Fin field effect transistor (FinFET) device structure with protection layer and method for forming the same
A FinFET device structure is provided. The FinFET device structure includes a gate structure formed over a fin structure, and an S/D contact structure formed adjacent to the gate structure. The FinFET device structure includes a protection layer formed on the S/D contact structure, and an S/D conductive plug formed over the protection layer. The S/D conductive plug is electrically connected to the S/D contact structure by the protection layer.
1. A fin field effect transistor (FinFET) device structure, comprising:
a gate structure formed over a fin structure;
an S/D contact structure formed adjacent to the gate structure;
a protection layer formed on the S/D contact structure; and
an S/D conductive plug formed over the protection layer, wherein the S/D conductive plug is electrically connected to the S/D contact structure by the protection layer.
2. The fin field effect transistor (FinFET) device structure as claimed in claim 1 , wherein the S/D conductive plug comprises a barrier layer, and a bottom surface of the barrier layer is curved.
3. The fin field effect transistor (FinFET) device structure as claimed in claim 1 , wherein the S/D conductive plug is surrounded by an insulating layer, and a sidewall surface of the insulating layer is aligned with a sidewall surface of the protection layer.
4. The fin field effect transistor (FinFET) device structure as claimed in claim 3 , wherein a sidewall surface of the protection layer extends beyond a sidewall surface of the insulating layer.
5. The fin field effect transistor (FinFET) device structure as claimed in claim 1 , further comprising:
an etching stop layer formed over the protection layer, wherein a portion of the etching stop layer is in direct contact with the protection layer.
6. The fin field effect transistor (FinFET) device structure as claimed in claim 5 , wherein etching stop layer has a protruding portion which is directly on the protection layer.
7. The fin field effect transistor (FinFET) device structure as claimed in claim 1 , wherein the S/D conductive plug comprises a U-shaped structure in direct contact with the protection layer.
8. The fin field effect transistor (FinFET) device structure as claimed in claim 1 , wherein the protection layer has a curved top surface and a curved bottom surface.
9. The fin field effect transistor (FinFET) device structure as claimed in claim 1 , further comprising:
an S/D structure below the S/D contact structure; and
a metal silicide layer formed over the S/D structure, wherein the metal silicide layer is between the S/D structure and the S/D contact structure.
10. A fin field effect transistor (FinFET) device structure, comprising:
a gate structure formed over a fin structure;
a dielectric layer formed over the gate structure;
an S/D contact structure formed adjacent to the gate structure and in the dielectric layer; and
a protection layer formed on the S/D contact structure, wherein the protection layer is a conductive layer, and an interface between the S/D contact structure and the protection layer is lower than a top surface of the dielectric layer.
11. The fin field effect transistor (FinFET) device structure as claimed in claim 10 , further comprising:
an S/D conductive plug formed over the protection layer, wherein the S/D conductive plug is electrically connected to the S/D contact structure by the protection layer.
12. The fin field effect transistor (FinFET) device structure as claimed in claim 11 , wherein the S/D conductive plug is surrounded by an insulating layer, and a sidewall surface of the insulating layer is aligned with a sidewall surface of the protection layer.
13. The fin field effect transistor (FinFET) device structure as claimed in claim 10 , wherein the S/D contact structure is surrounded by an insulating layer, and a bottom surface of the protection layer is lower than a top surface of the insulating layer.
14. The fin field effect transistor (FinFET) device structure as claimed in claim 10 , further comprising:
a barrier layer surrounding the S/D contact structure, wherein the protection layer is not formed on a top surface of the barrier layer.
15. The fin field effect transistor (FinFET) device structure as claimed in claim 10 , wherein the protection layer has a curved bottom surface.
16. A fin field effect transistor (FinFET) device structure, comprising:
a fin structure formed along a first direction over a substrate;
a gate structure formed over the fin structure along a second direction;
a dielectric layer formed over the gate structure;
an S/D contact structure formed adjacent to the gate structure along a third direction; and
a protection layer formed on the S/D contact structure, wherein a top surface of the protection layer is higher than a top surface of the dielectric layer, and a bottom surface of the protection layer is lower than the top surface of the dielectric layer.
17. The fin field effect transistor (FinFET) device structure as claimed in claim 16 , wherein the S/D contact structure is surrounded by an insulating layer, and the bottom surface of the protection layer is lower than a top surface of the insulating layer.
18. The fin field effect transistor (FinFET) device structure as claimed in claim 16 , wherein the protection layer is made of a conductive material.
19. The fin field effect transistor (FinFET) device structure as claimed in claim 16 , further comprising:
an S/D conductive plug formed over the protection layer, wherein the S/D conductive plug comprises a barrier layer, and the barrier layer has a curved bottom surface in direct contact with the protection layer.
20. The fin field effect transistor (FinFET) device structure as claimed in claim 16 , further comprising:
a barrier layer surrounding the S/D contact structure, wherein the protection layer is not formed on the barrier layer.