Package structure, antenna module and probe card
The present disclosure provides a package structure, an antenna module, and a probe card. The package structure includes a connection member and a first redistribution structure disposed on the connection member. The connection member includes a conductive connector and an insulation layer surrounding the conductive connector. The first redistribution structure includes a first dielectric layer, and a first wiring pattern, and a first device. The first dielectric layer is disposed on the connection member. The first wiring pattern is disposed in the first dielectric layer. The first device is disposed above the first dielectric layer and is electrically connected to the conductive connector.
1. A package structure, comprising:
a connection member comprising a conductive connector and an insulation layer surrounding the conductive connector; and
a first redistribution structure disposed on the connection member and comprising:
a first dielectric layer disposed on the connection member;
first wiring pattern disposed in the first dielectric layer;
a first device disposed above the first dielectric layer and electrically connected to the conductive connector; and
dummy patterns, wherein the dummy patterns are disposed in the first dielectric layer and electrically isolated from the conductive connector.
2. The package structure of claim 1 , wherein the dummy patterns are configured to make a degree of planarization of the first dielectric layer ranging from about 40% to about 60%, so that the first dielectric layer comprises convex portions located on the dummy patterns and concave portions located between two neighboring dummy patterns, and the first device is disposed on the convex portions and the concave portions of the first dielectric layer.
3. The package structure of claim 2 , wherein the first device comprises a capacitor structure, and the capacitor structure comprises:
a first electrode disposed on surfaces of the convex portions and the concave portions of the first dielectric layer;
a dielectric disposed on the first electrode;
a second electrode disposed on the dielectric; and
compensation structures disposed on the second electrode and being filled into the concave portions of the first dielectric layer.
4. The package structure of claim 3 , further comprising a second redistribution structure disposed on the first redistribution structure, wherein the second redistribution structure comprises:
a second dielectric layer disposed on the capacitor structure, wherein the compensation structures are configured to make a degree of planarization of the second dielectric layer on the compensation structures greater than about 95%;
second wiring patterns disposed on the second dielectric layer; and
a second device disposed on a portion of the second dielectric layer where the compensation structures are disposed thereunder and electrically connected to the first device.
5. The package structure of claim 4 , wherein a second wiring pattern that is electrically connected to the capacitor structure among the second wiring patterns is spaced apart from the second device by at least 10 μm when viewing from top.
6. The package structure of claim 1 , wherein the dummy patterns are configured to make a degree of planarization of the first dielectric layer greater than about 95%.
7. The package structure of claim 6 , further comprising a second redistribution structure disposed on the first redistribution structure, wherein the second redistribution structure comprises:
a second dielectric layer disposed on the first device;
a second device disposed on the second dielectric layer and electrically connected to the first wiring pattern;
a third dielectric layer disposed on the second device; and
second wiring patterns disposed in the third dielectric layer and electrically connected to the second device.
8. The package structure of claim 7 , wherein the first device comprises a wiring pattern, and the wiring pattern is configured to make a degree of planarization of the second dielectric layer ranging from about 40% to about 60%, so that the second dielectric layer comprises convex portions located on the wiring pattern and concave portions located between two neighboring portion of the wiring pattern, and the second device is disposed on the convex portions and the concave portions of the second dielectric layer.
9. The package structure of claim 7 , wherein the second redistribution structure comprises a third device disposed in the third dielectric layer, and the third device is electrically connected to the second device through the second wiring patterns.
10. An antenna module, comprising:
a connection member comprising a conductive connector and an insulation layer surrounding the conductive connector;
a redistribution structure disposed on a first side of the connection member and comprising:
a first wiring pattern disposed on the connection member and electrically connected to the conductive connector;
a first dielectric layer disposed on the connection member and covering the first wiring pattern; and
an antenna device disposed above the first dielectric layer and configured to transmit and/or receive signals, wherein the antenna device is electrically connected to the first wiring pattern; and
a chip disposed below a second side of the connection member that is opposite to the first side, wherein the chip is electrically connected to the antenna device.
11. The antenna module of claim 10 , wherein the redistribution structure comprises dummy patterns, and the dummy patterns are disposed in the first dielectric layer and are electrically isolated from the conductive connector.
12. The antenna module of claim 11 , wherein the dummy patterns are configured to make a degree of planarization of the first dielectric layer greater than about 95%.
13. The antenna module of claim 12 , wherein the redistribution structure comprises a first device disposed on the first dielectric layer and a second dielectric layer disposed on the first dielectric layer and covering the first device, and the antenna device is disposed above the second dielectric layer.
14. The antenna module of claim 13 , wherein the first device comprises a wiring pattern, and the wiring pattern is configured to make a degree of planarization of the second dielectric layer ranging from about 40% to about 60%, so that the second dielectric layer comprises convex portions located on the wiring pattern and concave portions located between two neighboring portions of the wiring pattern.
15. The antenna module of claim 14 , wherein the redistribution structure comprises a second device disposed on the convex portions and the concave portions of the second dielectric layer, and the second device is disposed between the antenna device and the first device and is electrically connected to the antenna device and the first device.
16. A probe card, comprising:
a connection member comprising a conductive connector and an insulation layer surrounding the conductive connector;
a first redistribution structure disposed on a first side of the connection member and comprising:
a first dielectric layer disposed on the connection member;
a first wiring pattern disposed in the first dielectric layer; and
a first device disposed above the first dielectric layer and electrically connected to the conductive connector;
a conductive probe disposed above the first redistribution structure and electrically connected to the first device; and
a substrate disposed on a second side of the connection member that is opposite to the first side, and a wiring pattern in the substrate is electrically connected to the first device of the first redistribution structure through the connection member.
17. The probe card of claim 16 , wherein the first redistribution structure comprises dummy patterns, and the dummy patterns are disposed in the first dielectric layer and are electrically isolated from the conductive connector.
18. The probe card of claim 17 , wherein the dummy patterns are configured to make a degree of planarization of the first dielectric layer ranging from about 40% to about 60%, so that the first dielectric layer comprises convex portions located on the dummy patterns and concave portions located between two neighboring dummy patterns, and the first device is disposed in the concave portions of the first dielectric layer.
19. The probe card of claim 16 , further comprising a second redistribution structure disposed on the first redistribution structure, wherein the second redistribution structure comprises:
a second dielectric layer disposed on the first device;
second wiring patterns disposed in the second dielectric layer;
a second device disposed in the second dielectric layer and electrically connected to the first device; and
a connection pad disposed on the second dielectric layer and electrically connected to the conductive probe.