Proximity heater to lower RRAM forming voltage
A computer memory device includes a bottom electrode, a top electrode, and a memory component arranged between the top electrode and the bottom electrode. The memory component is made of a dielectric solid-state material and is in direct contact with the top electrode and the bottom electrode. The computer memory device further includes a proximity heater configured to increase a temperature of a portion of the memory component. The computer memory device further includes a layer of dielectric material in direct contact with the proximity heater. The layer of dielectric material is in direct contact with one of the bottom electrode and the top electrode.
1. A computer memory device comprising:
a bottom electrode;
a top electrode;
a memory component made of a dielectric solid-state material, the memory component arranged between the top electrode and the bottom electrode and in direct contact with the top electrode and the bottom electrode;
a proximity heater configured to increase a temperature of a portion of the memory component; and
a layer of dielectric material in direct contact with the proximity heater, wherein the layer of dielectric material is in direct contact with one of the bottom electrode and the top electrode, wherein the layer of dielectric material is located between the proximity heater and one of the bottom electrode and the top electrode.
2. The computer memory device of claim 1 , wherein:
the proximity heater is arranged between the top electrode and the bottom electrode.
3. The computer memory device of claim 2 , wherein:
the proximity heater is in direct contact with the memory component.
4. The computer memory device of claim 2 , wherein:
the proximity heater includes an opening therethrough; and
the bottom electrode is arranged at least partially within the opening.
5. The computer memory device of claim 4 , wherein:
the proximity heater includes a straight portion and a collar portion that is integrally formed with the straight portion; and
the opening extends through the collar portion.
6. The computer memory device of claim 1 , further comprising:
a further proximity heater configured to increase the temperature of the portion of the memory component; and
a further layer of dielectric material in direct contact with the further proximity heater, wherein:
the further layer of dielectric material is in direct contact with the other one of the bottom electrode and the top electrode.
7. The computer memory device of claim 6 , wherein:
the proximity heater is arranged between the top electrode and the bottom electrode; and
the top electrode is arranged between the proximity heater and the further proximity heater.
8. The computer memory device of claim 1 , wherein:
the top electrode is arranged between the proximity heater and the bottom electrode.
9. The computer memory device of claim 8 , wherein:
the top electrode includes a channel formed therein; and
the proximity heater is arranged at least partially within the channel.
10. The computer memory device of claim 9 , wherein:
the layer of dielectric material is arranged within the channel such that the layer of dielectric material separates the proximity heater from the top electrode.
11. The computer memory device of claim 10 , wherein:
an uppermost surface of the proximity heater is substantially coplanar with an uppermost surface of the top electrode.
12. The computer memory device of claim 1 , further comprising:
a further memory component, wherein:
the proximity heater is configured to increase a temperature of a portion of the further memory component.
13. A heating device configured to increase a temperature of a portion of dielectric solid-state material of at least one resistive random-access memory component, the heating device comprising:
layer of heater material;
a layer of dielectric material in direct contact with the layer of heater material, the layer of dielectric material in direct contact with one of a top electrode and a bottom electrode of the at least one resistive random-access memory component, wherein the layer of dielectric material is located between the layer of heater material and one of the bottom electrode and the top electrode; and
a first terminal and a second terminal configured to pass current through the layer of heater material, wherein the first terminal and the second terminal are configured to be operated independently of terminals that operate the top and bottom electrodes.
14. The heating device of claim 13 , wherein:
the layer of heater material includes an opening therethrough, and
the opening is configured to receive a portion of the bottom electrode therein such that the layer of heater material is not in direct contact with the portion of the bottom electrode.
15. The heating device of claim 14 , wherein:
the layer of heater material includes a straight portion and a collar portion integrally formed with the straight portion, and
the opening is formed through the collar portion.
16. The heating device of claim 13 , wherein:
the layer of heater material includes an uppermost surface that is substantially coplanar with an uppermost surface of the top electrode.
17. The heating device of claim 13 , wherein:
the layer of dielectric material is in direct contact with one of a further top electrode and a further bottom electrode of at least one further resistive random-access memory component.
18. The heating device of claim 17 , wherein:
the layer of heater material includes an opening therethrough and a further opening therethrough,
the opening is configured to receive a portion of the bottom electrode therein such that the layer of heater material is not in direct contact with the portion of the bottom electrode, and
the further opening is configured to receive a portion of the further bottom electrode therein such that the layer of heater material is not in direct contact with the portion of the further bottom electrode.
19. A method of forming a resistive random-access memory component, the method comprising:
forming a bottom electrode;
forming a proximity heater separated from the bottom electrode by a dielectric spacer such that a portion of the bottom electrode extends through a first opening in the proximity heater and a second opening the dielectric spacer;
forming a memory element made of a dielectric solid-state material in direct contact with the portion of the bottom electrode; and
forming a top electrode in direct contact with the memory element.
20. The method of claim 19 , wherein:
forming the proximity heater includes:
forming a layer of heater material separated from a further portion of the bottom electrode by an interlayer dielectric; and
forming the first opening through the layer of heater material and the interlayer dielectric so as to expose an uppermost surface of the further portion of the bottom electrode; and
the portion of the bottom electrode is formed in direct contact with the uppermost surface of the further portion of the bottom electrode.
21. The method of claim 20 , wherein:
forming the proximity heater further includes forming a collar of the heater material in direct contact with the layer of heater material such that the collar lines the first opening.
22. A method of forming a resistive random-access memory component, the method comprising:
forming a bottom electrode;
forming a memory element made of a dielectric solid-state material in direct contact with the bottom electrode;
forming a top electrode in direct contact with the memory element; and
forming a proximity heater configured to increase a temperature of at least a portion of the memory element, the proximity heater separated from the top electrode by a dielectric spacer wherein the dielectric spacer is located between the proximity heater and the top electrode.
23. The method of claim 22 , wherein:
forming the top electrode includes forming a channel in an uppermost surface of the top electrode; and
forming the proximity heater includes forming the proximity heater within the channel.
24. The method of claim 23 , wherein:
forming the proximity heater further includes forming the proximity heater such that an uppermost surface of the proximity heater is substantially coplanar with the uppermost surface of the top electrode.
25. A computer memory device comprising:
a bottom electrode;
a top electrode;
a memory component made of a dielectric solid-state material, the memory component arranged in direct contact with the top electrode and the bottom electrode;
a proximity heater arranged between the top electrode and the bottom electrode and configured to increase a temperature of a portion of the memory component; and
a layer of dielectric material in direct contact with the proximity heater and in direct contact with the bottom electrode, wherein the layer of dielectric material is located between the proximity heater and the bottom electrode.