Pressure heating apparatus
A pressure heating apparatus that uniformly heats an object in a chamber in a short time includes a stage onto which the object is loaded; a heating light source that faces the stage, where the heating light source heats the object a non-contact manner while irradiating light onto the object; and a lower reflector disposed around the stage and that reflects light emitted from the heating light source toward the object.
1. A pressure heating apparatus that pressurizes and heats an object in a chamber, the pressure heating apparatus comprising:
a stage onto which the object is loaded;
a heating light source that faces the stage, wherein the heating light source heats the object in a non-contact manner while irradiating light onto the object;
a lower reflector disposed around the stage, wherein the lower reflector is tilted and extends away from the stage and the object, wherein the lower reflector reflects light emitted from the heating light source toward the object;
an upper reflector located on a side opposite to a stage-facing side of the heating light source, wherein the upper reflector reflects light emitted from the heating light source toward the object; and
a shutter plate located between the object and the heating light source, wherein the shutter plate slides in horizontal direction and switches between a first mode that irradiates light to the object and a second mode that blocks light to the object, wherein the object is located between the stage and the shutter plate,
wherein the upper reflector comprises:
a first portion substantially parallel to an upper surface of the stage; and
a second portion tilted relative to the first portion,
wherein a degree of tilt of the second portion is adjusted such that light emitted from the heating light source is reflected by the second portion and then directed to the object,
wherein a reflective surface of the lower reflector reflects a first light of the light emitted from the heating light source toward the upper reflector, and
wherein the degree of tilt of the second portion is adjusted such that the first light reflected by the lower reflector is reflected by the upper reflector back toward the object.
2. The pressure heating apparatus of claim 1 , wherein the lower reflector comprises:
a hole that has a circular shape from a viewpoint of a plane that corresponds to the stage; and
the reflective surface that surrounds the hole.
3. The pressure heating apparatus of claim 2 , wherein
the reflective surface of the lower reflector comprises a plurality of reflective surfaces, and
the plurality of reflective surfaces are obliquely tilted relative to the stage, with each pair of adjacent surfaces meeting at a boundary line.
4. The pressure heating apparatus of claim 2 , wherein the reflective surface has a truncated cone shape that surrounds the hole.
5. The pressure heating apparatus of claim 1 , wherein
the heating light source comprises a halogen lamp disposed inside the chamber.
6. The pressure heating apparatus of claim 1 , wherein
the heating light source comprises a laser light source located outside the chamber,
the pressure heating apparatus further comprises a beam expander that converts laser light emitted from the laser light source into light irradiated onto the object, and
the chamber includes a window that transmits light irradiated onto the object.
7. The pressure heating apparatus of claim 1 , wherein
the heating light source comprises a plurality of light-emitting devices arranged side by side in a plane facing the stage, and,
the plane facing the stage is divided into a plurality of regions that control light irradiated onto the object for each light-emitting device arranged in each region.
8. The pressure heating apparatus of claim 1 , further comprising a pressure regulator that adjusts pressure in the chamber.
9. A pressure heating apparatus that pressurizes and heats an object in a chamber, the pressure heating apparatus comprising:
a stage onto which the object is loaded;
a heating light source that faces the stage, wherein the heating light source heats the object in a non-contact manner while irradiating light onto the object;
an upper reflector that faces the stage with the heating light source located therebetween, wherein the object is located between the stage and the heating light source, wherein the upper reflector reflects the light emitted from the heating light source toward the object to be heated; and
a shutter device is located between the stage and the heating light source, wherein the shutter device slides in a horizontal direction and switches between a first mode that irradiates light to the object and a second mode that blocks light to the object,
wherein the upper reflector comprises:
a first portion substantially parallel to the stage; and
a second portion tilted relative to the first portion,
wherein a degree of tilt of the second portion is adjusted such that light emitted from the heating light source is reflected by the second portion and then directed to the stage,
wherein a reflective surface of a lower reflector reflects a first light of the light emitted from the heating light source toward the upper reflector, and
wherein the degree of tilt of the second portion is adjusted such that the first light reflected by the lower reflector is reflected by the upper reflector back toward the stage.
10. The pressure heating apparatus of claim 9 ,
wherein the lower reflector disposed around the stage, wherein the lower reflector reflects light emitted from the heating light source toward the object or the upper reflector.
11. The pressure heating apparatus of claim 10 , wherein the lower reflector reflects at least a portion of the light emitted from the heating light source toward the upper reflector.
12. A pressure heating apparatus, comprising:
a heating light source that heats an object in a non-contact manner while irradiating light onto the object;
an upper reflector that faces the heating light source and reflects light emitted from the heating light source toward the object; and
a lower reflector disposed around the object and that faces the heating light source and the upper reflector and that reflects the light emitted from the heating light source toward the object or the upper reflector, wherein the lower reflector is tilted and extends away from the object,
wherein the upper reflector comprises:
a first portion substantially parallel to plane of the heating light sources; and
a second portion tilted relative to the first portion,
wherein a degree of tilt of the second portion is adjusted such that light emitted from the heating light source is reflected by the second portion and then directed to the object,
wherein a reflective surface of the lower reflector reflects a first light of the light emitted from the heating light source toward the upper reflector, and
wherein the degree of tilt of the second portion is adjusted such that the first light reflected by the lower reflector is reflected by the upper reflector back toward the object.
13. The pressure heating apparatus of claim 12 , further comprising
a stage onto which the object is loaded, wherein the stage is disposed on a side of the heating light source that is opposite from the upper reflector, and the lower reflector is disposed around the stage.
14. The pressure heating apparatus of claim 13 , further comprising
a shutter device that is located between the stage and the heating light source and switches between irradiating and blocking light to the object.
15. The pressure heating apparatus of claim 12 , wherein the lower reflector comprises:
a hole having a circular shape in a plan view; and
the reflective surface that surrounds the hole and is obliquely tilted with respect to the object.
16. The pressure heating apparatus of claim 12 , wherein
the lower reflector has a regular polygonal shape in a plan view,
the lower reflector comprises a hole in a central region thereof,
the reflective surface of the lower reflector comprises a first reflective surface that surrounds the hole and has a circular or regular polygonal shape in a plan view, and
a plurality of second reflective surfaces that extend upward from an edge of the first reflective surface.
17. The pressure heating apparatus of claim 12 , wherein
the lower reflector has a regular polygonal shape in a plan view, and
the lower reflector comprises
a hole in a central region thereof, and
the reflective surface that surrounds the hole and has a regular polygonal shape in a plan view.