Memory array, memory, preparing method and writing method
Disclosed are a memory array, a memory, a preparing method and a writing method. Some embodiments relate to a memory array for a magnetoresistive random access memory and a manufacturing method thereof. The memory array includes: a plurality of memory cells arranged in an array and a conductor layer; each of the memory cells includes: a write transistor, a first end of which is coupled to top electrode wiring; a magnetic tunnel junction MTJ, one end of which close to a reference layer is coupled to a second end of the write transistor; a side surface of the conductor layer is coupled to end faces of one end of all of the magnetic tunnel junctions MTJs close to a free layer.
1. A memory array, comprising:
a plurality of memory cells arranged in an array and a conductor layer;
each of the memory cells comprising:
a write transistor configured to couple a first end thereof to top electrode wiring, the write transistor comprising at least one of a conventional transistor, a tunneling field effect transistor, a FinFET, or a vertical fully surrounding gate transistor; and
a magnetic tunnel junction (MTJ) configured to couple one end thereof close to a reference layer to a second end of the write transistor,
wherein, a side surface of the conductor layer is coupled to an end face close to a free layer, of each MTJ of each memory cell, respectively; two ends of the conductor layer are coupled to high-level wiring VDD and low-level wiring GND, respectively; the write transistors in each memory cell are integrated in a first wafer, the MTJs in each memory cell are integrated in a second wafer, and the first wafer and the second wafer are connected together by bonding, aiming to couple the writing transistors to corresponding MTJs.
2. The memory array according to claim 1 , wherein both the high-level wiring VDD and the low-level wiring GND are provided with switching elements.
3. The memory array according to claim 1 , wherein,
the conductor layer is elongated with a top area greater than bottom areas of all of the magnetic tunnel junctions, and a bottom shape of the magnetic tunnel junctions are completely embedded in a top shape of the conductor layer.
4. A memory, comprising: a plurality of memory array groups, each comprising a pair of memory arrays, high-level wiring VDD and low-level wiring GND;
the memory array comprising a plurality of memory cells arranged in an array and a conductor layer;
each of the memory cells comprising:
a write transistor configured to couple a first end thereof to top electrode wiring, the write transistor comprising at least one of a conventional transistor, a tunneling field effect transistor, a FinFET, or a vertical fully surrounding gate transistor; and
an MTJ configured to couple an end thereof close to a reference layer to a second end of the write transistor,
wherein, a side surface of the conductor layer is coupled to an end face close to a free layer, of each MTJs of each memory cell, respectively, and two ends of the conductor layer are coupled to the high-level wiring VDD and the low-level wiring GND respectively; wherein the write transistors in each memory cell are integrated in a first wafer, the MTJs in each memory cell are integrated in a second wafer, and the first wafer and the second wafer are connected together by bonding, aiming to couple the writing transistors to corresponding MTJs.
5. The memory according to claim 4 , wherein the high-level wiring VDD is located between a pair of memory arrays in each of the memory array groups; the ends of the conductor layers of the pair of memory arrays close to each other are coupled to the high-level wiring VDD, respectively, and the ends of the conductor layers of the pair of memory arrays facing away from each other are coupled to the low-level wiring GND, respectively.
6. The memory according to claim 4 , wherein the low-level wiring GND is located between a pair of memory arrays in each of the memory array groups; the ends of the conductor layers of the pair of memory arrays close to each other are coupled to the low-level wiring GND, respectively, and the ends of the conductor layers of the pair of memory arrays facing away from each other are coupled to the high-level wiring VDD, respectively.
7. A method for preparing a memory array according to claim 1 , comprising:
integrating a plurality of write transistors in a first wafer, and coupling first ends thereof to top electrode wiring;
integrating a plurality of MTJs corresponding to the write transistors one by one in a second wafer;
bonding the first wafer and the second wafer, aiming to couple ends of the MTJs close to a reference layer to second ends of the write transistors;
forming a conductor layer, and coupling a side surface thereof to an end face close to a free layer, of each MTJ integrated into the second wafer; and
coupling two ends of the conductor layer to high-level wiring VDD and low-level wiring GND, respectively.
8. A method for writing data using the memory array according to claim 1 , comprising:
turning on the high-level wiring VDD and the low-level wiring GND, to set all of the MTJs in the memory array in a first resistance state, wherein the first resistance state is corresponding to a first numerical value, and a second resistance state opposite to the first resistance state is corresponding to a second numerical value;
selecting the MTJ at a corresponding position according to the second numerical value written into a numerical value string and a position thereof in the numerical value string; and
turning on the write transistor coupled to the MTJ and turning on one of the high-level wiring VDD and the low-level wiring GND, to switch the MTJ at the corresponding position to the second resistance state.