Microdevice integration into system substrate
Post-processing steps for integrating of micro devices into system (receiver) substrate or improving the performance of the micro devices after transfer. Post processing steps for additional structures such as reflective layers, fillers, black matrix or other layers may be used to improve the out coupling or confining of the generated LED light. Dielectric and metallic layers may be used to integrate an electro-optical thin film device into the system substrate with transferred micro devices. Color conversion layers may be integrated into the system substrate to create different outputs from the micro devices.
1. A substrate system comprising:
a donor substrate including repeating groups of microdevices, the groups of microdevices including alternating one-dimensional arrays of the microdevices of different types, including:
a first type of microdevice in a first array;
a second type of microdevice in a second array, different than the first array; and
a third type of microdevice in a third array, different than the first array and the second array; and
a receiver substrate including one-dimensional arrays of contact pads in a dimension parallel to the first array, the second array, and the third array, the contact pads being arranged in repeating groups of three one-dimensional arrays,
wherein pitches of the first type of microdevice, the second type of microdevice, and the third type of microdevice match pitches of corresponding one-dimensional arrays of the contact pads, and
wherein the pitch of the repeating groups of the contact pads is two times larger than the pitch of the repeating groups of the microdevices in a dimension parallel to the pitch of the groups of the microdevices.
2. The substrate system of claim 1 , wherein the microdevices are configured to be transferred selectively to the receiver substrate by bringing the substrate and the receiver substrate closer together in alignment.
3. The substrate system of claim 1 , further comprising a buffer layer.
4. The substrate system of claim 1 , wherein the first type of microdevices and the second type of microdevices have different heights.