Photoelectric conversion device
View Patent ↗A photoelectric conversion device includes: a substrate; a photodetection film including a first surface facing the substrate and a second surface opposing the first surface; first electrodes provided between the substrate and the photodetection film; a second electrode provided between the substrate and the photodetection film and including a first portion overlapped with the first surface and a second portion not overlapped therewith when viewed from a normal direction of the substrate; a third electrode provided on the second surface of the photodetection film and including a third surface facing the second surface; wiring allowing for conduction between the second and third electrodes; and a first conductive plug connected with the first portion and extending toward the substrate. Material of the first conductive plug differs from that of the second electrode. The wiring is in contact with a side surface of the photodetection film and the second portion.
1. A photoelectric conversion device, comprising:
a substrate;
a photodetection film that includes a first surface facing the substrate and a second surface opposite to the first surface;
a plurality of pixels disposed in a pixel region, each of the plurality of pixels including a first electrode that is provided between the substrate and the photodetection film, and overlaps the photodetection film when viewed from a normal direction of the substrate;
a second electrode that is provided between the substrate and the photodetection film and includes a first portion overlapping the first surface and a second portion not overlapping the first surface when viewed from the normal direction of the substrate, the second electrode being disposed outside the pixel region when viewed from the normal direction of the substrate;
a third electrode that is provided on the second surface of the photodetection film and includes a third surface facing the second surface;
wiring that electrically connects the second electrode and the third electrode; and
a first conductive plug that is connected with the first portion of the second electrode and extends toward the substrate, wherein
material of the first conductive plug is different from material of the second electrode, and
the wiring is in contact with a side surface of the photodetection film and the second portion of the second electrode.
2. The photoelectric conversion device according to claim 1 , further comprising:
a multi-layer wiring structure that is arranged between the substrate and the photodetection film and includes a plurality of inter-layer insulation layers, wherein
the first conductive plug passes through the plurality of inter-layer insulation layers.
3. The photoelectric conversion device according to claim 1 , wherein
corrosion resistance of material of the wiring is higher than corrosion resistance of the material of the first conductive plug.
4. The photoelectric conversion device according to claim 1 , wherein
a shape in plan view, which is viewed from the normal direction of the substrate, of the photodetection film includes a recess portion,
the second portion of the second electrode overlaps the recess portion when viewed from the normal direction of the substrate, and
the wiring is connected to the second portion of the second electrode in the recess portion.
5. The photoelectric conversion device according to claim 1 , wherein:
each of the plurality of pixels further comprises a second conductive plug in contact with the first conductive plug and extending toward the substrate,
the photoelectric conversion device further comprises a peripheral circuit that is positioned between the first conductive plug and the second conductive plug when viewed from the normal direction of the substrate.
6. The photoelectric conversion device according to claim 1 , further comprising:
a wiring layer arranged between the substrate and the photodetection film or an electric element provided on the substrate, wherein
an entirety of a portion connected with the first conductive plug in the second electrode is included in the first portion, and
the first conductive plug is connected with the wiring layer or the electric element.
7. The photoelectric conversion device according to claim 1 , further comprising:
a plurality of inter-layer insulation layers that are arranged between the substrate and the photodetection film, wherein
the first electrode of the plurality of pixels is in contact with the first surface, and
the first electrode of the plurality of pixels and the second electrode are provided in a same layer in the plurality of inter-layer insulation layers.
8. The photoelectric conversion device according to claim 1 , wherein
the third electrode includes a fourth surface opposite to the third surface, and
the wiring continuously covers the fourth surface of the third electrode, a side surface of the photodetection film, and the second portion of the second electrode.
9. The photoelectric conversion device according to claim 1 , further comprising:
a plurality of lamination structures that each include the photodetection film and the third electrode, wherein
the plurality of lamination structures are laminated on each other in the normal direction of the substrate.
10. The photoelectric conversion device according to claim 9 , wherein
end portions of the plurality of lamination structures are provided in a form of stairs.
11. The photoelectric conversion device according to claim 9 , wherein
side surfaces of the plurality of lamination structures are flat over the plurality of lamination structures.
12. The photoelectric conversion device according to claim 1 , wherein
the wiring has a film shape.
13. The photoelectric conversion device according to claim 1 , wherein
the wiring is in direct contact with the side surface of the photodetection film.
14. A photoelectric conversion device, comprising:
a substrate;
a photodetection film that includes a first surface facing the substrate and a second surface opposite to the first surface;
a plurality of first electrodes that are provided between the substrate and the photodetection film;
a second electrode that is provided between the substrate and the photodetection film and includes a first portion overlapping the first surface and a second portion not overlapping the first surface when viewed from a normal direction of the substrate;
a third electrode that is provided on the second surface of the photodetection film and includes a third surface facing the second surface;
wiring that electrically connects the second electrode and the third electrode; and
a first conductive plug that is connected with the first portion of the second electrode and extends toward the substrate, wherein
the first conductive plug includes a portion that does not overlap the second portion of the second electrode when viewed from the normal direction of the substrate.