Semiconductor device including insulation gate-type transistors
A semiconductor device includes a semiconductor layer, an insulation gate-type first transistor which is formed in the semiconductor layer, an insulation gate-type second transistor which is formed in the semiconductor layer, and a control wiring which is formed on the semiconductor layer such as to be electrically connected to the first transistor and the second transistor, and transmits control signals that control the first transistor and the second transistor to be in ON states in a normal operation and that control the first transistor to be in an OFF state and the second transistor to be in an ON state in an active clamp operation.
1. A semiconductor device comprising:
a semiconductor layer including a main surface;
a first transistor of an insulation gate-type which is formed in the semiconductor layer;
a second transistor of an insulation gate-type which is formed in the semiconductor layer; and
a control wiring, which is formed on the semiconductor layer such as to be electrically connected to the first transistor and the second transistor, configured to transmit control signals that control the first transistor and the second transistor to be in ON states in a normal operation and that control the first transistor to be in an OFF state and the second transistor to be in an ON state in an active clamp operation, wherein
the control wiring includes a first control wiring which is electrically connected to the first transistor and a second control wiring which is electrically connected to the second transistor in a state of being electrically insulated from the first transistor,
the first transistor includes a first trench gate structure which has a first insulation layer in contact with the semiconductor layer and a first electrode facing the semiconductor layer across the first insulation layer,
the second transistor includes a second trench gate structure which has a second insulation layer in contact with the semiconductor layer and a second electrode facing the semiconductor layer across the second insulation layer,
during the normal operation, the first transistor and the second transistor are each controlled to be in the ON states via the first control wiring and the second control wiring, respectively, and
during the active clamp operation, the first transistor is controlled to be in the OFF state via the first control wiring, while the second transistor is controlled to be in the ON state via the second control wiring.
2. The semiconductor device according to claim 1 , wherein
the first transistor includes the plurality of first trench gate structures, and
the second transistor includes the plurality of second trench gate structures.
3. The semiconductor device according to claim 2 , wherein
the plurality of second trench gate structures are alternately arrayed with the plurality of first trench gate structures in a manner that one or the plurality of first trench gate structures are held therebetween.
4. The semiconductor device according to claim 2 , wherein
the plurality of first trench gate structures are formed at an interval along a first direction, and each extend in a band shape along a second direction which intersects the first direction, and
the plurality of second trench gate structures are formed at an interval along the first direction, and each extend in a band shape along the second direction.
5. The semiconductor device according to claim 1 , wherein
the first trench gate structure includes a first trench formed in the main surface, the first insulation layer along an inner wall of the first trench, and the first electrode embedded in the first trench across the first insulation layer, and
the second trench gate structure includes a second trench formed in the main surface, the second insulation layer along an inner wall of the second trench, and the second electrode embedded in the second trench across the second insulation layer.
6. A circuit module comprising:
a mounting substrate; and
the semiconductor device according to claim 2 which is mounted on the mounting substrate.
7. A semiconductor device comprising:
a semiconductor layer;
an insulation gate-type first transistor which includes a first channel and is formed in the semiconductor layer;
an insulation gate-type second transistor which includes a second channel and is formed in the semiconductor layer; and
a control wiring, which is formed on the semiconductor layer such as to be electrically connected to the insulation gate-type first transistor and the insulation gate-type second transistor, configured to transmit control signals that control the insulation gate-type first transistor and the insulation gate-type second transistor such that utilization rates of the first channel and the second channel in an active clamp operation become in excess of zero and less than utilization rates of the first channel and the second channel in a normal operation, wherein
the control wiring includes a first control wiring which is electrically connected to the insulation gate-type first transistor and a second control wiring which is electrically connected to the insulation gate-type second transistor in a state of being electrically insulated from the insulation gate-type first transistor,
the first channel is formed at a first channel rate in plan view,
the second channel is formed at a second channel rate different from the first rate in plan view, and
during the normal operation and the active clamp operation, the insulation gate-type first transistor and the insulation gate-type second transistor are each controlled via the first control wiring and the second control wiring, respectively, so that the utilization rate of the first channel and the second channel during the active clamp operation is greater than zero and less than the utilization rates of the first channel and the second channel during the normal operation.
8. The semiconductor device according to claim 7 , wherein the second channel rate is less than the first channel rate.