Buried gate semiconductor device having a dielectric layer between two electrodes
A semiconductor device and a method of manufacturing a semiconductor device are provided. The semiconductor device includes a substrate having a trench and a gate structure in the trench. The trench includes a lower gate electrode, an upper gate electrode over the lower gate electrode and a first dielectric layer partially disposed between the lower gate electrode and the upper gate electrode.
1. A semiconductor device, comprising:
a substrate having a trench; and
a gate structure in the trench, wherein the gate structure comprising:
a lower gate electrode;
an upper gate electrode over the lower gate electrode;
a first dielectric layer partially disposed between the lower gate electrode and the upper gate electrode;
a second dielectric layer conformally formed on a bottom surface and a sidewall of the trench and disposed between the lower gate electrode and the substrate, wherein the first dielectric layer is spaced apart from the substrate by the second dielectric layer; and
a capping layer formed on the upper gate electrode, the capping layer being in contact with the first dielectric layer and the upper gate electrode,
wherein a horizontal distance between the upper gate electrode and the substrate is greater than a horizontal distance between the lower gate electrode and the substrate;
wherein a top surface of the capping layer, a top surface of the first dielectric layer, and a top surface of the second dielectric layer are coplanar.
2. The semiconductor device of claim 1 , wherein the lower gate electrode and the upper gate electrode are configured to receive different voltages, wherein a horizontal distance between the capping layer and the substrate is greater than a horizontal distance between the lower gate electrode and the substrate.
3. The semiconductor device of claim 2 , wherein a voltage of the lower gate electrode is greater than a voltage of the upper gate electrode.
4. The semiconductor device of claim 2 , wherein a voltage difference between the lower gate electrode and the upper gate electrode is greater than 0.3 volts (V).
5. The semiconductor device of claim 1 ,
wherein a density of the second dielectric layer is lower than a density of the first dielectric layer;
wherein the horizontal distance between the upper gate electrode and the substrate is a sum of a thickness of the first dielectric layer and a thickness of the second dielectric layer;
wherein the horizontal distance between the lower gate electrode and the substrate is the thickness of the second dielectric layer.
6. The semiconductor device of claim 5 , wherein the first dielectric layer directly contacts the lower gate electrode and the upper gate electrode, wherein the first dielectric layer has a base portion formed between the lower gate electrode and the upper gate electrode and an extending portion integrally extended from the base portion to a top surface of the substrate, wherein the extending portion of the first dielectric layer is formed between the upper gate electrode and the second dielectric layer and is in contact with the second dielectric layer, wherein a thickness of the extending portion of the first dielectric layer is uniform, wherein a width of the capping layer is the same as a width of the upper gate electrode.
7. The semiconductor device of claim 1 , wherein the gate structure is disposed in an active region of the substrate.
8. The semiconductor device of claim 1 , wherein the gate structure is disposed in an isolation region of the substrate.
9. A semiconductor device, comprising:
a substrate having a trench;
a gate structure in the trench, wherein the gate structure comprising:
a lower gate electrode;
an upper gate electrode over the lower gate electrode;
a first dielectric layer conformally formed on a bottom surface and a sidewall of the trench and disposed between the lower gate electrode and the substrate;
a second dielectric layer, wherein the first dielectric layer is spaced apart from the upper gate electrode by the second dielectric layer; and
a capping layer formed on the upper gate electrode, the capping layer being in contact with the second dielectric layer and the upper gate electrode;
wherein the lower gate electrode and the upper gate electrode are configured to receive different voltages;
wherein a horizontal distance between the upper gate electrode and the substrate is greater than a horizontal distance between the lower gate electrode and the substrate;
wherein a top surface of the capping layer, a top surface of the first dielectric layer, and a top surface of the second dielectric layer are coplanar.
10. The semiconductor device of claim 9 , wherein the trench has a curved bottom.
11. The semiconductor device of claim 9 , wherein a voltage of the lower gate electrode is greater than a voltage of the upper gate electrode.
12. The semiconductor device of claim 9 , wherein a voltage difference between the lower gate electrode and the upper gate electrode is greater than 0.3 volts (V).
13. The semiconductor device of claim 9 ,
wherein a density of the first dielectric layer is lower than a density of the second dielectric layer;
wherein the horizontal distance between the upper gate electrode and the substrate is a sum of a thickness of the first dielectric layer and a thickness of the second dielectric layer;
wherein the horizontal distance between the lower gate electrode and the substrate is the thickness of the first dielectric layer.
14. The semiconductor device of claim 13 , wherein the first dielectric layer and the second dielectric layer comprises different densities, and the second dielectric layer directly contacts the lower gate electrode and the upper gate electrode, wherein the second dielectric layer has a base portion formed between the lower gate electrode and the upper gate electrode and an extending portion integrally extended from the base portion to the top surface of the substrate, wherein the extending portion of the second dielectric layer is formed between the upper gate electrode and the first dielectric layer and is in contact with the first dielectric layer, wherein a thickness of the extending portion of the second dielectric layer is uniform, wherein a width of the capping layer is the same as a width of the upper gate electrode.
15. The semiconductor device of claim 9 , wherein the gate structure is disposed in an active region of the substrate.
16. The semiconductor device of claim 9 , wherein the gate structure is disposed in an isolation region of the substrate.