GAA LDMOS structure for HV operation
View Patent ↗A gate-all-around (GAA) high voltage transistor of the laterally double-diffused metal-oxide semiconductor (LDMOS) type has a loop-shaped gate electrode disposed below a surface of a semiconductor substrate. The loop-shaped gate electrode surrounds a vertical channel formed by a first source/drain region, a body region, and a diffusion region. The first source/drain region is on top, the body region is in the middle, and the diffusion region is underneath. A loop-shaped shallow trench isolation (STI) region surrounds the loop-shaped gate electrode. The diffusion region begins inside the loop-shaped gate electrode, extends under the loop-shaped gate electrode and the loop-shaped STI region, and rises outside the loop-shaped STI region to join with a second source/drain region. This structure allows pitch to be reduced by 40% or linear drive current to be doubled in comparison to an asymmetric NMOS transistor providing otherwise equivalent functionality.
1. A method comprising:
forming a loop-shaped shallow trench isolation (STI) region within a semiconductor substrate;
etching away a portion of the loop-shaped STI region to form a loop-shaped trench comprising an outer sidewall that is provided by the loop-shaped STI region and an inner sidewall that is provided by the semiconductor substrate;
forming a gate oxide on the inner sidewall;
filling the loop-shaped trench with a conductive material;
doping a portion of the semiconductor substrate having a first doping type and disposed within the loop-shaped STI region to form a well having a second doping type, wherein the second doping type is opposite the first doping type and a depth of the well is less than a depth of the loop-shaped STI region; and
doping a portion of the semiconductor substrate directly over the well to form a heavily doped region having the first doping type.
2. The method of claim 1 , wherein filling the loop-shaped trench with a conductive material comprises:
depositing the conductive material; and
etching with an etch process that has a higher etch rate for the conductive material than for a dielectric that forms the loop-shaped STI region; and
wherein the etching recesses the conductive material within the loop-shaped trench.
3. The method of claim 2 , wherein the etching leaves some of the conductive material that was covered by a mask to form a gate electrode that is above a surface of the semiconductor substrate.
4. A method, comprising:
forming a shallow trench isolation (STI) region within a semiconductor substrate, wherein a first area of the semiconductor substrate is surrounded by the STI region and a second area of the semiconductor substrate surrounds the STI region and the first area;
etching a portion of the STI region to form a trench, wherein the semiconductor substrate is exposed within the trench and the trench is surrounded by the STI region;
forming a gate dielectric layer on the semiconductor substrate exposed within the trench;
depositing a gate electrode layer over the gate dielectric layer, wherein a portion of the gate electrode layer is within the trench;
while the second area is masked, doping to form a well in the first area, wherein the well has a first doping type and the well has a lesser depth than the STI region; and
forming a first source/drain region and a second source/drain region by doping areas of the semiconductor substrate, wherein the first source/drain region and the second source/drain region have a second doping type, which is opposite the first doping type, the first source/drain region is in the first area and above the well, and the second source/drain region is in the second area.
5. The method of claim 4 , wherein the trench has a lesser depth than the STI region.
6. The method of claim 5 , wherein the well has a lesser depth than the trench.
7. The method of claim 4 , wherein the STI region has an aspect ratio of 2:1 or less.
8. The method of claim 4 , wherein the well forms a PN junction with the semiconductor substrate beneath the well.
9. A method, comprising:
etching a first trench in a semiconductor substrate, wherein the first trench forms a closed loop having an inner side and an outer side;
filling the first trench with dielectric to form an isolation structure;
etching the isolation structure to form a second trench, wherein the second trench forms a closed loop, an outer sidewall of the second trench is the isolation structure, and an inner sidewall of the second trench is the semiconductor substrate;
forming a gate dielectric layer on the inner sidewall of the second trench;
depositing a gate electrode layer to form a gate electrode for a lateral double-diffused metal-oxide semiconductor transistor, wherein the gate electrode is in the second trench;
doping a first area of the semiconductor substrate abutting the inner side while a second area of the semiconductor substrate abutting the outer side is masked to form a well in the first area, wherein the well has a first doping type and the well has a lesser depth than the isolation structure; and
forming a first source/drain region and a second source/drain region for the lateral double-diffused metal-oxide semiconductor transistor by doping areas of the semiconductor substrate, wherein the first source/drain region and the second source/drain region have a second doping type, which is opposite the first doping type, the first source/drain region is in the first area and above the well, and the second source/drain region is in the second area,
and the lateral double-diffused metal-oxide semiconductor transistor has a drift region a portion of which is disposed beneath the isolation structure.
10. The method of claim 9 , further comprising forming a contact region for the well within the first area.
11. The method of claim 9 , wherein the second trench is shallower than the first trench.
12. The method of claim 9 , wherein forming the gate electrode for lateral double-diffused metal-oxide semiconductor transistor comprises depositing a gate electrode layer and chemical mechanical polishing to remove a portion of the gate electrode layer that is outside the second trench.
13. The method of claim 9 , wherein forming the gate electrode for lateral double-diffused metal-oxide semiconductor transistor comprises depositing a gate electrode layer and etching the gate electrode layer to remove a portion of the gate electrode layer that is outside the second trench.
14. The method of claim 13 , wherein a portion of the gate electrode layer is masked while etching to define the gate electrode.
15. The method of claim 14 , wherein etching confines the gate electrode to a height at or below a surface of the semiconductor substrate.
16. The method of claim 15 , wherein etching confines the gate electrode below a surface of the semiconductor substrate.
17. The method of claim 9 , wherein the gate electrode has an inner side with a circular horizontal cross-section.
18. The method of claim 9 , wherein the gate electrode has an inner side with a rectangular horizontal cross-section.
19. The method of claim 9 , wherein the gate dielectric layer is a high κ dielectric and the gate electrode is metal.
20. The method of claim 9 , wherein the first trench has an aspect ratio of 2:1 or less.