Die bonding pads and methods of forming the same
In an embodiment, a device includes: a dielectric layer over an active surface of a semiconductor substrate; a conductive via in the dielectric layer, the conductive via including a first copper layer having a non-uniform grain orientation; and a bonding pad over the conductive via and in the dielectric layer, the bonding pad including a second copper layer having a uniform grain orientation, a top surface of the bonding pad being coplanar with a top surface of the dielectric layer.
1. A method comprising:
patterning an interconnect opening in a dielectric layer, the dielectric layer disposed over an active surface of a semiconductor substrate, the interconnect opening having a via opening and a trench over the via opening;
plating a first copper layer in the interconnect opening, the first copper layer filling the via opening and lining the trench, the first copper layer having a non-uniform grain orientation;
plating a second copper layer on the first copper layer, the second copper layer filling a remainder of the trench, the second copper layer having a uniform grain orientation; and
planarizing the second copper layer, the first copper layer, and the dielectric layer until a top surface of the second copper layer is coplanar with a top surface of the first copper layer and a top surface of the dielectric layer.
2. The method of claim 1 , wherein the second copper layer is plated with a greater plating current than the first copper layer.
3. The method of claim 1 , wherein the second copper layer is plated for a longer duration than the first copper layer.
4. The method of claim 1 , wherein the second copper layer is thicker than the first copper layer.
5. The method of claim 1 , wherein the first copper layer comprises first grains having an irregular pattern distributed throughout the first copper layer.
6. The method of claim 1 , wherein the second copper layer comprises a plurality of copper nanocolumns, each of the copper nanocolumns comprising a plurality of copper nanoplates, each copper nanoplate of the copper nanoplates comprising second grains having an irregular pattern distributed throughout the copper nanoplate.
7. The method of claim 1 , wherein planarizing the second copper layer, the first copper layer, and the dielectric layer forms a first bonding pad in the dielectric layer, and the method further comprises:
contacting a second bonding pad to the first bonding pad; and
bonding the first bonding pad to the second bonding pad with a low-temperature bonding process.
8. The method of claim 7 , wherein the low-temperature bonding process comprises:
annealing the first bonding pad and the second bonding pad at a temperature in a range of 150° C. to 250° C.
9. A method comprising:
forming a first integrated circuit die comprising:
a first dielectric layer; and
a first bonding pad in the first dielectric layer, the first bonding pad comprising a first conductive layer and a second conductive layer on the first conductive layer, the first conductive layer comprising first grains, the second conductive layer comprising second grains, no majority of the first grains having a same lattice direction, a majority of the second grains having a same lattice direction;
obtaining a second integrated circuit die comprising:
a second dielectric layer; and
a second bonding pad in the second dielectric layer; and
bonding the first dielectric layer to the second dielectric layer through dielectric-to-dielectric bonding; and
bonding the first bonding pad to the second bonding pad through metal-to-metal bonding.
10. The method of claim 9 , wherein the majority of the second grains are <111> oriented.
11. The method of claim 9 , wherein the second bonding pad comprises a third conductive layer and a fourth conductive layer on the third conductive layer, the third conductive layer bonded to the first conductive layer, the fourth conductive layer bonded to the second conductive layer.
12. The method of claim 9 , wherein the second bonding pad comprises a third conductive layer, the third conductive layer bonded to the first conductive layer and to the second conductive layer.
13. The method of claim 9 , wherein:
the first integrated circuit die further comprises a third bonding pad in the first dielectric layer, the third bonding pad comprising a third conductive layer, the third conductive layer comprising third grains having an irregular pattern distributed throughout the third bonding pad;
the second integrated circuit die further comprises a fourth bonding pad in the second dielectric layer; and
the method further comprises bonding the third bonding pad to the fourth bonding pad through metal-to-metal bonding.
14. The method of claim 9 , wherein the first conductive layer and the second conductive layer are each formed of copper.
15. A method comprising:
patterning an interconnect opening in a dielectric layer, the interconnect opening having a via opening and a trench over the via opening;
plating a first copper layer in the interconnect opening, the first copper layer comprising first grains having an irregular pattern distributed throughout the first copper layer; and
plating a second copper layer on the first copper layer and in the trench, the second copper layer comprising a plurality of copper nanocolumns, each copper nanocolumn of the copper nanocolumns comprising a plurality of copper nanoplates, each copper nanoplate of the copper nanoplates comprising second grains having an irregular pattern distributed throughout the copper nanoplate.
16. The method of claim 15 , wherein the second copper layer is plated with a greater plating current than the first copper layer.
17. The method of claim 15 , wherein the second copper layer is plated for a longer duration than the first copper layer.
18. The method of claim 15 , further comprising:
planarizing the second copper layer, the first copper layer, and the dielectric layer until a top surface of the second copper layer is coplanar with a top surface of the first copper layer and a top surface of the dielectric layer.
19. The method of claim 18 , wherein planarizing the second copper layer, the first copper layer, and the dielectric layer forms a first bonding pad in the dielectric layer, and the method further comprises:
contacting a second bonding pad to the first bonding pad; and
annealing the first bonding pad and the second bonding pad at a temperature in a range of 150° C. to 250° C.
20. The method of claim 15 , wherein the copper nanocolumns are separated from each other by vertical boundaries, and the copper nanoplates are separated from each other by horizontal boundaries.