IP Library › Granted Patent US 12,431,637
Granted Patent B2
US 12,431,637 · App. 18/213,691 · Granted Sep 30, 2025

On-chip terahertz thin-film devices

Inventors: Ileana-Cristina Benea-Chelmus (Echichens, CH); Marko Loncar (Belmont, MA); Jerome Faist (Zurich, CH); Alessandro Tomasino (Renens, CH); Amirhassan Shams-Ansari (Arlington, MA); Alexa Herter (Zurich, CH); Yazan Lampert Almahmoud (Chavannes-près-Renens, CH)
Assignees: ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL); ETH ZURICH; PRESIDENT AND FELLOWS OF HARVARD COLLEGE
H01Q21/28H01L23/66H01Q1/2283H01L2223/6677
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Quick Facts
Patent No.
US 12,431,637
App. No.
18/213,691
Granted
Sep 30, 2025
Kind
B2
Abstract

A terahertz device for detecting or emitting or for both detecting and emitting electromagnetic waves in the terahertz frequency range. The terahertz device comprises: a first waveguide branch and a second waveguide branch, the first and second waveguide branches being configured to allow optical signals to propagate through them, the first and second waveguide branches being nonlinear dielectric elements with a thickness of at most 500 micrometres; and an antenna arrangement comprising a set of antennas for capturing and/or emitting electromagnetic waves in the terahertz frequency range, the antennas being placed along at least one of the waveguide branches in an immediate vicinity of the respective waveguide branch and/or around the respective waveguide branch to at least partially enclose the respective waveguide branch in a respective antenna gap of the respective antenna.

Claims (26)

1. A terahertz device for detecting or emitting or for both detecting and emitting electromagnetic waves in the terahertz frequency range, the terahertz device comprising:

a first waveguide branch and a second waveguide branch, the first and second waveguide branches being configured to allow optical signals to propagate through the first and second waveguide branches, the first and second waveguide branches being nonlinear dielectric elements with a thickness of at most 500 micrometers;

an antenna arrangement comprising at least two antennas for capturing and/or emitting electromagnetic waves in the terahertz frequency range, the antennas being placed along at least one of the waveguide branches in an immediate vicinity of the respective waveguide branch and/or at least partially around the respective waveguide branch to at least partially enclose the respective waveguide branch in a respective antenna gap of the respective antenna; and

wherein two of the antennas are characterized by one or more mutually different antenna properties, and/or the first and second waveguide branches are characterized by one or more mutually different waveguide properties, or wherein two of the antennas are arranged along one of the waveguide branches.

2. The terahertz device according to claim 1 , wherein the antenna arrangement comprises at least two antennas arranged along one of the first and second waveguide branches and at least one antenna arranged along the other one of the first and second waveguide branches, or wherein the antenna arrangement comprises at least two antennas of mutually different types and/or sizes.

3. The terahertz device according to claim 1 , wherein one or more antennas along the second waveguide branch are spatially offset with respect to the spatially corresponding antennas along the first waveguide branch along a longitudinal axis of the first waveguide branch and/or the second waveguide branch.

4. The terahertz device according to claim 3 , wherein an offset distance is determined by imposing that the group time delay taken by the optical signals to travel the spatial offset distance is dependent on a cycle of the electromagnetic waves in the terahertz range, and wherein the offset distance is optionally determined by imposing that the group time delay taken by the optical signals to travel the spatial offset distance is optionally equal or substantially equal to a half cycle or a multiple of the half cycle of the electromagnetic waves in the terahertz range.

5. The terahertz device according to claim 1 , wherein the number of antennas along the first waveguide branch is at least two, and the number of antennas along the second waveguide branch its at least two.

6. The terahertz device according to claim 5 , wherein any two antennas along the first waveguide branch are mutually of a different type and/or difference size, and/or any two antennas along the second waveguide branch antennas are mutually of a different type and/or difference size.

7. The terahertz device according to claim 1 , wherein the spatial separation between any two adjacent antennas along the first and/or second waveguide branch equals substantially twice a spatial offset distance between the respective antenna along the first waveguide branch and the spatially corresponding antenna along the second waveguide branch along a longitudinal axis of the first waveguide branch and/or the second waveguide branch.

8. The terahertz device according to claim 1 , wherein the first and/or second optical waveguide branches comprise(s) a core made of lithium niobate, barium titanate, and/or lithium tantalate.

