation tube is not larger than 5°.

7. The inspection apparatus according to claim 1 , wherein that an angle formed by the inspection plane and a virtual line connecting a center of the X-ray receiver and an intersection point of the inspection plane and an axis of the X-ray generation tube is not larger than 2°.

8. The inspection apparatus according to claim 6 , further comprising a slit member having a slit on the virtual line.

9. The inspection apparatus according to claim 1 , further comprising an X-ray detection panel configured to detect X-rays emitted from the X-ray generation portion and transmitted through an inspection target object having the inspection target surface.

10. The inspection apparatus according to claim 1 , wherein that the X-ray generation tube is of a sealed transmission type.

11. The inspection apparatus according to claim 1 , wherein that the X-ray generation tube includes a target holding plate configured to hold the target, and a thickness of the target holding plate is not larger than 4 mm.

12. The inspection apparatus according to claim 11 , wherein that the target holding plate contains diamond.

13. The inspection apparatus according to claim 1 , wherein that a longitudinal direction of the X-ray receiver is parallel to a surface parallel to the inspection target surface.

14. The inspection apparatus according to claim 13 , further comprising a conveyance mechanism configured to convey an inspection target object having the inspection target surface,

wherein the conveyance mechanism conveys the inspection target object in a conveyance direction parallel to the inspection plane, and

the longitudinal direction is parallel to the conveyance direction.

15. The inspection apparatus according to claim 1 , wherein that a longitudinal direction of the X-ray receiver is parallel to a direction intersecting the inspection plane.

16. The inspection apparatus according to claim 1 , wherein that a longitudinal direction of the X-ray receiver is parallel to a direction orthogonal to the inspection plane.

17. An inspection apparatus for inspecting an inspection target object having a first inspection target surface and a second inspection target surface, comprising:

an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection target object; and

an X-ray detector including an X-ray receiver configured to receive X-rays emitted from a foreign substance existing on the first inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the first inspection target surface and X-rays emitted from a foreign substance existing on the second inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the second inspection target surface,

wherein the X-ray receiver is arranged to intersect a first virtual plane including the first inspection target surface and a second virtual plane including the second inspection target surface.

18. An inspection method of inspecting an inspection target surface arranged on an inspection plane, comprising:

an X-ray detection step of emitting X-rays to the inspection plane and detecting, by an X-ray detector including a long X-ray receiver, X-rays emitted from a foreign substance existing on the inspection target surface and totally reflected by the inspection target surface; and

a processing step of processing an output of the X-ray detector.

19. The inspection method according to claim 18 , wherein the processing step includes a step of detecting the foreign substance.

20. The inspection method according to claim 18 , wherein the processing step includes a step of specifying a material forming the foreign substance.

21. The inspection method according to claim 18 , further comprising a step of detecting, by an X-ray detection panel, X-rays transmitted through an inspection target object having the inspection target surface,

wherein in the processing step, the output of the X-ray detector and an output of the X-ray detection panel are processed.

22. The inspection method according to claim 21 , wherein the processing step includes a step of detecting existence of the foreign substance and a position of the foreign substance based on the output of the X-ray detection panel.

23. The inspection method according to claim 21 , wherein the processing step includes a step of detecting existence of the foreign substance, a position of the foreign substance, and a size of the foreign substance based on the output of the X-ray detection panel.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 11, 2023
From: TSUKAMOTO, TAKEO
To: CANON ANELVA CORPORATION
Reel/Frame 064214/0469 →
Priority Claims (1)
JP 2022-013653 · Jan 31, 2022 · national
Continuity (2)
Continuation PCTJP2022043906 · Nov 29, 2022
Related Publication 20230349846A1 · Nov 2, 2023
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