Treatment liquid for semiconductor with ruthenium and method of producing the same
Provided is a treatment liquid for a semiconductor with ruthenium, containing a hypobromite ion. Also provided is a treatment liquid for a semiconductor with ruthenium, containing at least a bromine-containing compound, an oxidizing agent, a basic compound, and water which are added and mixed, wherein the liquid has the bromine-containing compound added in an amount of 0.01 mass % or more and less than 2 mass % as a bromine element content with respect to the total mass of the liquid, has the oxidizing agent added in an amount of 0.1 mass % or more and 10 mass % or less with respect to the total mass, and has a pH of 8 or more and 14 or less. Further provided is a method of producing a treatment liquid for a semiconductor with ruthenium, including a step of mixing a bromine-containing compound with a solution containing a hypochlorous acid compound and a basic compound.
1. A treatment liquid for a semiconductor with ruthenium, comprising a hypobromite ion, wherein the hypobromite ion content is 0.001 mol/L or more and 0.20 mol/L or less,
wherein the treatment liquid has a pH of 12 or more and 14 or less, and
wherein the ruthenium is a ruthenium metal.
2. The treatment liquid for a semiconductor according to claim 1 , wherein the treatment liquid for a semiconductor further comprises an oxidizing agent, and the oxidation-reduction potential of the oxidizing agent exceeds the oxidation-reduction potential of the hypobromite ion/Br − system.
3. The treatment liquid for a semiconductor according to claim 2 , wherein the oxidizing agent contained in the treatment liquid for a semiconductor is a hypochlorite ion or ozone.
4. The treatment liquid for a semiconductor according to claim 1 , further comprising a tetraalkylammonium ion.
5. The treatment liquid for a semiconductor according to claim 1 , wherein the proportion of the hypobromite ion in 1 mol of bromine element contained in the treatment liquid for a semiconductor is more than 0.5 mol.
6. The treatment liquid for a semiconductor according to claim 2 , wherein the proportion of the hypobromite ion in 1 mol of bromine element contained in the treatment liquid for a semiconductor is more than 0.5 mol.