Bond pad structure with reduced step height and increased electrical isolation
View Patent ↗Various embodiments of the present disclosure are directed towards a method for forming a semiconductor structure. The method includes forming a first bond pad isolation structure within a substrate. A second bond pad isolation structure is formed with the substrate. The second bond pad isolation structure is disposed laterally between inner sidewalls of the first bond pad isolation structure. The first bond pad isolation structure and the second bond pad isolation structure are formed concurrently with one another. A bond pad is formed extending through the substrate. The bond pad comprises a conductive body overlying the second bond pad isolation structure and a conductive protrusion extending from the conductive body to below the substrate. The second bond pad isolation structure laterally wraps around the conductive protrusion.
1. A method for forming a semiconductor structure, the method comprising:
forming a first bond pad isolation structure within a substrate, wherein the substrate has a front-side surface opposite a back-side surface;
forming second bond pad isolation structures within the substrate, wherein the second bond pad isolation structures are disposed laterally between inner sidewalls of the first bond pad isolation structure, wherein the first bond pad isolation structure and the second bond pad isolation structures are formed concurrently with one another;
forming a bond pad extending through the substrate, wherein the bond pad comprises a conductive body overlying the second bond pad isolation structures, a first conductive protrusion, and a second conductive protrusion, wherein the first and second conductive protrusions extend from the conductive body to below the substrate, wherein a bottom surface of the conductive body is disposed below the back-side surface of the substrate; and
wherein the second bond pad isolation structures contact and extend along opposing sidewalls of the first conductive protrusion and opposing sidewalls of the second conductive protrusion, wherein a topmost surface of the first bond pad isolation structure and topmost surfaces of the second bond pad isolation structures are disposed below the back-side surface, wherein a bottommost surface of the first bond pad isolation structure and bottommost surfaces of the second bond pad isolation structures are disposed above the front-side surface.
2. The method of claim 1 , wherein forming the first bond pad isolation structure and the second bond pad isolation structures comprises:
performing a first etch process into the back-side surface of the substrate to form a bond pad isolation opening and bond pad protrusion openings in the substrate;
depositing a bond pad isolation layer on the substrate, wherein the bond pad isolation layer lines the bond pad protrusion openings and fills the bond pad isolation opening; and
performing a second etch process on the bond pad isolation layer to remove excess material of the bond pad isolation layer from over an upper surface of the substrate.
3. The method of claim 1 , wherein a first vertical distance between the topmost surface of the first bond pad isolation structure and the back-side surface is greater than a second vertical distance between the bottommost surface of the first bond pad isolation structure and the front-side surface.
4. The method of claim 1 , wherein a height of the conductive body is less than widths of the first and second conductive protrusions.
5. The method of claim 1 , wherein a height of the first bond pad isolation structure is equal to heights of the second bond pad isolation structures, wherein the heights of the first bond pad isolation structure and the second bond pad isolation structures are less than a height of the substrate.
6. The method of claim 1 , further comprising:
forming a lower isolation structure in the substrate having a top surface above the front-side surface of the substrate;
patterning the back-side surface of the substrate to define an upper surface of the substrate, wherein the conductive body of the bond pad extends along the upper surface of the substrate; and
forming a dielectric layer between the conductive body and the upper surface of the substrate, wherein the first and second bond pad isolation structures continuously extend from the dielectric layer to the lower isolation structure.
7. The method of claim 1 , wherein an inner segment of each of the second bond pad isolation structures is spaced laterally between the first conductive protrusion and the second conductive protrusion.
8. The method of claim 1 , wherein a first lateral distance between the first and second conductive protrusions is greater than a second lateral distance between the first conductive protrusion and an outer sidewall of the conductive body.
