Reduced footprint wafer handling platform
A system comprises an equipment front end module (EFEM), a vacuum transfer module (VTM), a plurality off quad station process modules (QSMs). The EFEM is configured to receive a plurality of wafers. The EFEM comprises an EFEM transfer robot. The vacuum transfer module (VTM) is configured to receive the plurality of wafers from the EFEM. The VTM comprises a VTM transfer robot. The plurality of quad station process modules (QSMs) is coupled to the VTM. The VTM transfer robot is configured Oto transfer wafers between the VTM and the plurality of QSMs. The EFEM transfer robot is configured to transfer wafers between the EFEM and the VTM.
1. A system comprising:
a vacuum transfer module (VTM) configured to receive a plurality of wafers, the VTM comprising a VTM transfer robot;
a plurality of quad station process modules (QSMs) coupled to the VTM, the VTM transfer robot configured to transfer wafers between the VTM and the plurality of QSMs;
a system controller coupled to the VTM transfer robot, the system controller configured to control at least one of an operation of the VTM transfer robot or a rotation of respective mechanical indexers of the plurality of QSMs; and
a first atmospheric (ATM) transfer robot configured to transfer a batch of wafers across a first wafer plane extending horizontally from a load port of one or more elevated load ports above a second ATM transfer robot to a service door located adjacent to a top portion of a vertically-movable dual airlock vacuum cassette elevator (VCE),
the service door and a lower service door providing access to and from the VTM, the lower service door allowing movement of wafers under vacuum from the VCE to the VTM, and
the VTM transfer robot configured to transfer wafers within the VTM along a second wafer plane extending horizontally and separate from the first wafer plane.
2. The system of claim 1 , wherein the plurality of QSMs comprises a first, second, third, and fourth QSM, the first and second QSM being coupled to a first side of the VTM, the third and fourth QSM being coupled to a second side of the VTM, the second side being opposite to the first side,
wherein an equipment front-end module (FEEM) is coupled to a third side of the VTM, the VTM being four-sided, and
wherein each QSM of the plurality of QSMs includes at least one of the respective mechanical indexers.
3. The system of claim 1 , wherein the VTM transfer robot comprises two arms, each arm having a single effector or two vertically stacked end effectors.
4. The system of claim 1 , wherein each QSM has at least one single load station that is accessible via a respective slot.
5. The system of claim 1 , wherein a side of the VTM is substantially planar, wherein the side is configured to be coupled with two of the plurality of QSMs, and each of the plurality of QSMs having at least one load station coupled to the side.
6. The system of claim 1 , wherein an equipment front-end module (EFEM) is arranged at least partially between two of the plurality of QSMs and reduces a footprint of the system.
7. The system of claim 1 , further comprising:
two load ports connected to an external side of an equipment front-end module (EFEM), a platform-to-VTM width defined by two load-port interfaces of the two load ports, a platform depth defined by a load port depth, and a depth defined by at least one of the plurality of QSMs.
8. The system of claim 1 , further comprising:
one or more load ports coupled to a side of an equipment front-end module (EFEM), the one or more load polls being disposed within physical boundaries of the plurality of QSMs.
9. The system of claim 1 , comprises:
an equipment front-end module (EFEM) configured to receive a plurality of wafers.
10. The system of claim 8 , wherein the VTM transfer robot is located near a lateral side of the VTM, and allows service access past the VTM transfer robot under vacuum conditions.
11. The system of claim 8 , wherein the first ATM transfer robot is located within the EFEM and is stacked above a chamber of the VTM and transfers wafers between a front opening unified pod (FOUP) and a load lock (LL), the first ATM transfer robot provided with a drive up and arm-set down configuration or a drive down and arm-set up configuration.
12. The system of claim 9 , wherein one or more components of the EFEM fall within existing boundaries of processing modules or tools of the system.
13. The system of claim 12 , wherein the one or more components of the EFEM comprise load ports, a mini-environment module, the first ATM transfer robot, and a load lock.
14. The system of claim 13 , wherein the load ports, the mini-environment module, and the first ATM transfer robot are located over a chamber of the VTM.
15. The system of claim 9 , further comprising:
a plurality of load ports connected to an external side of the EFEM, the external side being opposite to the VTM;
a plurality of FOUPs coupled to the plurality of load ports; and
a mini-EFEM coupled between the plurality of load ports and the plurality of FOUPs.
16. A method comprising:
receiving a plurality of wafers at an equipment front-end module (EFEM), the EFEM comprising a first atmospheric (ATM) transfer robot;
transferring, using the first ATM transfer robot, at least one of the plurality of wafers from the EFEM to a vacuum transfer module (VTM) across a first wafer plane extending horizontally from one or more elevated load ports above a second ATM transfer robot to a service door adjacent to a top portion of a vertically-movable dual airlock vacuum cassette elevator (VCE), the service door and a lower service door providing access to the VTM, the lower service door allowing movement of at least one of the plurality of wafers under vacuum from the VCE to the VTM, and the VTM comprising a VTM transfer robot; and
transferring, using the VTM transfer robot, the at least one of the plurality of wafers from the VTM along a second wafer plane extending horizontally and separate from the first wafer plane to a plurality of quad station process modules (QSMs) that are coupled to the VTM.
17. The method of claim 16 , wherein the plurality of QSMs comprises a first, second, third, and fourth QSM, the first and second QSM being coupled to a first side of the VTM, the third and fourth QSM being coupled to a second side of the VTM, the second side being opposite to the first side,
wherein the EFEM is coupled to a third side of the VTM, the VTM being four-sided, and wherein each QSM of the plurality of QSMs includes mechanical indexers.
18. The method of claim 16 , wherein the first ATM transfer robot and the VTM transfer robot each comprises two arms, each arm having a single effector or two vertically stacked end effectors.
19. The method of claim 16 , wherein each QSM has at least one load station that is accessible via a respective slot.
20. The method of claim 16 , wherein a side of the VTM is substantially planar, wherein the side is configured to be coupled with at least two of the plurality of QSMs, each of the plurality of QSMs having at least one load station coupled to the side.