Display apparatus and method of manufacturing the same
A display apparatus includes a base substrate including a display area and a peripheral area, a conductive layer formed on the base substrate in an entirety of the peripheral area and the display area, a buffer layer on the conductive layer, a thin film transistor on the buffer layer in the display area, an electrode in a contact hole that is formed through the buffer layer to expose a side surface of the conductive layer in the peripheral area, the electrode making contact the conductive layer, an insulating pattern in the contact hole on the electrode, and a wiring on the insulating pattern and electrically connected to the electrode.
1. A method of manufacturing a display apparatus, the method comprising:
forming a conductive layer on a base substrate;
forming a buffer layer on the conductive layer;
forming an active pattern on the buffer layer;
forming an insulating layer on the active pattern;
forming a contact hole by partially removing the insulating layer and the buffer layer to expose the conductive layer;
forming an electrode that contacts the conductive layer in the contact hole;
forming an insulating pattern on the electrode so as to expose a portion of the electrode with a portion of the insulating pattern disposed in the contact hole; and
forming a wiring on the insulating pattern, the wiring being electrically connected to the electrode.
2. The method as claimed in claim 1 , wherein the conductive layer is an n+ doped amorphous silicon layer.
3. The method as claimed in claim 1 , further comprising:
forming a gate electrode on the insulating layer before forming the contact hole; and
forming an interlayer insulating layer on the gate electrode,
wherein in forming the contact hole, the contact hole is formed by partially removing the interlayer insulating layer, the insulating layer, and the buffer layer.
4. The method as claimed in claim 1 , wherein in forming the contact hole, a portion of the conductive layer is removed so as to penetrate completely through the conductive layer such that a side surface of the conductive layer is exposed, and
the side surface of the conductive layer directly contacts the electrode.
5. The method as claimed in claim 4 , wherein the electrode directly contacts the side surface of the conductive layer in the contact hole.
6. The method as claimed in claim 1 , wherein the base substrate includes at least one polyimide layer and at least one barrier film layer.
7. A method of manufacturing a display apparatus, the method comprising:
forming a conductive layer on a base substrate;
forming a buffer layer on the conductive layer;
forming an active pattern on the buffer layer;
forming an insulating layer on the active pattern;
forming a contact hole by partially removing the insulating layer, the buffer layer, and the conductive layer;
forming an electrode that contacts the conductive layer in the contact hole;
forming an insulating pattern on the electrode so as to expose a portion of the electrode; and
forming a wiring on the insulating pattern, the wiring directly connected to the electrode both at one location at a first side of the contact hole and at a second location spaced apart from the first side of the contact hole.
8. The method as claimed in claim 7 , wherein
in forming the contact hole, a portion of the conductive layer is removed so as to penetrate completely through the conductive layer such that a side surface of the conductive layer is exposed, and
the side surface of the conductive layer directly contacts the electrode in the contact hole.
9. The method as claimed in claim 8 , wherein the wiring makes direct contact with both a top surface of the electrode and a side surface of the electrode.
10. The method as claimed in claim 7 , wherein the wiring makes direct contact with both a top surface of the electrode and a side surface of the electrode.
11. The method as claimed in claim 7 , wherein a portion of the insulating pattern is in the contact hole.
12. The method as claimed in claim 7 , wherein
in forming the contact hole, a portion of the substrate is removed such that a side surface of the conductive layer is exposed, and
the side surface of the conductive layer directly contacts the electrode in the contact hole.