Detection substrate, manufacturing method therefor and flat panel detector
View Patent ↗Provided are a detection substrate, a manufacturing method therefor and a flat panel detector. The detection substrate includes: a flexible substrate; a scintillator layer on a side of the flexible substrate, where the scintillator layer includes a central portion and a peripheral portion on at least one side of the central portion, the central portion and the peripheral portion are of an integrated structure, a thickness of the central portion at each position is approximately equal, and in a direction from an edge of the flexible substrate to a center of the flexible substrate, a thickness of the peripheral portion progressively increases; and a reinforcement structure, the reinforcement structure and the scintillator layer being on the same side of the flexible substrate, and the reinforcement structure at least covering part of the peripheral portion.
1. A detection substrate, comprising:
a flexible substrate:
a scintillator layer on a side of the flexible substrate, wherein the scintillator layer comprises a central portion and a peripheral portion on at least one side of the central portion, the central portion and the peripheral portion are of an integrated structure, a thickness of the central portion at each position is approximately equal, and in a direction from an edge of the flexible substrate to a center of the flexible substrate, a thickness of the peripheral portion progressively increases:
a reinforcement structure, wherein the reinforcement structure and the scintillator layer are disposed on a same side of the flexible substrate, and the reinforcement structure at least covers part of the peripheral portion; and
a support layer on a side of the flexible substrate facing away from the scintillator layer;
wherein the reinforcement structure is an integrated structure; and
a material of the reinforcement structure being the integrated structure comprises a tape adhesive or an ultraviolet (UV) adhesive.
2. The detection substrate according to claim 1 , wherein a maximum thickness of the reinforcement structure is less than or equal to the thickness of the central portion and greater than or equal to 50% of the thickness of the central portion.
3. The detection substrate according to claim 1 , wherein a maximum thickness of the reinforcement structure is approximately equal to the thickness of the central portion.
4. The detection substrate according to claim 1 , wherein
a preset distance is provided between an edge of an orthographic projection of the peripheral portion on the flexible substrate close to an edge of the flexible substrate and the edge of the flexible substrate; and
the reinforcement structure covers at least part of an area of the flexible substrate that is not covered with the peripheral portion.
5. The detection substrate according to claim 1 , wherein the flexible substrate comprises a photosensitive area and a peripheral area around the photosensitive area:
wherein the central portion is located in the photosensitive area, the peripheral portion is located completely or at least partially in the peripheral area, and the peripheral portion is arranged around the central portion.
6. The detection substrate according to claim 1 , wherein the flexible substrate comprises a photosensitive area and a peripheral area around the photosensitive area:
wherein the peripheral area comprises a bonding area and a non-bonding area, and the peripheral portion is arranged on a side of the bonding area.
7. A detection substrate, comprising:
a flexible substrate;
a scintillator layer on a side of the flexible substrate, wherein the scintillator layer comprises a central portion and a peripheral portion on at least one side of the central portion, the central portion and the peripheral portion are of an integrated structure, a thickness of the central portion at each position is approximately equal, and in a direction from an edge of the flexible substrate to a center of the flexible substrate, a thickness of the peripheral portion progressively increases;
a reinforcement structure, wherein the reinforcement structure and the scintillator layer are disposed on a same side of the flexible substrate, and the reinforcement structure at least covers part of the peripheral portion; and
a support layer on a side of the flexible substrate facing away from the scintillator layer;
wherein the reinforcement structure comprises:
a first reinforcement structure at a side of the peripheral portion away from the central portion; and
a second reinforcement structure between the first reinforcement structure and the peripheral portion;
wherein the first reinforcement structure is in contact with the second reinforcement structure; and
a material of the first reinforcement structure comprises a tape adhesive, and a material of the second reinforcement structure comprises a UV adhesive.
8. The detection substrate according to claim 1 , further comprising:
an encapsulation layer between the scintillator layer and the reinforcement structure;
wherein the encapsulation layer completely covers the scintillator layer, an edge portion of the encapsulation layer makes contact with the flexible substrate, and the encapsulation layer is configured according to a shape of the scintillator layer.
9. The detection substrate according to claim 1 , further comprising:
a transistor between the flexible substrate and the scintillator layer:
a photoelectric conversion device between the transistor and the scintillator layer; and
a bias voltage line between the photoelectric conversion device and the scintillator layer;
wherein a bottom electrode of the photoelectric conversion device is electrically connected with the transistor, and the bias voltage line is electrically connected with a top electrode of the photoelectric conversion device.
10. A manufacturing method for the detection substrate of claim 7 , comprising:
forming the scintillator layer on the side of a flexible substrate, wherein the scintillator layer comprises the central portion and the peripheral portion on at least one side of the central portion, the central portion and the peripheral portion are of an integrated structure, the thickness of the central portion at each position is approximately equal, and in the direction from the edge of the flexible substrate to the center of the flexible substrate, the thickness of the peripheral portion progressively increases;
forming a reinforcement structure on the side of the flexible substrate, wherein the reinforcement structure and the scintillator layer are disposed on the same side of the flexible substrate, and the reinforcement structure at least covers part of the peripheral portion;
embedding a surface of the scintillator layer facing away from the flexible substrate into a concave structure of a base platform of an attaching apparatus, wherein the concave structure is configured according to a shape of the scintillator layer; and
attaching a support layer to a side of the flexible substrate facing away from the scintillator layer.
11. A manufacturing method for the detection substrate of claim 1 comprising:
forming the scintillator layer on the side of a flexible substrate, wherein the scintillator layer comprises the central portion and the peripheral portion on at least one side of the central portion, the central portion and the peripheral portion are of an integrated structure, the thickness of the central portion at each position is approximately equal, and in the direction from the edge of the flexible substrate to the center of the flexible substrate, the thickness of the peripheral portion progressively increases;
forming a reinforcement structure on the side of the flexible substrate, wherein the reinforcement structure and the scintillator layer are disposed on the same side of the flexible substrate, and the reinforcement structure at least covers part of the peripheral portion;
embedding a surface of the scintillator layer facing away from the flexible substrate into a concave structure of a base platform of an attaching apparatus, wherein the concave structure is configured according to a shape of the scintillator layer; and
attaching a support layer to a side of the flexible substrate facing away from the scintillator layer.
12. The manufacturing method according to claim 11 , wherein the flexible substrate comprises a bonding area and a non-bonding area, and the forming the scintillator layer on the side of the flexible substrate further comprises:
removing the peripheral portion on the side of the non-bonding area of the flexible substrate; and
obtaining the scintillator layer comprising the central portion and the peripheral portion located on the side of the bonding area of the flexible substrate.
13. The manufacturing method according to claim 11 ,
wherein after the forming a reinforcement structure, the manufacturing method further comprises:
placing a side of the scintillator layer on a base platform of an attaching apparatus in such a way that the side of the scintillator layer is completely attached to the base platform; and
attaching a support layer to the side of the flexible substrate facing away from the scintillator layer.
14. The manufacturing method according to claim 11 , wherein the attaching the support layer to the side of the flexible substrate facing away from the scintillator layer comprises:
placing the support layer on a support platform in the attaching apparatus; and
attaching the support layer to the side of the flexible substrate facing away from the scintillator layer in a rolling manner.
15. The manufacturing method according to claim 11 , wherein after forming the scintillator layer and before forming the reinforcement structure, the manufacturing method further comprises:
forming an encapsulation layer on the side of the scintillator layer facing away from the flexible substrate;
wherein the encapsulation layer completely covers the scintillator layer, an edge portion of the encapsulation layer makes contact with the flexible substrate, and the encapsulation layer is configured according to a shape of the scintillator layer.