Semiconductor device and method of manufacturing semiconductor device
View Patent ↗A method of fabricating a semiconductor device includes applying a plasma to a portion of a metal dichalcogenide film. The metal dichalcogenide film includes a first metal and a chalcogen selected from the group consisting of S, Se, Te, and combinations thereof. A metal layer including a second metal is formed over the portion of the metal dichalcogenide film after applying the plasma.
1. A method of fabricating a semiconductor device, comprising:
forming a first metal dichalcogenide monolayer film over a substrate,
forming a second metal dichalcogenide monolayer film over the first metal dichalcogenide monolayer film,
wherein the first and second metal dichalcogenide films comprise a first metal and a chalcogen selected from the group consisting of S, Se, Te, and combinations thereof;
forming a patterned buffer layer over the first and second metal dichalcogenide monolayer films;
removing a first portion of the second metal dichalcogenide monolayer film through openings in the patterned buffer layer to expose a first portion of the first metal dichalcogenide monolayer film;
applying a plasma to second portions of the second metal dichalcogenide monolayer film to replace a chalcogen from the second metal dichalcogenide monolayer film; and
forming a metal layer comprising a second metal over the second portions of the second metal dichalcogenide monolayer film after applying the plasma.
2. The method according to claim 1 , wherein the plasma is a hydrogen plasma.
3. The method according to claim 1 , wherein a pressure of the plasma ranges from 10 mTorr to 500 mTorr, and the plasma is applied at a power ranging from 10 W to 150 W.
4. The method according to claim 1 , wherein the first metal and second metal are different metals.
5. The method according to claim 1 , wherein the first metal is one or more selected from the group consisting of Mo, W, Pd, and Hf.
6. The method according to claim 1 , wherein the second metal is one or more selected from the group consisting of Ni, Mo, In, Ti, W, Sc, Pd, Pt, Co, and Ru.
7. The method according to claim 1 , further comprising forming a second metal layer comprising a third metal over the metal layer.
8. The method according to claim 7 , wherein the third metal is less reactive than the second metal.
9. The method according to claim 7 , wherein the third metal is one or more selected from the group consisting of Au, Pt, Cu, and TiN.
10. A method of fabricating a semiconductor device, comprising:
replacing chalcogen of a metal chalcogenide film with hydrogen to form a metal chalcogenide having a surface layer comprising hydrogen,
wherein the metal chalcogenide film comprises a first metal and a chalcogen selected from the group consisting of S, Se, Te, and combinations thereof;
forming a patterned buffer layer over the metal chalcogenide film, the buffer layer having openings exposing portions of the metal chalcogenide film; and
replacing the hydrogen of the surface layer of the metal chalcogenide with a second metal to form a metal chalcogenide film having a surface layer comprising the second metal.
11. The method according to claim 10 , wherein the replacing the chalcogen of the metal chalcogenide film with hydrogen includes applying a hydrogen plasma to the metal chalcogenide film.
12. The method according to claim 11 , wherein the hydrogen plasma is applied at a plasma pressure ranging from 10 mTorr to 500 mTorr, and a power ranging from 10 W to 150 W.
13. The method according to claim 10 , wherein the first metal is one or more selected from the group consisting of Mo, W, Pd, and Hf.
14. The method according to claim 10 , wherein the second metal is one or more selected from the group consisting of Ni, Mo, In, Ti, W, Sc, Pd, Pt, Co, and Ru.
15. The method according to claim 10 , further comprising forming a second metal layer comprising a third metal over the metal layer, wherein the third metal is less reactive than the second metal.
16. A method of fabricating a semiconductor device, comprising:
forming a metal dichalcogenide film over a substrate,
wherein the metal dichalcogenide film comprises a first metal and a chalcogen selected from the group consisting of S, Se, Te, and combinations thereof;
forming a buffer layer over the metal dichalcogenide film;
patterning the buffer layer to expose portions of the metal dichalcogenide film;
replacing the chalcogen in a surface layer of the exposed portions of the metal dichalcogenide film with hydrogen; and
replacing the hydrogen in the surface layer of the exposed portions of the metal dichalcogenide film with a second metal different from the first metal.
17. The method according to claim 16 , wherein the buffer layer is a photoresist layer or an oxide layer.
18. The method according to claim 16 , wherein the replacing chalcogen in the surface layer of the metal dichalcogenide film with hydrogen includes applying a hydrogen plasma at a plasma pressure ranging from 10 mTorr to 500 mTorr and a power ranging from 10 W to 150 W to the metal dichalcogenide film.
19. The method according to claim 16 , further comprising forming a second metal layer comprising a third metal selected from the group consisting of Au, Pt, Cu, and TiN over the metal dichalcogenide film.
20. The method according to claim 10 , wherein the buffer layer is a photoresist layer or an oxide layer.