9. A method for forming a semiconductor substrate, the method comprising:
performing a first etch process on a back-side surface of a substrate to define an upper surface of the substrate that is vertically below the back-side surface and vertically above a front-side surface of the substrate;
forming a dielectric layer contacting the upper surface of the substrate;
performing a second etch process on the upper surface of the substrate to form an outer opening and inner openings in the substrate, wherein the dielectric layer is formed before the second etch process;
forming a first bond pad isolation structure within the outer opening, wherein the first bond pad isolation structure laterally wraps around the inner openings;
depositing a conductive layer over the upper surface of the substrate such that the conductive layer fills the inner openings;
patterning the conductive layer to define a bond pad and a conductive ring structure, wherein the conductive ring structure is disposed between the upper surface of the substrate and the back-side surface, wherein a top surface of the conductive ring structure is disposed below a top surface of the dielectric layer; and
forming an upper dielectric layer over the bond pad, wherein the upper dielectric layer continuously extends from the top surface of the conductive ring structure to a top surface of the bond pad.
10. The method of claim 9 , wherein outer sidewalls of the first bond pad isolation structure are spaced between outer sidewalls of the conductive ring structure and an outer perimeter of the bond pad.
11. The method of claim 9 , wherein the top surface of the conductive ring structure is aligned with the top surface of the bond pad.
12. The method of claim 9 , wherein before depositing the conductive layer further comprising:
forming a second bond pad isolation structure within the inner openings, wherein the second bond pad isolation structure lines the inner openings.
13. The method of claim 12 , further comprising:
performing a third etch process to expand the inner openings with the second bond pad isolation structure in place, wherein the third etch process is performed before depositing the conductive layer.
14. The method of claim 9 , wherein the upper dielectric layer contacts a sidewall of the bond pad and a sidewall of the conductive ring structure.
15. A method for forming a semiconductor structure, the method comprising:
forming a shallow trench isolation (STI) structure on a front-side surface of a substrate;
patterning the substrate to define an upper surface of the substrate vertically below a back-side surface of the substrate, wherein the back-side surface is opposite the front-side surface;
forming a first passivation layer over the back-side surface of the substrate, wherein the first passivation layer contacts the upper surface of the substrate and opposing sidewalls of the substrate that extend from the back-side surface to the upper surface of the substrate, wherein outer sidewalls of the STI structure are spaced between opposing sidewalls of the first passivation layer;
patterning the first passivation layer and the substrate to define a bond pad isolation opening and bond pad protrusion openings, wherein the patterning of the first passivation layer and the substrate exposes an upper surface of the STI structure;
depositing a bond pad isolation layer over the substrate, wherein the bond pad isolation layer fills the bond pad isolation opening and lines the bond pad protrusion openings;
etching the bond pad isolation layer and the STI structure to define first and second bond pad isolation structures, wherein bottom surfaces of the first and second bond pad isolation structures are disposed above a bottom surface of the STI structure; and
forming a bond pad over the upper surface of the substrate and within the bond pad protrusion openings, wherein a segment of the STI structure directly underlies a middle region of the bond pad.
16. The method of claim 15 , further comprising:
forming an interconnect structure on the front-side surface of the substrate, wherein the interconnect structure comprises a conductive wire layer, wherein the bond pad contacts the conductive wire layer.
17. The method of claim 15 , wherein etching the bond pad isolation layer and the STI structure comprises performing a blanket etch process.
18. The method of claim 15 , wherein forming the bond pad comprises:
forming a bond pad layer over the substrate, wherein the bond pad layer fills a remaining portion of the bond pad protrusion openings and overlies the upper surface of the substrate; and
patterning the bond pad layer to define the bond pad and a conductive ring structure, wherein the conductive ring structure overlies the upper surface of the substrate and is laterally offset from sidewalls of the bond pad by a non-zero distance.
19. The method of claim 15 , wherein patterning the first passivation layer and the substrate over-etches and removes a portion of the STI structure, wherein bottom surfaces of the first and second bond pad isolation structures are disposed at or below a top surface of the STI structure.
20. The method of claim 15 , wherein the first passivation layer comprises a U-shaped segment directly over the STI structure.