IP Library › Granted Patent US 12,394,690
Granted Patent B2
US 12,394,690 · App. 18/092,999 · Granted Aug 19, 2025

Systems and methods of nano-particle bonding for electronics cooling

Inventor: James Scott Sutherland (Painted Post, NY)
Assignee: CORNING RESEARCH & DEVELOPMENT CORPORATION
H01L23/4735B82Y30/00
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Quick Facts
Patent No.
US 12,394,690
App. No.
18/092,999
Granted
Aug 19, 2025
Kind
B2
Abstract

Devices and methods for providing cooling to electronics equipment is provided herein. A cooling manifold includes a first substrate having a first hole. A layer of nano-particles is disposed between the first substrate and an electronics surface associated with the electronics equipment. The layer of nano-particles defines a seal between the first substrate and the electronics surface, and further defines a channel extending within the seal. After an application of heat, the layer of nano-particles forms the seal such that the device is fluid impermeable, so as to allow a coolant fluid to enter through the first hole to flow through the channel to reduce or remove the heat generated by the electronics equipment associated with the electronics surface.

Claims (48)

1. A cooling manifold for electronics equipment, the cooling manifold comprising:

a first substrate having a first hole;

an electronics surface associated with the electronics equipment; and

a layer of nano-particles disposed between the first substrate and the electronics surface;

wherein the layer of nano-particles is formed after application of heat to a layer of nano-particle medium positioned between the first substrate and the electronics surface, wherein the layer of nano-particles defines at least a portion of a seal between the first substrate and the electronics surface, wherein the seal defines a channel between the first substrate and the electronics surface; and

wherein the cooling manifold is fluid impermeable so as to allow a coolant fluid entering through the first hole of the first substrate to flow through the channel of the seal to reduce or remove heat generated by the electronics equipment.

2. The cooling manifold of claim 1 , wherein the layer of nano-particles comprises metallic nano-particles.

3. The cooling manifold of claim 1 , wherein the layer of nano-particles comprises a filler particle.

4. The cooling manifold of claim 3 , wherein the filler particle is a CTE matching glass or ceramic particle.

5. The cooling manifold of claim 1 , further comprising at least one channel wall extending at least partially through the channel, and wherein the at least one channel wall extends between the first substrate and the electronics surface.

6. The cooling manifold of claim 5 , wherein the at least one channel wall is formed by a second layer of nano-particles disposed between the first substrate and the electronics surface.

7. The cooling manifold of claim 5 , wherein the at least one channel wall forms a tortuous path.

8. The cooling manifold of claim 5 , wherein the at least one channel wall forms a plurality of parallel paths.

9. The cooling manifold of claim 5 , further comprising at least one cavity formed in the first substrate, wherein the at least one cavity further defines the channel between the first substrate and the electronics surface.

10. The cooling manifold of claim 1 , further comprising at least one deposit of nano-particles disposed on the electronics surface, wherein the at least one deposit of nano-particles induces nucleate boiling of the coolant fluid within the channel, and wherein the at least one deposit of nano-particles has a deposit thickness, wherein the deposit thickness is less than a thickness of the layer of nano-particles.

11. The cooling manifold of claim 10 , wherein the at least one deposit of nano-particles is a plurality of deposits of nano-particles, and wherein the plurality of deposits of nano-particles are surrounded by at least one margin of non-coated electronics surface.

12. The cooling manifold of claim 10 , wherein the at least one deposit of nano-particles enables local convection in nucleate boiling regions, wherein the coolant fluid flows towards the at least one deposit of nano-particles to replace heated coolant fluid.

13. The cooling manifold of claim 1 , wherein the first substrate further comprises a second hole, wherein the coolant fluid exits the channel through the second hole.

14. The cooling manifold of claim 1 , wherein the layer of nano-particles is between 5-50 microns thick.

15. The cooling manifold of claim 1 , wherein the layer of nano-particles is between 0.5-5 microns thick.

16. The cooling manifold of claim 1 , wherein the portion of the seal comprises at least one hole such that the coolant fluid exits the channel through the at least one hole.

17. A cooling manifold for electronics equipment, the cooling manifold comprising:

an electronics surface associated with the electronics equipment;

a first substrate comprising a plurality of jet impingement regions, wherein each of the plurality of jet impingement regions comprises:

a jet impingement hole;

a return hole; and

a cavity formed in a first side of the first substrate, disposed about the jet impingement hole, configured to connect the jet impingement hole and the return hole; and

a first layer of nano-particles disposed between the first side of the first substrate and the electronics surface;

wherein the layer of nano-particles is formed after application of heat to a layer of nano-particle medium positioned between the first substrate and the electronics surface, wherein the layer of nano-particles defines at least a portion of a seal between the first side of the first substrate and the electronics surface wherein the seal defines a channel between the first substrate and the electronics surface; and

wherein the cooling manifold is fluid impermeable so as to allow a coolant fluid to enter each jet impingement region of the plurality of jet impingement regions through the jet impingement hole to flow through the channel to reduce or remove heat generated by the electronics equipment associated with the electronics surface, and flow out of the return hole.

18. The cooling manifold of claim 17 , further comprising:

a second layer of nano-particles disposed between a second side of the first substrate and a third substrate, wherein the third substrate comprises:

an inlet hole;

an outlet hole;

a distribution channel disposed on a first side of the third substrate, wherein the distribution channel is configured to provide fluid communication between the inlet hole and each of the jet impingement holes within the plurality of jet impingement regions; and

a return channel disposed on the first side of the third substrate, wherein the return channel is configured to provide fluid communication between the outlet hole and each of the return holes within each of the plurality of jet impingement regions,

wherein the return channel is distinct from the distribution channel.

19. A cooling manifold for electronics equipment, the cooling manifold comprising:

a first substrate having a plurality of first holes and a plurality of second holes;

a plurality of electronics surfaces associated with the electronics equipment;

a first layer of nano-particles disposed between a first side of the first substrate and the plurality of electronics surfaces;

wherein the first layer of nano-particles is formed after application of heat to a layer of nano-particle medium positioned between the first substrate and the electronics surface, wherein the layer of nano-particles defines at least a portion of a seal between the first substrate and each of the plurality of electronics surfaces, wherein one of the plurality of first holes and one of the plurality of second holes is contained within the seal, wherein the seal defines a channel between the first substrate and each of the plurality of electronics surfaces; and

a second layer of nano-particles disposed between a second side of the first substrate and a third substrate, wherein the third substrate comprises:

an inlet hole;

an outlet hole;

a distribution channel disposed on a first side of the third substrate, wherein the distribution channel is configured to provide fluid communication between the inlet hole and each of the plurality of first holes; and

a return channel disposed on the first side of the third substrate, wherein the return channel is configured to provide fluid communication between the outlet hole and each of the plurality of second holes, wherein the return channel is distinct from the distribution channel; and

wherein the cooling manifold is fluid impermeable so as to allow a coolant fluid entering through the inlet hole of the third substrate to flow through the distribution channel to each of the plurality of first holes, flow through the channel defined between the first substrate and the plurality of electronics surfaces to reduce or remove heat generated by the electronics equipment associated with the plurality of electronics surfaces, and flow out of the plurality of second holes, through the return channel and out of the outlet hole.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 17, 2023
From: SUTHERLAND, JAMES SCOTT
To: CORNING RESEARCH & DEVELOPMENT CORPORATION
Reel/Frame 063022/0386 →
Continuity (2)
Provisional Application 63296219 · Jan 4, 2022
Related Publication 20230215781A1 · Jul 6, 2023
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