Substrate storing container
A substrate storing container includes: a gas ejection nozzle unit having a plurality of apertures for supplying to the substrate storing space a gas that has flowed into the ventilation paths; and a gas flow rate equalizer capable of causing the gas to flow out from the plurality of apertures at an equalized flow rate. The gas flow rate equalizer includes a gas detention chamber, a pre-outflow gas retention chamber, and inter-chamber partitions defining an inter-chamber flow path that blocks straight-line communication between the gas detention chamber and the pre-outflow gas retention chamber but allows for communication between the gas detention chamber and the pre-outflow gas retention chamber.
1. A substrate storing container comprising:
a container body having an opening peripheral edge defining a container body opening at one end thereof, and a wall with a closed tubular shape at an other end thereof, and including a substrate storing space formed therein, the substrate storing space being defined by an inner surface of the wall, being capable of storing a substrate, and communicating with the container body opening;
a lid detachably attachable to the container body opening and capable of closing the container body opening;
a ventilation path allowing for communication between the substrate storing space and a space outside the container body;
a gas ejection nozzle unit having a plurality of apertures for supplying to the substrate storing space a gas that has flowed into the ventilation path; and
a gas flow rate equalizer capable of causing the gas to flow out from the plurality of apertures at an equalized flow rate,
the gas flow rate equalizer comprising a gas detention chamber, a pre-outflow gas retention chamber, and an inter-chamber partition, the inter-chamber partition defining an inter-chamber flow path that blocks straight-line communication between the gas detention chamber and the pre-outflow gas retention chamber but allows for communication between the gas detention chamber and the pre-outflow gas retention chamber, wherein
in the pre-outflow gas retention chamber, the inter-chamber flow path opens in a direction opposite to a direction toward the plurality of apertures.
2. The substrate storing container according to claim 1 , wherein
the gas flow rate equalizer further includes a partition wall that partitions the pre-outflow gas retention chamber into a plurality of pre-outflow gas retention sub-chambers.
3. The substrate storing container according to claim 2 , wherein
the plurality of pre-outflow gas retention sub-chambers have an equal capacity.
4. The substrate storing container according to claim 3 , wherein
the gas detention chamber is partitioned into a plurality of gas detention sub-chambers by an inter-sub-chamber partition.
5. The substrate storing container according to claim 4 , wherein
a gas supply flow path communicating with all the gas detention sub-chambers is formed.
6. The substrate storing container according to claim 2 , wherein
the gas ejection nozzle unit includes a nozzle chamber that is in communication with the apertures, and
the nozzle chamber communicates with the pre-outflow gas retention chamber via a hydrophobic film.
7. The substrate storing container according to claim 6 , wherein
the nozzle chamber communicates with all the apertures and all the gas pre-outflow gas retention sub-chambers.
8. The substrate storing container according to claim 1 , wherein
the gas ejection nozzle unit has a flow-directing part that causes the gas to flow out from the aperture in a predetermined direction.
9. The substrate storing container according to claim 1 , wherein
the apertures are formed to correspond to a plurality of substrates stored in the substrate storing space on a one-to-one basis.
10. The substrate storing container according to claim 1 , comprising:
a protrusion part having a columnar shape and including the gas ejection nozzle unit and the gas flow rate equalizer, wherein
a base of the protrusion part is fitted into a hole formed in the wall of the container body, constituting the ventilation path, and provided with a sealing member, and an end portion of the protrusion part is fastened to the wall of the container body, whereby the protrusion part is fastened to the container body.