Profile optimization for high aspect ratio memory using an etch front metal catalyst
A method for etching features in a silicon containing stack below a patterned mask is provided. The stack is partially etched by providing a halogen containing etch gas and forming the halogen containing etch gas into a halogen containing plasma, wherein the halogen containing plasma partially etches features with an etch front. A metal catalyst containing layer is deposited on the etch front of the features by providing a metal catalyst containing gas, forming the metal catalyst containing gas into a plasma, and selectively depositing more of the metal catalyst containing layer on the etch front and bottoms of the features than tops of the features. The features are further etched by providing a fluorine containing etch gas and forming a fluorine containing plasma, wherein the plasma selectively etches sidewalls adjacent to the etch front of the features with respect to sidewalls adjacent to tops of the features.
1. A method for etching features in a silicon containing stack below a patterned mask in an etch chamber, comprising:
a) partially etching the stack, comprising:
providing a halogen containing etch gas; and
forming the halogen containing etch gas into a halogen containing plasma, wherein the halogen containing plasma partially etches features into the stack, wherein the features have an etch front;
b) depositing a metal catalyst containing layer on the etch front of the features, comprising:
providing a metal catalyst containing gas;
forming the metal catalyst containing gas into a metal catalyst containing plasma; and
selectively depositing more of the metal catalyst containing layer on the etch front and bottoms of the features than tops of the features; and
c) further etching the features, comprising:
providing a fluorine containing etch gas; and
forming the fluorine containing etch gas into a fluorine containing plasma, wherein the fluorine containing plasma selectively etches sidewalls adjacent to the etch front of the features with respect to sidewalls adjacent to tops of the features.
2. The method, as recited in claim 1 , wherein the halogen containing etch gas is metal catalyst free.
3. The method as recited in claim 1 , wherein the metal catalyst containing layer comprises at least one of a titanium containing component, a tungsten containing component, a cadmium containing component, and a palladium containing component.
4. The method, as recited in claim 1 , wherein the features have a depth and wherein the partially etching the stack etches at least 90% of the depth of the features.
5. The method, as recited in claim 1 , wherein a depth of the features is at least 1000 nm and wherein the features have a width of less than 120 nm.
6. The method, as recited in claim 1 , wherein the partially etching is an anisotropic etch and the further etching is an isotropic etch.
7. The method, as recited in claim 1 , wherein the metal catalyst containing gas comprises at least one of titanium tetrachloride (TiC 4 ), titanium butoxide (Ti(OBu)4), titanium ethoxide (Ti(OC 2 H 5 ) 4 ), titanium propoxide (Ti(OCH(CH 3 ) 2 ) 4 ), trimethoxy(pentamethycyclopentadienyl)titanium (C 5 (CH 3 ) 5 Ti(OCH 3 ) 3 ), and Ti(NR 1 R 2 ) 4 where R 1 and R 2 could be CH 3 , C2H 5 or C3H 7 .
8. The method, as recited in claim 1 , further comprising depositing a liner that is metal catalyst free after partially etching the stack and before depositing the metal catalyst containing layer.
9. The method, as recited in claim 8 , wherein the liner is a carbon containing layer.
10. The method, as recited in claim 1 , wherein the stack comprises a plurality of alternating layers of silicon oxide and polysilicon or alternating layers of silicon oxide and silicon nitride.
11. A method for etching features in a silicon containing stack below a patterned mask in an etch chamber, comprising:
a) partially etching the stack, comprising:
providing a halogen containing etch gas; and
forming the halogen containing etch gas into a halogen containing plasma, wherein the halogen containing plasma partially etches features into the stack, wherein the features have an etch front;
b) depositing a liner on sidewalls of the features;
c) depositing a metal catalyst containing layer on the liner, comprising:
providing a metal catalyst containing gas; and
forming the metal catalyst containing gas into a metal catalyst containing plasma;
wherein the metal catalyst containing plasma causes the metal catalyst containing layer to be deposited on the liner; and
d) further etching the features, comprising:
providing a fluorine containing etch gas; and
forming the fluorine containing etch gas into a fluorine containing plasma, wherein the fluorine containing plasma selectively etches the liner near an etch front and forms a plasma of the metal catalyst containing layer, wherein the plasma of the metal catalyst containing layer isotropically etches the etch front.
12. The method, as recited in claim 11 , wherein the halogen containing etch gas is metal catalyst free.
13. The method as recited in claim 11 , wherein the metal catalyst containing layer comprises at least one of a titanium containing component, a tungsten containing component, a cadmium containing component, and a palladium containing component.
14. The method, as recited in claim 11 , wherein the features have a depth and wherein the partially etching the stack etches at least 90% of the depth of the features.
15. The method, as recited in claim 11 , wherein a depth of the features is at least 1000 nm and wherein the features have a width of less than 120 nm.
16. The method, as recited in claim 11 , wherein the partially etching is an anisotropic etch and the further etching is an isotropic etch.
17. The method, as recited in claim 11 , wherein the metal catalyst containing gas comprises at least one of titanium tetrachloride (TiC 4 ), titanium butoxide (Ti(OBu) 4 ), titanium ethoxide (Ti(OC 2 H 5 ) 4 ), titanium propoxide (Ti(OCH(CH 3 ) 2 ) 4 ), trimethoxy(pentamethycyclopentadienyl)titanium (C 5 (CH 3 ) 5 Ti(OCH 3 ) 3 ), and Ti(NR 1 R 2 ) 4 where R 1 and R 2 could be CH 3 , C2H 5 or C3H 7 .
18. The method, as recited in claim 11 , wherein the liner is a carbon containing layer.