Plasma processing apparatus
A plasma processing apparatus comprising: a chamber; a lower electrode provided in the chamber and included in a substrate support mounts a substrate thereon; an upper electrode provided in the chamber and disposed to face the lower electrode; a gas supply configured to supply a processing gas between the upper electrode and the lower electrode; a high-frequency power supply electrically connected to the upper electrode and configured to generate a plasma of the processing gas by applying a high-frequency voltage to the upper electrode; and a circuit portion electrically connected between the high-frequency power supply and the lower electrode and provides a potential to the lower electrode. The circuit portion provides the potential to the lower electrode by causing a current to flow from the high-frequency power supply toward the lower electrode when a potential of the high-frequency power supply is higher than a potential of the lower electrode.
1. A plasma processing apparatus comprising:
a chamber;
a lower electrode provided in the chamber and included in a substrate support configured to mount a substrate thereon;
an upper electrode provided in the chamber and disposed to face the lower electrode;
a gas supply configured to supply a processing gas between the upper electrode and the lower electrode;
a high-frequency power supply including an output that is electrically connected to the upper electrode, the high-frequency power supply configured to generate a plasma of the processing gas by applying a high-frequency voltage to the upper electrode via the output of the high-frequency power supply; and
a circuit portion including an input that is electrically connected to the output of the high-frequency power supply and an output that is electrically connected to the lower electrode, the circuit portion configured to provide a potential to the lower electrode,
wherein the circuit portion is configured to provide the potential to the lower electrode by causing a current to flow from the high-frequency power supply to the input of the circuit portion rather than to the upper electrode and to supply the lower electrode via the output of the circuit portion when a potential of the high-frequency power supply supplied to the upper electrode is higher than a potential of the lower electrode.
2. The plasma processing apparatus of claim 1 , wherein the circuit portion includes a diode,
an anode of the diode is in input of the circuit portion and is electrically connected to the output of the high-frequency power supply, and
a cathode of the diode is the output of the circuit portion and is electrically connected to the lower electrode.
3. The plasma processing apparatus of claim 2 , further comprising:
a power controller electrically connected to the output of the high-frequency power supply and the upper electrode and configured to control power supplied from the high-frequency power supply to the upper electrode,
wherein the input of the circuit portion is electrically connected to a line that electrically connects the output of the high-frequency power supply and the power controller and the lower electrode, and
the power controller is configured to measure the power supplied from the high-frequency power supply to the upper electrode and control the high-frequency power supply to increase or decrease the power output by the high-frequency power supply according to a result of the measurement.
4. The plasma processing apparatus of claim 1 , wherein the circuit portion includes a diode and a Zener diode,
the diode and the Zener diode are connected in series,
an anode of the diode is the input of the circuit portion and is electrically connected to the output of the high-frequency power supply,
a cathode of the diode is electrically connected to a cathode of the Zener diode, and
an anode of the Zener diode is the output of the circuit portion and is electrically connected to the lower electrode.
5. The plasma processing apparatus of claim 4 , further comprising:
a power controller electrically connected to the output of the high-frequency power supply and the upper electrode and configured to control power supplied from the high-frequency power supply to the upper electrode,
wherein the input of the circuit portion is electrically connected to a line that electrically connects the output of the high-frequency power supply and the power controller and the lower electrode, and
the power controller is configured to measure the power supplied from the high-frequency power supply to the upper electrode and control the high-frequency power supply to increase or decrease the power output by the high-frequency power supply according to a result of the measurement.
6. The plasma processing apparatus of claim 1 , wherein the circuit portion includes a diode and a resistor, the resistor having a first end and a second end,
the diode and the resistor are connected in series,
an anode of the diode is the input of the circuit portion and is electrically connected to the output of the high-frequency power supply, and
a cathode of the diode is electrically connected to the first end of the resistor and the second end of the resistor is the output of the circuit portion and is connected to the lower electrode.
7. The plasma processing apparatus of claim 6 , further comprising:
a power controller electrically connected to the output of the high-frequency power supply and the upper electrode and configured to control power supplied from the high-frequency power supply to the upper electrode,
wherein the input of the circuit portion is electrically connected to a line that electrically connects the output of the high-frequency power supply and the power controller and the lower electrode, and
the power controller is configured to measure the power supplied from the high-frequency power supply to the upper electrode and control the high-frequency power supply to increase or decrease the power output by the high-frequency power supply according to a result of the measurement.
8. The plasma processing apparatus of claim 1 , wherein the circuit portion includes a diode and an inductor, the inductor having a first end and a second end,
the diode and the inductor are connected in series,
an anode of the diode is the input of the circuit portion and is electrically connected to the output of the high-frequency power supply, and
a cathode of the diode is electrically connected to the first end of the inductor and the second end of the inductor is the output of the circuit portion and is connected to the lower electrode.
9. The plasma processing apparatus of claim 8 , further comprising:
a power controller electrically connected to the output of the high-frequency power supply and the upper electrode and configured to control power supplied from the high-frequency power supply to the upper electrode,
wherein the input of the circuit portion is electrically connected to a line that electrically connects the output of the high-frequency power supply and the power controller and the lower electrode, and
the power controller is configured to measure the power supplied from the high-frequency power supply to the upper electrode and control the high-frequency power supply to increase or decrease the power output by the high-frequency power supply according to a result of the measurement.
10. The plasma processing apparatus of claim 1 , wherein the circuit portion includes a first potential measuring device, a second potential measuring device, a switching element, and a driving circuit,
the switching element is electrically connected between the high-frequency power supply and the lower electrode and configured to turn on and off electrical continuity between the high-frequency power supply and the lower electrode,
the first potential measuring device is connected to the input of the circuit portion and is electrically connected to the output of the high-frequency power supply and the driving circuit, measures a potential of the high-frequency power supply to generate a first measurement result, and outputs the first measurement result to the driving circuit,
the second potential measuring device is electrically connected to the output of the circuit portion, the lower electrode and the driving circuit, measures a potential of the lower electrode to generate a second measurement result, and outputs the second measurement result to the driving circuit, and
the driving circuit is configured to drive the switching element to turn on the electrical continuity between the high-frequency power supply and the lower electrode when the potential of the high-frequency power supply is higher than the potential of the lower electrode and drive the switching element to turn off the electrical continuity between the high-frequency power supply and the lower electrode when the potential of the high-frequency power supply is equal to or lower than the potential of the lower electrode, on the basis of the first measurement result and the second measurement result.
11. The plasma processing apparatus of claim 10 , further comprising:
a power controller electrically connected to the output of the high-frequency power supply and the upper electrode and configured to control power supplied from the high-frequency power supply to the upper electrode,
wherein the input of the circuit portion is electrically connected to a line that electrically connects the output of the high-frequency power supply and the power controller and the lower electrode, and
the power controller is configured to measure the power supplied from the high-frequency power supply to the upper electrode and control the high-frequency power supply to increase or decrease the power output by the high-frequency power supply according to a result of the measurement.
12. The plasma processing apparatus of claim 1 , further comprising:
a power controller electrically connected to the output of the high-frequency power supply and the upper electrode and configured to control power supplied from the high-frequency power supply to the upper electrode,
wherein the input of the circuit portion is electrically connected to a line that electrically connects the output of the high-frequency power supply and the power controller and the lower electrode, and
the power controller is configured to measure the power supplied from the high-frequency power supply to the upper electrode and control the high-frequency power supply to increase or decrease the power output by the high-frequency power supply according to a result of the measurement.