Die last and waveguide last architecture for silicon photonic packaging

1. A semiconductor assembly comprising:

a first glass substrate;

an electronic integrated circuit (“EIC”);

a photonic integrated circuit (“PIC”) configured to produce an optical frequency, the PIC comprising an optical port;

a bridge die connecting the PIC and the EIC, wherein the bridge die is embedded in the first glass substrate; and

a coupling adapter, bonded to the first glass substrate, comprising:

a coupling port configured for connecting to an optical fiber; and

a waveguide integrated with the coupling adapter.

2. The assembly of claim 1 , further comprising a second glass substrate, wherein the first glass substrate and the second glass substrate are bound to each other by one or more glass-to-glass bonds.

3. The assembly of claim 1 , further comprising an optical fiber connecting to the coupling port.

4. The assembly of claim 1 , wherein the coupling port comprises V-grooves.

5. The assembly of claim 1 , wherein the coupling adapter comprises a glass adapter.

6. The assembly of claim 1 , wherein the coupling port extends to a side of the coupling adapter.

7. The assembly of claim 1 , wherein the coupling port extends to a top surface of the coupling adapter.

8. The assembly of claim 1 , wherein the bridge die is silicon bridge die.

9. The assembly of claim 1 , further comprising a second glass substrate.

10. The assembly of claim 1 , wherein the waveguide comprises a laser-modified pathway.

11. An electronic device comprising:

a semiconductor assembly comprising:

a first glass substrate;

a first integrated circuit die;

a second integrated circuit die configured to produce an optical frequency;

a bridge die connecting the first and second integrated circuit dies, wherein the bridge die is embedded in the first glass substrate; and

a coupling adapter, bonded to the first glass substrate, comprising:

a coupling port;

an output port configured for connection to the second integrated circuit die; and

a housing at least partially enclosing the semiconductor assembly.

12. The device of claim 11 , wherein the second integrated circuit die is a photonic die.

13. The device of claim 11 , wherein the coupling port is configured to connection to an optical fiber.

14. A method of making a semiconductor assembly, the method comprising:

attaching a bridge die to a glass substrate;

attaching an electronic integrated circuit die to the glass substrate and the bridge die;

attaching a photonic integrated circuit die to the glass substrate and the bridge die, wherein the electronic integrated circuit die is electrically coupled to the photonic integrated circuit die through the bridge die;

bonding a coupling adapter to the glass substrate; and

forming a waveguide in the coupling adapter, the waveguide aligning with the photonic integrated circuit die.

15. The method of claim 14 , wherein the glass substrate is a first glass substrate, and the method further comprising:

attaching a second glass substrate to the first glass substrate prior to attaching the bridge die.

16. The method of claim 15 , wherein attaching the second glass substrate comprises using glass to glass bonding with a laser.

17. The method of claim 14 , wherein forming the waveguide comprises a laser directed wiring.

18. The method of claim 14 , wherein forming the waveguide comprises focusing laser energy in three dimensions within media of the coupling adapter and locally transforming the media of the coupling adapter in a linear path to form a waveguide in the coupling adapter extending from the photonic integrated circuit die to an outlet.

19. The method of claim 14 , further comprising aligning the photonic integrated circuit die with the waveguide.