Magnetic sensor including magnetic detection element disposed on inclined surface
A magnetic sensor includes a substrate including a top surface; an insulating layer disposed on the substrate, the insulating layer including first and second inclined surfaces each inclined with respect to the top surface of the substrate; and an MR element. The MR element is disposed on the first inclined surface or the second inclined surface. The MR element includes a first side surface including a first portion and a second portion, the first portion and the second portion having different angles with respect to the first inclined surface or the second inclined surface.
1. A magnetic sensor comprising:
a support member including an inclined surface inclined with respect to a reference plane; and
a magnetic detection element disposed on the inclined surface, the magnetic detection element including a first side surface including a first portion and a second portion, the first portion and the second portion having different angles with respect to the inclined surface.
2. The magnetic sensor according to claim 1 , wherein:
the second portion is disposed at a position farther from the inclined surface than a position where the first portion is disposed; and
an angle that the second portion forms with respect to the inclined surface is larger than an angle that the first portion forms with respect to the inclined surface.
3. The magnetic sensor according to claim 1 , wherein each of the first portion and the second portion is a curved surface.
4. The magnetic sensor according to claim 1 , wherein the magnetic detection element further includes a second side surface disposed forward of the first side surface in a direction along the inclined surface, the direction being a direction closer to the reference plane.
5. The magnetic sensor according to claim 4 , wherein the second side surface has a shape symmetrical to a shape of the first side surface about a virtual plane as a center, the virtual plane crossing the magnetic detection element and being perpendicular to the inclined surface.
6. The magnetic sensor according to claim 4 , wherein the second side surface has a shape asymmetrical to a shape of the first side surface about a virtual plane as a center, the virtual plane crossing the magnetic detection element and being perpendicular to the inclined surface.
7. The magnetic sensor according to claim 1 , wherein the magnetic detection element includes a plurality of stacked magnetic layers, and is configured such that a current flows in a stacking direction of the plurality of magnetic layers.
8. The magnetic sensor according to claim 7 , wherein the plurality of magnetic layers include a free layer and a magnetization pinned layer, the free layer having a magnetization whose direction is variable depending on an external magnetic field, the magnetization pinned layer having a magnetization whose direction is fixed, the magnetization pinned layer being provided between the free layer and the inclined surface.
9. The magnetic sensor according to claim 7 , wherein:
the plurality of magnetic layers include a first magnetic layer and a second magnetic layer;
the magnetic detection element further includes a gap layer disposed between the first magnetic layer and the second magnetic layer;
at least a part of the first portion is formed by a side surface of the first magnetic layer; and
at least a part of the second portion is formed by a side surface of the second magnetic layer.
10. The magnetic sensor according to claim 1 , wherein the inclined surface is a curved surface.
11. The magnetic sensor according to claim 1 , wherein the inclined surface is a flat surface.
12. The magnetic sensor according to claim 1 , further comprising:
a lower electrode, (i) at least a part of the lower electrode being disposed on the inclined surface, (ii) the lower electrode being provided between the magnetic detection element and the inclined surface, (iii) the lower electrode including a side surface having a varying angle with respect to the inclined surface.
13. The magnetic sensor according to claim 1 , further comprising:
a lower electrode provided between the magnetic detection element and the inclined surface;
an upper electrode disposed at a position where the magnetic detection element is sandwiched between the upper electrode and the lower electrode; and
an insulating layer disposed around the magnetic detection element between the lower electrode and the upper electrode.
14. The magnetic sensor according to claim 1 , wherein a dimension of the first portion in a direction along the inclined surface is greater than a dimension of the second portion in the direction along the inclined surface, the direction along the inclined surface being a direction in which a distance from the reference plane changes.
15. The magnetic sensor according to claim 14 , wherein the first portion is disposed forward of the second portion in the direction along the inclined surface, the direction along the inclined surface being a direction away from the reference plane.