IP Library Granted Patent US 12,372,930
Granted Patent B2
US 12,372,930 · App. 17/539,337 · Granted Jul 29, 2025

Recipe verifying method, recipe verifying server, and smart manufacturing controlling system using the same

Inventors: Tzu-Chung Yang (Tainan, TW); Ping-Yao Chiang (Kaohsiung, TW)
Assignee: UNITED MICROELECTRONICS CORP.
G05B19/042G06F3/0481G06F3/14G05B2219/2643
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Quick Facts
Patent No.
US 12,372,930
App. No.
17/539,337
Granted
Jul 29, 2025
Kind
B2
Abstract

A recipe verifying method, a recipe verifying server, and a smart manufacturing controlling system using the same are provided. The recipe verifying method includes the following steps. An inputting recipe having a plurality of inputting parameters is intercepted. The inputting recipe is transmitted from one of the inspection apparatuses. A target best known method (BKM) recipe is searched out from a plurality of candidate BKM recipes according to the inputting recipe. A plurality of predetermined limitations are obtained according to the target BKM recipe. Whether the inputting parameters of the inputting recipe meet the predetermined limitations is determined. An error report is generated, if the inputting parameters of the inputting recipe do not meet the predetermined limitations. At least one error is heighted in the error report.

Claims (34)

1. A recipe verifying method for a plurality of inspection apparatuses, comprising:

intercepting an inputting recipe having a plurality of inputting parameters, wherein the inputting recipe is transmitted from one of the inspection apparatuses to another inspection apparatus, a direct connection path connecting the inspection apparatuses is periodically monitored to intercept the inputting recipe;

searching out a target best known method (BKM) recipe from a plurality of candidate BKM recipes according to the inputting recipe;

obtaining a plurality of predetermined limitations according to the target BKM recipe;

determining that the inputting parameters of the inputting recipe do not meet the predetermined limitations;

generating an error report in respone to that the inputting parameters of the inputting recipe do not meet the predetermined limitations, wherein at least one error is heighted in the error report;

determining that a confirm button is clicked;

sending a permission request to a manager in response to that the confirm button is clicked;

determining that the manager permitted the permission request; and

executing the inputting recipe in response to determining that the manager permitted the permission request.

2. The recipe verifying method for the inspection apparatuses according to claim 1 , further comprising:

uploading the inputting recipe to the another inspection apparatus in response to that the inputting parameters of the inputting recipe meet the predetermined limitations.

3. The recipe verifying method for the inspection apparatuses according to claim 1 , wherein the target BKM recipe is searched out according to a classification of the inputting recipe.

4. A recipe verifying server, comprising:

a communication unit, configured to periodically monitor a direct connection path connecting an inspection apparatus and another inspection apparatus to intercept an inputting recipe having a plurality of inputting parameters when the inspection apparatus transmits the inputting recipe to the another inspection apparatus;

a storage unit, configured to store a plurality of candidate best known method (BKM) recipes;

a searching unit, configured to search out a target BKM recipe from the candidate BKM recipes according to the inputting recipe;

a processing unit, configured to obtain a plurality of predetermined limitations according to the target BKM recipe, and determine whether the inputting parameters of the inputting recipe meet the predetermined limitations; and

a report unit, configured to generate an error report in response to that the inputting parameters of the inputting recipe do not meet the predetermined limitations, wherein at least one error is highlighted in the error report;

wherein the processing unit is further configured to determine whether a confirm button is clicked, and the communication unit is further configured to send a permission request to a manager in response to that the confirm button is clicked;

the processing unit is further configured to determine that the manager permitted the permission request; and wherein the inputting recipe is executed in response to determining that the manager permitting the permission request.

5. The recipe verifying server according to claim 4 , wherein the communication unit is further configured to upload the inputting recipe to the another inspection apparatus in response to that the inputting parameters of the inputting recipe meet the predetermined limitations.

6. The recipe verifying server according to claim 4 , wherein the searching unit searches out the target BKM recipe according to a classification of the inputting recipe.

7. A smart manufacturing controlling system, comprising:

a plurality of inspection apparatuses; and a recipe verifying server, comprising:

a communication unit, configured to periodically monitor a direct connection path connecting an inspection apparatus and another inspection apparatus to intercept an inputting recipe having a plurality of inputting parameters when the inspection apparatus transmits the inputting recipe to the another inspection apparatus;

a storage unit, configured to store a plurality of candidate best known method (BKM) recipes;

a searching unit, configured to search out a target BKM recipe from the candidate BKM recipes according to the inputting recipe;

a processing unit, configured to obtain a plurality of predetermined limitations according to the target BKM recipe, and determine whether the inputting parameters of the inputting recipe meet the predetermined limitations; and

a report unit, configured to generate an error report in response to that the inputting parameters of the inputting recipe do not meet the predetermined limitation, wherein at least one error is highlighted in the error report;

wherein the processing unit is further configured to determine whether a confirm button is clicked, and the communication unit is further configured to send a permission request to a manager, if the confirm button is clicked;

the processing unit is further configured to determine that the manager permitted the permission request; and wherein the inputting recipe is executed in response to determining that the manager permitted the permission request.

8. The smart manufacturing controlling system according to claim 7 , wherein the communication unit is further configured to upload the inputting recipe to the another inspection apparatus in response to that the inputting parameters of the inputting recipe meet the predetermined limitations.

9. The smart manufacturing controlling system according to claim 7 , wherein the searching unit searches out the target BKM recipe according to a classification of the inputting recipe.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 1, 2021
From: YANG, TZU-CHUNG; CHIANG, PING-YAO
To: UNITED MICROELECTRONICS CORP.
Reel/Frame 058253/0499 →
Continuity (1)
Related Publication 20230168650A1 · Jun 1, 2023
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