Transistor source/drain contacts and methods of forming the same
In an embodiment, a device includes: a source/drain region adjacent a channel region; an inter-layer dielectric on the source/drain region; a source/drain contact extending through the inter-layer dielectric and into the source/drain region; a metal-semiconductor alloy region between the source/drain contact and the source/drain region, the metal-semiconductor alloy region disposed beneath a top surface of the channel region, the metal-semiconductor alloy region including a first dopant; and a contact spacer around the source/drain contact, the contact spacer including the first dopant and an amorphizing impurity.
1. A method comprising:
forming a first highly-doped region in an epitaxial source/drain region by implanting a first dopant in a first portion of the epitaxial source/drain region;
etching a recess in the epitaxial source/drain region, the recess extending through the first highly-doped region;
forming an amorphous region in the epitaxial source/drain region by implanting an amorphizing impurity in a second portion of the epitaxial source/drain region, the second portion of the epitaxial source/drain region disposed at a bottom of the recess;
forming a second highly-doped region in the epitaxial source/drain region by implanting the first dopant in the amorphous region; and
annealing the epitaxial source/drain region to crystallize the amorphous region.
2. The method of claim 1 further comprising:
depositing a metal on the first highly-doped region and the second highly-doped region; and
reacting the metal with the first highly-doped region and the second highly-doped region to form a metal-semiconductor alloy region in the recess.
3. The method of claim 2 further comprising:
forming a source/drain contact in the recess and on the metal-semiconductor alloy region.
4. The method of claim 1 , wherein the amorphizing impurity has an atomic mass greater than 28, and the implanting an amorphizing impurity in the second portion of the epitaxial source/drain region comprises:
implanting the amorphizing impurity with an implantation energy in a range of 1 keV to 50 keV.
5. The method of claim 4 , wherein the amorphizing impurity is germanium, xenon, argon, or silicon.
6. The method of claim 1 , wherein etching the recess in the epitaxial source/drain region comprises:
etching the recess in the epitaxial source/drain region to a first depth, the first depth less than a height of the first highly-doped region; and
extending the recess into the epitaxial source/drain region to a second depth, the second depth greater than the height of the first highly-doped region.
7. The method of claim 1 further comprising:
forming a contact spacer in the recess, wherein the amorphizing impurity and the first dopant are implanted in the contact spacer.
8. The method of claim 1 , wherein the first dopant has the same conductivity type as the epitaxial source/drain region.
9. The method of claim 1 , wherein the first dopant is not implanted in a third portion of the epitaxial source/drain region, the third portion of the epitaxial source/drain region beneath the second portion of the epitaxial source/drain region.
10. A method comprising:
growing an epitaxial source/drain region adjacent a channel region;
etching a recess in the epitaxial source/drain region, the recess extending beneath the channel region;
forming an amorphous region in the epitaxial source/drain region by implanting an amorphizing impurity in a portion of the epitaxial source/drain region, the portion of the epitaxial source/drain region disposed at a bottom of the recess;
forming a highly-doped region in the epitaxial source/drain region by implanting a first dopant in the amorphous region, the first dopant different from the amorphizing impurity; and
annealing the epitaxial source/drain region to crystallize the amorphous region.
11. The method of claim 10 further comprising:
depositing a metal on the highly-doped region; and
reacting the metal with the highly-doped region to form a metal-semiconductor alloy region in the recess.
12. The method of claim 11 further comprising:
forming a source/drain contact in the recess and on the metal-semiconductor alloy region.
13. The method of claim 10 , wherein etching the recess in the epitaxial source/drain region comprises:
etching the recess in the epitaxial source/drain region to a first depth;
forming a contact spacer in the recess; and
extending the recess into the epitaxial source/drain region to a second depth.
14. The method of claim 13 , wherein the amorphizing impurity and the first dopant are implanted in the contact spacer.
15. The method of claim 10 , wherein the first dopant has the same conductivity type as the epitaxial source/drain region before forming the amorphous region.
16. The method of claim 10 , wherein annealing the epitaxial source/drain region comprises:
performing a melt anneal process to re-crystallize the amorphous region, wherein a melting point of the amorphous region is lower than a melting point of non-amorphized portions of the epitaxial source/drain region.
17. A method comprising:
forming a first highly-doped region in a source/drain region by implanting a first dopant using a first implantation energy in a range of 1 keV to 50 keV;
forming a recess in the source/drain region, the recess extending through the first highly-doped region;
forming an amorphous region in the source/drain region by implanting an amorphizing impurity at a bottom of the recess;
forming a second highly-doped region in the source/drain region by implanting a second dopant in the amorphous region using a second implantation energy in a range of 1 keV to 50 keV, the first dopant and the second dopant having the same conductivity type; and
re-crystallizing the amorphous region and activating the first dopant and the second dopant by performing an anneal process.
18. The method of claim 17 , further comprising:
forming a metal-semiconductor alloy in the recess, the metal-semiconductor alloy contacting the first highly-doped region and the second highly-doped region.
19. The method of claim 17 , wherein the amorphizing impurity is germanium, xenon, argon, or silicon.
20. The method of claim 17 , further comprising:
forming a contact spacer in the recess prior to forming the amorphous region, the amorphizing impurity and the second dopant being implanted into the contact spacer.