Photoelectric conversion element, photodetector, photodetection system, electronic apparatus, and mobile body
A highly functional photoelectric conversion element is provided. The photoelectric conversion element includes: a first photoelectric converter that detects light in a first wavelength range and photoelectrically converts the light; a second photoelectric converter that detects light in a second wavelength range and photoelectrically converts the light to obtain distance information of a subject; and an optical filter that is disposed between the first photoelectric converter and the second photoelectric converter, and allows the light in the second wavelength range to pass therethrough more easily than the light in the first wavelength range. The first photoelectric converter includes a stacked structure and an electric charge accumulation electrode. The stacked structure includes a first electrode, a first photoelectric conversion layer, and a second electrode that are stacked in order, and the electric charge accumulation electrode is disposed to be separated from the first electrode and be opposed to the first photoelectric conversion layer with an insulating layer interposed therebetween.
1. A light detecting device, comprising:
a first section comprising:
a photoelectric conversion region disposed in a semiconductor substrate;
a conductor disposed adjacent to the photoelectric conversion region and configured to receive a potential; and
a metal layer surrounding the conductor in a plan view;
a first insulating layer between the conductor and the metal layer;
a second insulating layer between the metal layer and the photoelectric conversion region; and
a fixed charge layer between the second insulating layer and the photoelectric conversion region in the plan view.
2. The light detecting device of claim 1 , further comprising:
a second section comprising:
a first electrode on the semiconductor substrate;
a photoelectric conversion layer on the first electrode and that overlaps the photoelectric conversion region; and
a second electrode on the photoelectric conversion layer.
3. The light detecting device of claim 2 , wherein the conductor is electrically connected to the first electrode.
4. The light detecting device of claim 2 , further comprising:
an optical filter between the first electrode and the photoelectric conversion region.
5. The light detecting device of claim 4 , wherein the optical filter passes infrared light.
6. The light detecting device of claim 1 , wherein the first insulating layer surrounds the conductor in the plan view.
7. The light detecting device of claim 1 , wherein the second insulating layer surrounds the metal layer in the plan view.
8. The light detecting device of claim 1 , wherein the fixed charge layer comprises an insulating material.
9. The light detecting device of claim 2 , further comprising:
a third section comprising a wiring layer, wherein the conductor is electrically connected to the wiring layer.
10. The light detecting device of claim 9 , wherein the first section is between the second section and the third section in a cross sectional view.
11. The light detecting device of claim 9 , wherein the wiring layer comprises at least part of a readout circuit for the photoelectric conversion region.
12. An electronic apparatus, comprising:
a signal processor; and
a light detecting device, comprising:
a first section comprising:
a photoelectric conversion region disposed in a semiconductor substrate;
a conductor disposed adjacent to the photoelectric conversion region and configured to receive a potential; and
a metal layer surrounding the conductor in a plan view;
a first insulating layer between the conductor and the metal layer;
a second insulating layer between the metal layer and the photoelectric conversion region; and
a fixed charge layer between the second insulating layer and the photoelectric conversion region in the plan view.
13. The electronic apparatus of claim 12 , further comprising:
a second section comprising:
a first electrode on the semiconductor substrate;
a photoelectric conversion layer on the first electrode and that overlaps the photoelectric conversion region; and
a second electrode on the photoelectric conversion layer.
14. The electronic apparatus of claim 13 , wherein the conductor is electrically connected to the first electrode.
15. The electronic apparatus of claim 13 , further comprising:
a third section comprising a wiring layer, wherein the conductor is electrically connected to the wiring layer.
16. The electronic apparatus of claim 15 , wherein the first section is between the second section and the third section.
17. The electronic apparatus of claim 16 , wherein the wiring layer comprises at least part of a readout circuit for the photoelectric conversion region.