9. The terahertz device according to according to claim 1 , wherein the first and/or second optical waveguide branches comprise(s) a core, and wherein the core has a thickness of between 0.1 micrometers and 0.9 micrometers.

10. The terahertz device according to according to claim 1 , wherein the first and/or second waveguide branches comprise(s) a first dielectric layer, a second dielectric layer, and a core arranged between the first and second dielectric layers.

11. The terahertz device according to claim 1 , wherein the antenna properties are at least one of the following: antenna type, antenna size, and antenna material, and/or wherein the waveguide properties are at least one of the following: waveguide branch length, waveguide branch cross-sectional dimension(s), waveguide branch material, existence of a separate fiber-to-chip coupler coupled to the respective waveguide branch, and existence of a separate chip-to-fiber coupler coupled to the respective waveguide branch.

12. The terahertz device according to claim 1 , wherein the terahertz device is built on an integrated circuit, and wherein the integrated circuit further comprises any one of the following elements: an optical signal generator, a modulator, a signal filter, dispersion compensation arrangement and an optical signal detector.

13. The terahertz device according to claim 1 , wherein the terahertz device further comprises an input coupler and/or an output coupler, wherein the couplers are passive optical components forming a splitter or a combiner.

14. The terahertz device according to claim 1 , wherein the terahertz device comprises one or more passive antennas arranged outside the immediate vicinity of the first and second waveguide branches.

15. The terahertz device according to claim 1 , wherein the terahertz device comprises a set of waveguide branches comprising the first waveguide branch and the second waveguide branch and further comprising at least a third waveguide branch configured to allow optical signals to propagate through the third waveguide branch and being a nonlinear dielectric element with a thickness of at most 500 micrometers.

16. A terahertz system comprising the terahertz device according to claim 1 , and wherein the system further comprises one or more input optical fibers coupled to one or more input ports of the terahertz device and one or more output optical fibers coupled to one or more output ports of the terahertz device.

17. The terahertz system according to claim 16 , wherein a signal modulator is arranged along the one or more of the input optical fibers to change the phase, intensity and/or polarization of the optical signal upon electric stimuli, and/or the one or more input optical fibers comprises a dispersion compensation arrangement to achieve dispersion compensation of the optical signals.

18. The terahertz system according to claim 16 , wherein the system further comprises one or more spectral filters arranged along the one or more input optical fibers and/or along the one or more output optical fibers.

19. The terahertz system according to claim 16 , wherein the system comprises a first output optical fiber and a first optical signal detector configured to detect the optical signal propagating in the first output optical fiber, wherein the system further comprises a second output optical fiber and a second optical signal detector configured to detect the optical signal propagating in the second output optical fiber, and wherein the system further comprises a computing unit configured to compute a function from the optical signal from the first optical detector and from the optical signal from the second optical signal detector.

20. A method of operating an on-chip terahertz device for detecting or emitting or for both detecting and emitting electromagnetic waves in the terahertz frequency range, the terahertz device comprising:

a first waveguide branch and a second waveguide branch, the first and second waveguide branches being configured to allow optical signals to propagate through the first and second waveguide branches, the first and second waveguide branches being nonlinear dielectric elements with a thickness of at most 500 micrometers;

an antenna arrangement comprising at least two antennas for capturing and/or emitting electromagnetic waves in the terahertz frequency range, the antennas being placed along at least one of the waveguide branches in an immediate vicinity of the respective waveguide branch and/or at least partially around the respective waveguide branch to at least partially enclose the respective waveguide branch in a respective antenna gap of the respective antenna; and

wherein the method comprises the step of selectively feeding a first optical signal and a second optical signal into any of the first and second waveguide branches to selectively operate the terahertz device as a terahertz wave detector, a terahertz wave generator and/or a terahertz wave transceiver, and wherein the first and second optical signals are characterized by one or more mutually different signal properties.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 25, 2023
From: BENEA-CHELMUS, ILEANA-CRISTINA; FAIST, JEROME; TOMASINO, ALESSANDRO; HERTER, ALEXA; LAMPERT ALMAHMOUD, YAZAN
To: ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL); ETH ZURICH; PRESIDENT AND FELLOWS OF HARVARD COLLEGE
Reel/Frame 064708/0041 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 25, 2023
From: LONCAR, MARKO; SHAMS-ANSARI, AMIRHASSAN
To: PRESIDENT AND FELLOWS OF HARVARD COLLEGE
Reel/Frame 064708/0102 →
Continuity (1)
Related Publication 20240429627A1 · Dec 26, 2024
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