Micro focus X-ray tube using nano electric field emitter
View Patent ↗A micro focus X-ray tube is provided. The micro focus X-ray tube has a bonding structure in which a ceramic and a metal without an exhaust pipe are stacked by using a nano electric field emitter of an excellent feature.
1. A micro focus X-ray tube comprising:
a head of which the material is metal;
a ceramic insulation tube bonded in a high temperature to a surface of the head;
an electron gun bonded to a side surface of the head and comprising a nano electric field emitter;
an anode in an inner space formed by the head and the ceramic insulation tube that are bonded in a high temperature; and
a plate-shaped target comprised by the anode.
2. The micro focus X-ray tube of claim 1 , wherein the head is grounded to a sheet-shaped window, wherein the sheet-shaped window is configured to emit, to the outside of the micro focus X-ray tube, an X-ray generated by an electron beam emitted from the electron gun.
3. The micro focus X-ray tube of claim 1 , wherein the head is in an insertion tube structure comprising an intaglio groove in a surface of the head, wherein the insertion tube structure is inserted inside the ceramic insulation tube and spaced apart from the ceramic insulation tube by an insulation tube alignment guide.
4. The micro focus X-ray tube of claim 1 , wherein the head is bonded to an insulation ceramic of the electron gun through an electron gun bonding ring, wherein a position of the electron gun is aligned by an electron gun guide on a side surface of the head.
5. The micro focus X-ray tube of claim 1 , wherein the ceramic insulation tube is bonded to the anode through an anode connection ring, wherein a position of the ceramic insulation tube is aligned by an insulation guide on the anode connection ring.
6. The micro focus X-ray tube of claim 1 , wherein the electron gun comprises:
a cathode electrode coupled to a cathode plate comprising the nano electric field emitter;
a gate electrode coupled to a gate plate; and
a focus electrode coupled to a focus plate.
7. The micro focus X-ray tube of claim 6 , wherein:
the gate plate comprises a gate aperture configured to withdraw an electron from the nano electric field emitter, and
the focus plate comprises a focus aperture configured to focus an electron beam emitted by accelerating the electron.
8. The micro focus X-ray tube of claim 1 , wherein the plate-shaped target is bonded by the anode and a vacuum brazing filler, wherein the anode comprises an intaglio groove such that a bonding area is less than an area of the plate-shaped target.
9. A micro focus X-ray tube comprising:
a head bonded to an electron gun comprising a nano electric field emitter;
a ceramic insulation tube bonded in a high temperature to the head; and
an anode bonded to the ceramic insulation tube and comprising a plate-shaped target.
10. The micro focus X-ray tube of claim 9 , wherein the head comprises:
a window configured to emit, to the outside of the micro focus X-ray tube, an electron beam emitted from an electron gun;
a diffusion barrier groove for minimizing a brazing filler in a process of grounding the head to the window; and
a ring cover along the diffusion barrier groove.
11. The micro focus X-ray tube of claim 9 , wherein the head is in an insertion tube structure in which some of the head is inserted inside the ceramic insulation tube.
12. The micro focus X-ray tube of claim 9 , wherein the head is bonded to an insulation ceramic of the electron gun through an electron gun bonding ring to a side surface of the head, wherein a position of the electron gun is aligned by an electron gun guide on a side surface of the head.
13. The micro focus X-ray tube of claim 9 , wherein the ceramic insulation tube is bonded to the anode through an anode connection ring, wherein a position of the ceramic insulation tube is aligned by an insulation guide on the anode connection ring.
14. The micro focus X-ray tube of claim 9 , wherein the electron gun comprises:
a cathode electrode coupled to a cathode plate comprising the nano electric field emitter;
a gate electrode coupled to a gate plate; and
a focus electrode coupled to a focus plate.
15. The micro focus X-ray tube of claim 14 , wherein:
the gate plate comprises a gate aperture configured to withdraw an electron from the nano electric field emitter, and
the focus plate comprises a focus aperture configured to focus an electron beam emitted by accelerating the electron.
16. The micro focus X-ray tube of claim 9 , wherein the anode comprises an intaglio groove, through which the plate-shaped target is comprised by the anode, such that a bonding area is less than an area of the plate-shaped target.