Granted Patent B2

US 12,252,774 · App. 17/228,745 · Granted Mar 18, 2025

Inventors: William E. Quinn (Whitehouse Station, NJ); Gregory McGraw (Yardley, PA)

Assignee: Universal Display Corporation

C23C14/228B41J2/04B41J2/155B41J3/543B41J25/308B41J25/3086B41J25/316C23C14/04C23C14/12C23C14/24H10K50/11H10K71/00H10K71/16H10K71/164B41J2202/20H10K2102/321

Abstract

Claims (23)

1. A print bar for organic vapor jet (OVJP) deposition, the print bar comprising:

n print head segments, each of the print head segments comprising an OVJP print head, wherein n is a positive integer with a value that is greater than or equal to 2;

each segment of the n print head segments comprising at least one distance sensor and two actuators, each of the distance sensor of the each respective segment configured to measure a distance between a substrate disposed below the each respective segment, and the two actuators of the each respective segment are configured to adjust at least one of a position and an orientation of the each respective segment based upon one or more distances between the substrate and the each respective segment measured by the at least one distance sensor of the each respective segment; and

at least one sensor to align the OVJP print head to one or more features disposed on the substrate.

2. The print bar of claim 1 , wherein the print bar comprises not more than n+1 distance sensors for the n print head segments.

3. The print bar of claim 1 , wherein the n print head segments are arranged in two rows in a direction perpendicular to a direction of motion of the print bar relative to the substrate when the print bar is operated to deposit material on the substrate.

4. The print bar of claim 3 , wherein the n print head segments of the two rows are offset from one another, wherein first print head segments of the n print head segments in a first row are horizontally offset from second print head segments of the n print head segments in a second row.

5. The print bar of claim 4 , wherein at least one of the two actuators of the n print head segments transfers motion to a rear corner of one print head segment of the first print head segments in the first row and to a front corner of another print head segment of the second print head segments in the second row.

6. The print bar of claim 4 , wherein each of the distance sensors associated with the first print head segments of the first row are associated with a different one of the two actuators.

7. The print bar of claim 4 , wherein the first print head segments and the second print head segments are surrounded by a fixed cold plate to form a chilled surface.

8. The print bar of claim 7 , wherein the fixed cold plate that surrounds the first print head segments and second print head segments has a plurality of fingers which are disposed between each of the first print head segments and each of the second print head segments.

9. The print bar of claim 8 , wherein the plurality of fingers are separated from the first print head segments and the second print head segments by a gap to permit motion.

10. The print bar of claim 3 , wherein the n print head segments are disposed within the rows such that print areas of each row of corresponding OVJP print heads form a single printed column on the substrate when the print bar is operated to deposit material on the substrate.

11. The print bar of claim 1 , wherein the n print head segments have a staggered arrangement, wherein first print head segments of the n print head segments leads second print head segments, and the second print head segments of the n print head segments follow the first print head segments.

12. The print bar of claim 11 , wherein each of the first print head segments and second print head segments are T-shaped, and each of the second print head segments has an orientation that is inverted with respect to each of the first print head segments.

13. The print bar of claim 11 , wherein the first print head segments and second print head segments are triangular, and each of the second print head segment has an orientation that is inverted with respect to each of the first print head segments.

14. A print bar for organic vapor jet (OVJP) deposition, the print bar comprising:

n print head segments, each of the n print head segments comprising an OVJP print head, wherein n is a positive integer with a value that is greater than 1;

a support structure to which each of the n print head segments are attached;

a first height sensor attached to a first end of the print bar, and a second height sensor attached to a second end of the print bar, and another n−1 height sensors attached between each two neighboring pair of the n print head segments, wherein the first, second, and the another n−1 height sensors of the print bar are configured to measure a distance between a substrate disposed below the print bar and a portion of at least one of the n print head segments; and

each segment of the n print head segments comprising two actuators, the two actuators of the each respective segment are configured to adjust at least one of a position and an orientation of the each respective segment based upon one or more distances between the substrate and the each respective segment measured by the height sensors,

wherein the first, second, and another n−1 height sensors are configured to control a gap between the n print head segments and the substrate, and wherein the first, second, and another n−1 height sensors are configured to control n orientations of the n print head segments respectively.

15. The print bar of claim 14 , wherein the n print head segments have a staggered arrangement, wherein a first print head segment of the n print head segments leads a second print head segment of the n print head segments, and the second print head segment follows the first print head segment.

Assignments (1)

Continuity (3)

References Cited (88)