Extreme ultraviolet mask and method for forming the same
View Patent ↗A photolithography mask includes a substrate, a reflective multilayer structure over the substrate, an adhesion layer over the reflective multilayer structure, a capping layer over the adhesion layer, and a patterned absorber layer over the capping layer. The capping layer includes a non-crystalline conductive material.
1. A photolithography mask, comprising:
a substrate;
a reflective multilayer structure over the substrate;
an adhesion layer in direct contact with a topmost surface of the reflective multilayer structure, wherein the adhesion layer comprises a dielectric material;
an amorphous capping layer over the adhesion layer, the amorphous capping layer comprising a transitional metal having a first carbon solubility and a dopant having second carbon solubility less than the first carbon solubility; and
a patterned absorber layer over the amorphous capping layer.
2. The photolithography mask of claim 1 , wherein the adhesion layer has a thickness ranging from 1 nm to 3 nm.
3. The photolithography mask of claim 1 , wherein the adhesion layer comprises silicon dioxide, silicon nitride or silicon oxynitride.
4. The photolithography mask of claim 1 , wherein the transition metal comprises ruthenium, iridium, rhodium, platinum, palladium, osmium, rhenium, vanadium, tantalum, hafnium, tungsten, molybdenum, zirconium, manganese or technetium.
5. The photolithography mask of claim 1 , wherein the dopant comprises niobium, titanium, zirconium, yttrium, boron, phosphorus or combinations thereof.
6. The photolithography mask of claim 1 , wherein the amorphous capping layer has a density less than a bulk density of ruthenium.
7. The photolithography mask of claim 1 , wherein the reflective multilayer structure comprises alternatively stacked layers of molybdenum and silicon with silicon being a topmost layer.
8. The photolithography mask of claim 1 , wherein the patterned absorber layer comprises chromium, chromium oxide, titanium nitride, tantalum nitride, tantalum, titanium, Mo, palladium, tantalum boron nitride, tantalum boron oxide, aluminum oxide, silver oxide or combinations thereof.
9. The photolithography mask of claim 1 , further comprising a patterned anti-reflection layer over the patterned absorber layer.
10. An extreme ultraviolet (EUV) mask, comprising:
a substrate; and
a material stack over a first surface of the substrate, the material stack comprising:
a reflective multilayer structure over the first surface of the substrate;
a dielectric material layer over the reflective multilayer structure;
an amorphous capping layer over the dielectric material layer, the amorphous capping layer comprising a transitional metal having a first carbon solubility and a dopant having second carbon solubility less than the first carbon solubility;
a patterned absorber layer over the amorphous capping layer; and
a patterned anti-reflection layer over the patterned absorber layer.
11. The EUV mask of claim 10 , wherein the patterned absorber layer and the patterned anti-reflection layer each comprise a pattern of openings corresponding to circuit patterns to be formed on a semiconductor wafer.
12. The EUV mask of claim 10 , further comprising a trench extending through the patterned anti-reflection layer, the patterned absorber layer, the amorphous capping layer, the dielectric material layer and the reflective multilayer structure, the trench exposing the first surface of the substrate.
13. The EUV mask of claim 10 , wherein the transition metal comprises ruthenium, iridium, rhodium, platinum, palladium, osmium, rhenium, vanadium, tantalum, hafnium, tungsten, molybdenum, zirconium, manganese or technetium.
14. The EUV mask of claim 10 , wherein the dopant comprises niobium, titanium, zirconium, yttrium, boron, phosphorus or combinations thereof.
15. The EUV mask of claim 10 , wherein a concentration of the dopant in the capping layer is less than about 50 at. %.
16. The EUV mask of claim 10 , further comprising a conductive layer over a second surface of the substrate opposite the first surface.
17. The EUV mask of claim 16 , wherein the conductive layer comprises chromium nitride.
18. An extreme ultraviolet (EUV) mask, comprising:
a substrate;
a reflective multilayer structure over the substrate;
a dielectric material layer over the reflective multilayer structure;
a capping layer over the dielectric material layer, wherein the capping layer comprises an amorphous or a semi-crystalline conductive material;
a patterned absorber layer over the capping layer; and
a patterned anti-reflection layer over the patterned absorber layer.
19. The EUV mask of claim 18 , wherein the capping layer comprises a transition metal and one or more dopants.
20. The EUV mask of claim 19 , wherein the transition metal comprises ruthenium, iridium, rhodium, platinum, palladium, osmium, rhenium, vanadium, tantalum, hafnium, tungsten, molybdenum, zirconium, manganese or technetium, and the one or more dopants comprise niobium, titanium, zirconium, yttrium, boron or phosphorus.