Semiconductor devices
A semiconductor device includes an active region, a plurality of channel layers disposed to be spaced apart from each other in a vertical direction on the active region, a gate structure extending in a second direction to intersect the active region and the plurality of channel layers and surrounding the plurality of channel layers, a source/drain region disposed on the active region on at least one side of the gate structure and contacting the plurality of channel layers, and a contact plug connected to the source/drain region. The source/drain region includes a first epitaxial layer disposed on the active region and extending to contact the plurality of channel layers, second epitaxial layers disposed on the first epitaxial layer, each including impurities in a first concentration, and doping layers stacked alternately with the second epitaxial layers, each including the impurities in a second concentration higher than the first concentration.
1. A semiconductor device comprising:
an active region extending in a first direction on a substrate;
a plurality of channel layers disposed to be spaced apart from each other in a vertical direction, perpendicular to an upper surface of the substrate, on the active region;
a gate structure extending in a second direction perpendicular to the first direction to intersect the active region and the plurality of channel layers on the substrate and surrounding each of the plurality of channel layers;
a source/drain region disposed on the active region on at least one side of the gate structure and contacting the plurality of channel layers; and
a contact plug connected to the source/drain region,
wherein the source/drain region comprises:
a first epitaxial layer disposed on the active region and extending to contact the plurality of channel layers;
second epitaxial layers disposed on the first epitaxial layer, each second epitaxial layer including impurities in a first concentration and having a first thickness; and
doping layers stacked alternately with the second epitaxial layers, each doping layer including impurities in a second concentration higher than the first concentration and having a second thickness less than the first thickness,
wherein side surfaces of each of the second epitaxial layers and each of the doping layers contact the first epitaxial layer, and
wherein the contact plug contacts at least a portion of the doping layers.
2. The semiconductor device of claim 1 , wherein the impurities include at least one of phosphorus (P), arsenic (As), boron (B), gallium (Ga), antimony (Sb), aluminum (Al), thallium (Tl), and indium (In).
3. The semiconductor device of claim 1 , wherein each of the doping layers has a first resistivity, and each of the second epitaxial layers has a second resistivity higher than the first resistivity.
4. The semiconductor device of claim 1 , wherein the second concentration is about 1×10 19 atoms/cm 3 to about 1×10 22 atoms/cm 3 .
5. The semiconductor device of claim 1 , wherein each of the second epitaxial layers includes germanium (Ge).
6. The semiconductor device of claim 5 , wherein some of the second epitaxial layers have different concentrations of germanium (Ge).
7. The semiconductor device of claim 1 , wherein the second thickness is about 0.1 nm to about 5 nm.
8. The semiconductor device of claim 1 , wherein the doping layers include two to twenty doping layers included in the source/drain region.
9. The semiconductor device of claim 1 , wherein the contact plug includes a metal-semiconductor compound layer, and
wherein the metal-semiconductor compound layer contacts a portion of the doping layers.
10. The semiconductor device of claim 9 , wherein a lower end of the metal-semiconductor compound layer is disposed at a level lower than a level of an upper end of the plurality of channel layers.
11. The semiconductor device of claim 1 , wherein each of the second epitaxial layers and each of the doping layers extend horizontally with respect to the upper surface of the substrate in the first direction.
12. The semiconductor device of claim 1 , wherein the active region has a recess region recessed from an upper surface of the recess region on at least one side of the gate structure, and
wherein the first epitaxial layer is conformally disposed along an internal side surface of the recess region.
13. A semiconductor device comprising:
an active region extending in a first direction on a substrate;
a plurality of channel layers disposed to be spaced apart from each other in a vertical direction, perpendicular to an upper surface of the substrate, on the active region;
a gate structure intersecting the active region and the plurality of channel layers, and extending in a second direction perpendicular to the first direction on the substrate, and surrounding each of the plurality of channel layers;
a source/drain region disposed on the active region on at least one side of the gate structure and contacting the plurality of channel layers; and
a contact plug connected to the source/drain region,
wherein the source/drain region comprises:
a first epitaxial layer disposed on the active region and extending to contact the plurality of channel layers;
second epitaxial layers disposed on the first epitaxial layer, each second epitaxial layer including impurities in a first concentration and having a first thickness; and
doping layers stacked alternately with the second epitaxial layers, each doping layer including the impurities in a second concentration and having a second thickness less than the first thickness,
wherein among the second epitaxial layers, the lowermost second epitaxial layer covers an entire internal side surface of the first epitaxial layer, and
wherein the contact plug contacts at least a portion of the doping layers.
14. The semiconductor device of claim 13 , wherein concentrations of the impurities in the second epitaxial layers are the same as each other.
15. The semiconductor device of claim 13 , wherein each of the second epitaxial layers and the doping layers has a downwardly convex shape in the first direction.
16. The semiconductor device of claim 15 , wherein the active region includes a recess region recessed from an upper surface of the recess region on at least one side of the gate structure, and
wherein each of the first epitaxial layer, the second epitaxial layers, and the doping layers is conformally disposed along an internal side surface of the recess region.
17. The semiconductor device of claim 13 , wherein the contact plug includes a metal-semiconductor compound layer, and
wherein the metal-semiconductor compound layer contacts some doping layers, among the doping layers.
18. The semiconductor device of claim 17 , wherein the metal-semiconductor compound layer further contacts at least a portion of the second epitaxial layers.
19. A semiconductor device comprising:
an active region extending in a first direction on a substrate;
a gate structure intersecting the active region and extending in a second direction perpendicular to the first direction on the substrate;
a source/drain region disposed on the active region on at least one side of the gate structure; and
a contact plug connected to the source/drain region,
wherein the source/drain region comprises:
epitaxial layers each having a first thickness; and
doping layers stacked alternately with the epitaxial layers, each doping layer including at least one of phosphorus (P), arsenic (As), boron (B), gallium (Ga), antimony (Sb), aluminum (Al), thallium (Tl), and indium (In) in an impurity concentration of about 1×10 19 atoms/cm 3 to about 1×10 22 atoms/cm 3 and having a second thickness less than the first thickness, and
wherein the contact plug contacts at least a portion of the doping layers.
20. The semiconductor device of claim 19 , wherein the impurity concentration of each of the doping layers is higher than an impurity concentration of each of the epitaxial layers.