Acoustic wave device
An acoustic wave device includes a dielectric film covering an IDT electrode. The IDT electrode includes first and second edge regions and first and second high acoustic velocity regions. The first and second edge regions are low acoustic velocity regions. The first and second high acoustic velocity regions are on outer sides of an intersecting width region where first and second electrode fingers are adjacent to each other in an acoustic wave propagation direction. A thickness of the dielectric film on the first and second edge regions is greater than that of the dielectric film on the first and second high acoustic velocity regions.
1. An acoustic wave device comprising:
a piezoelectric substrate;
an IDT electrode on the piezoelectric substrate; and a dielectric film covering the IDT electrode; wherein
the IDT electrode includes a first busbar, a second busbar facing the first busbar, first electrode fingers including respective first ends connected to the first busbar, and second electrode fingers including respective first ends connected to the second busbar;
the first electrode fingers and the second electrode fingers are interdigitated with each other;
when a region where the first electrode fingers and the second electrode fingers overlap in an acoustic wave propagation direction is defined as an intersecting width region, the intersecting width region includes a central region at a center in a direction in which the first electrode fingers and the second electrode fingers extend, a first edge region on one outer side of the central region in the direction in which the first electrode fingers and the second electrode fingers extend, and a second edge region on another outer side of the central region in the direction in which the first electrode fingers and the second electrode fingers extend;
in the first edge region and the second edge region, each of the first electrode fingers and the second electrode fingers has a larger width than a width in the central region;
a first high acoustic velocity region is on an outer side of the first edge region in the direction in which the first electrode fingers and the second electrode fingers extend, and a second high acoustic velocity region is on an outer side of the second edge region in the direction in which the first electrode fingers and the second electrode fingers extend;
a thickness of the dielectric film on the first edge region and the second edge region is greater than a thickness of the dielectric film on the first high acoustic velocity region and the second high acoustic velocity region; and
in a first gap region between the second ends of the second electrode fingers and the first busbar and a second gap region between the first ends of the first electrode fingers and the second busbar, each of the first electrode fingers and the second electrode fingers has a smaller width than the widths in the first and second edge regions;
a total thickness of dielectric material on the first edge region or the second edge region is equal to or substantially equal to a total thickness of dielectric material on the central region;
an upper surface of the dielectric film on the first edge region and the second edge region and an upper surface of the dielectric film on the central region are flush with each other;
each of the first busbar and the second busbar extends in the acoustic wave propagation direction and includes an inner busbar portion connected to the first electrode fingers or the second electrode fingers, an outer busbar portion on an outer side of the inner busbar portion in the direction in which the first electrode fingers and the second electrode fingers extend, and a plurality of openings along the acoustic wave propagation direction in a region between the inner busbar portion and the outer busbar portion;
a portion between the adjacent openings is a coupling portion that couples the inner busbar portion and the outer busbar portion;
the first high acoustic velocity region is a region between the inner busbar portion and the outer busbar portion of the first busbar;
the second high acoustic velocity region is a region between the inner busbar portion and the outer busbar portion of the second busbar; and
the total thickness of dielectric material on the first edge region or the second edge region is equal to or substantially equal to a total thickness of dielectric material on the inner busbar portion.
2. A ladder filter comprising:
a plurality of series arm resonators; and
a plurality of parallel arm resonators; wherein
at least one of the plurality of series arm resonators and the plurality of parallel arm resonators is the acoustic wave device according to claim 1 .
3. The ladder filter according to claim 2 , wherein,
in a cross section of the coupling portion in a direction of thickness, the dielectric film on each of the first high acoustic velocity region and the second high acoustic velocity region includes a protrusion above the coupling portion; and
in the first high acoustic velocity region and the second high acoustic velocity region, the protrusions are located along the acoustic wave propagation direction at regular intervals.
4. The ladder filter according to claim 2 , wherein the first edge region and the second edge region define a low acoustic velocity region where an acoustic velocity is lower than an acoustic velocity in the central region.
5. The ladder filter according to claim 2 , wherein the piezoelectric substrate is a piezoelectric single-crystal substrate.
6. The ladder filter according to claim 2 , wherein the piezoelectric substrate is made of LiNbO 3 or LiTaO 3 .
7. The ladder filter according to claim 2 , wherein the acoustic wave device is configured as a one-port acoustic wave resonator.
8. The ladder filter according to claim 2 , wherein a width of the inner busbar portions is less than a width of the outer busbar portions.
9. The acoustic wave device according to claim 1 , wherein,
in a cross section of the coupling portion in a direction of thickness, the dielectric film on each of the first high acoustic velocity region and the second high acoustic velocity region includes a protrusion above the coupling portion; and
in the first high acoustic velocity region and the second high acoustic velocity region, the protrusions are located along the acoustic wave propagation direction at regular intervals.
10. The acoustic wave device according to claim 1 , wherein the first edge region and the second edge region define a low acoustic velocity region where an acoustic velocity is lower than an acoustic velocity in the central region.
11. The acoustic wave device according to claim 1 , wherein the piezoelectric substrate is a piezoelectric single-crystal substrate.
12. The acoustic wave device according to claim 1 , wherein the piezoelectric substrate is made of LiNbO 3 or LiTaO 3 .
13. The acoustic wave device according to claim 1 , wherein the acoustic wave device is a one-port acoustic wave resonator.
14. The acoustic wave device according to claim 1 , wherein a width of the inner busbar portions is less than a width of the outer busbar portions.