IP Library › Granted Patent US 12,349,367
Granted Patent B2
US 12,349,367 · App. 18/242,014 · Granted Jul 1, 2025

Semiconductor device and method for fabricating the same

Inventors: Chih-Wei Kuo (Tainan, TW); Tai-Cheng Hou (Tainan, TW); Yu-Tsung Lai (Tainan, TW); Jiunn-Hsiung Liao (Tainan, TW)
Assignee: UNITED MICROELECTRONICS CORP.
H10B61/22H10N50/01H10N50/10H10N50/80
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Quick Facts
Patent No.
US 12,349,367
App. No.
18/242,014
Granted
Jul 1, 2025
Kind
B2
Abstract

A semiconductor device includes a first magnetic tunneling junction (MTJ) and a second MTJ on a substrate, a first top electrode on the first MTJ and a second top electrode on the second MTJ, a first spacer and a second spacer around the first MTJ, a third spacer and a fourth spacer around the second MTJ, a passivation layer between the second spacer and the third spacer as a top surface of the passivation layer includes a V-shape, and an ultra low-k (ULK) dielectric layer on the passivation layer and around the first MTJ and the second MTJ.

Claims (16)

1. A semiconductor device, comprising:

a first magnetic tunneling junction (MTJ) and a second MTJ on a substrate;

a first top electrode on the first MTJ and a second top electrode on the second MTJ;

a first spacer and a second spacer around the first MTJ, wherein top surfaces of the first spacer, the second spacer, and the first top electrode are coplanar;

a third spacer and a fourth spacer around the second MTJ;

a passivation layer between the second spacer and the third spacer and filling a space between the first MTJ and the second MTJ completely, wherein a top surface of the passivation layer comprises a V-shape surface, and the V-shape surface directly connecting and extending from the top surface of the first spacer; and

an ultra low-k (ULK) dielectric layer on the passivation layer and around the first MTJ and the second MTJ.

2. The semiconductor device of claim 1 , further comprising:

an inter-metal dielectric (IMD) layer on the substrate;

a first metal interconnection and a second metal interconnection in the IMD layer; and

the first MTJ on the first metal interconnection and the second MTJ on the second metal interconnection.

3. The semiconductor device of claim 1 , wherein the passivation layer contacts the second spacer directly.

4. The semiconductor device of claim 1 , wherein the passivation layer contacts the third spacer directly.

5. The semiconductor device of claim 1 , wherein the passivation layer between the second spacer and the third spacer contacts the IMD layer directly.

6. The semiconductor device of claim 1 , wherein the ULK dielectric layer contacts a top surface of the first top electrode directly.

7. The semiconductor device of claim 1 , wherein an angle of the V-shape is greater than 100 degrees.

Priority Claims (1)
TW 108125208 · Jul 17, 2019 · national
Continuity (3)
Continuation 17336295 · Jun 1, 2021
Division 16544923 · Aug 20, 2019
Related Publication 20230413579A1 · Dec 21, 2023
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