Semiconductor storage device and method of manufacturing the same
A semiconductor storage device includes: a stacked body having a plurality of insulating layers and a plurality of gate electrode layers alternately stacked in a first direction, the plurality of gate electrode layers including a first gate electrode layer and a second gate electrode layer, the second gate electrode layer adjacent to the first gate electrode layer in the first direction, and the plurality of insulating layers including a first insulating layer located between the first gate electrode layer and the second gate electrode layer; a semiconductor layer extending in the first direction; a first charge storage layer disposed between the semiconductor layer and the first gate electrode layer, the first charge storage layer including silicon and nitrogen; a second charge storage layer disposed between the semiconductor layer and the second gate electrode layer, the second charge storage layer sandwiching the first insulating layer with the first charge storage layer.
1. A method of manufacturing a semiconductor storage device, comprising:
forming a stacked body having a plurality of first layers and a plurality of second layers alternately stacked in a first direction, the stacked body including an insulator having a material different from those of the plurality of first layers and those of the plurality of second layers;
forming an opening penetrating the stacked body and extending in the first direction;
forming a first film of the insulator on an inner wall of the opening;
forming a second film of the insulator including silicon (Si) and nitrogen (N) on the first film;
forming a third film of the insulator on the second film;
forming a semiconductor layer on the third film;
selectively removing the plurality of second layers with respect to the plurality of first layers after the semiconductor layer is formed;
selectively removing the first film with respect to the second film;
selectively forming a third layer, including silicon (Si) and nitrogen (N) and having a chemical composition different from that of the second film, on the second film;
forming a fourth layer of the insulator on the third layer; and
forming a metal layer on the fourth layer.
2. The method of manufacturing a semiconductor storage device according to claim 1 , wherein the second film is a silicon nitride film and the third layer is a silicon nitride layer.
3. The method of manufacturing a semiconductor storage device according to claim 2 , wherein an atomic ratio of the silicon (Si) to the nitrogen (N) of the third layer is higher than an atomic ratio of the silicon (Si) to the nitrogen (N) of the second film.
4. The method of manufacturing a semiconductor storage device according to claim 2 , wherein the third layer includes metal.
5. The method of manufacturing a semiconductor storage device according to claim 2 , wherein the third layer includes boron (B), phosphorus (P), or germanium (Ge).
6. The method of manufacturing a semiconductor storage device according to claim 1 , wherein the first film is a film including silicon (Si) and oxygen (O), and the third film is a film including silicon (Si) and oxygen (O).
7. The method of manufacturing a semiconductor storage device according to claim 1 , wherein the fourth layer is formed by thermally oxidizing part of the third layer.